ES2082007T3

Method for preparing vaporized reactants for chemical vapor deposition

Abstract

VAPORIZED REACTANTS USEFUL FOR CHEMICAL VAPOR DEPOSITION OF A COATING ON THE SURFACE OF A HOT SUBSTRATE, ARE PREPARED BY HEATING INITIALLY A LIQUID COATING PRESSURE (10), INJECTING THE FLOOR COATING (10) SIMULTANEOUSLY A MIXING GAS (19, 20) IN THE VAPORIZATION CHAMBER, HEATING THE LIQUID AND THE MIXING GAS TO MAKE THE LIQUID VAPORIZE TO A TEMPERATURE LOWER THAN THE STANDARD VAPORIZATION TEMPERATURE, AND COMPLETELY MIXING THE COATING PRECURSOR VAPOR AND A MIXING GAS, FOR BURNING FOR THE PYROLYTIC DECOMPOSITION ON THE SURFACE OF THE HOT SUBSTRATE. A HORIZONTAL THIN FILM EVAPORATOR PROVIDES A VAPORIZATION CHAMBER (12) ESPECIALLY SUITABLE FOR THIS PROCESS.

ES2082007T3, drawing sheet 1
Sheet 1 of 1

Term

Term ended

Projected expiry passed 15 October 2010, 15.9 years ago.

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