Method for preparing vaporized reactants for chemical vapor deposition
Abstract
VAPORIZED REACTANTS USEFUL FOR CHEMICAL VAPOR DEPOSITION OF A COATING ON THE SURFACE OF A HOT SUBSTRATE, ARE PREPARED BY HEATING INITIALLY A LIQUID COATING PRESSURE (10), INJECTING THE FLOOR COATING (10) SIMULTANEOUSLY A MIXING GAS (19, 20) IN THE VAPORIZATION CHAMBER, HEATING THE LIQUID AND THE MIXING GAS TO MAKE THE LIQUID VAPORIZE TO A TEMPERATURE LOWER THAN THE STANDARD VAPORIZATION TEMPERATURE, AND COMPLETELY MIXING THE COATING PRECURSOR VAPOR AND A MIXING GAS, FOR BURNING FOR THE PYROLYTIC DECOMPOSITION ON THE SURFACE OF THE HOT SUBSTRATE. A HORIZONTAL THIN FILM EVAPORATOR PROVIDES A VAPORIZATION CHAMBER (12) ESPECIALLY SUITABLE FOR THIS PROCESS.

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Projected expiry passed 15 October 2010, 15.9 years ago.
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1 sheet
Sheet 1
42 members in 28 offices
Priority claims10
| Document | Office | Kind | Date |
|---|---|---|---|
| 19890422636 | United States of America | – | |
| 42263689 | United States of America | A | |
| 42263689 | United States of America | A | |
| 19900591121 | United States of America | – | |
| 59112190 | United States of America | A | |
| 59112190 | United States of America | A | |
| 422636 | – | – | – |
| 591121 | – | – | – |
| US19890422636 | – | – | – |
| US19900591121 | – | – | – |
Members42
| Document | Office | Kind | |
|---|---|---|---|
| CA2027761A1 | Canada | A1 | |
| IE903601A1 | Ireland | A1 | |
| WO9105743A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU6529790A | Australia | A | |
| CN1051899A | China | A | |
| FI912845A0 | Finland | A0 | |
| NO912320D0 | Norway | D0 | |
| NO912320L | Norway | L | |
| ZA908296B | South Africa | B | |
| PT95613A | Portugal | A | |
| BR9005227A | Brazil | A | |
| EP0450016A1 | European Patent Office (EPO) | A1 | |
| HU907561D0 | Hungary | D0 | |
| HUT57682A | Hungary | A | |
| US5090985A | United States of America | A | |
| JPH04502305A | Japan | A | |
| KR920701064A | Republic of Korea | A | |
| AU632175B2 | Australia | B2 | |
| NZ235700A | New Zealand | A | |
| EP0450016A4 | European Patent Office (EPO) | A4 | |
| TR25795A | Türkiye | A | |
| YU194490A | Yugoslavia, later Serbia and Montenegro (until 2006) | A | |
| BG94619A | Bulgaria | A | |
| MX173282B | Mexico | B | |
| CN1025322C | China | C | |
| PL167110B1 | Poland | B1 | |
| MY107107A | Malaysia | A | |
| YU47521B | Yugoslavia, later Serbia and Montenegro (until 2006) | B | |
| EP0450016B1 | European Patent Office (EPO) | B1 | |
| AT133147T | Austria | T | |
| ATE133147T1 | Austria | T1 | |
| DE69024938D1 | Germany | D1 | |
| ES2082007T3This record | Spain | T3 | |
| RU2062258C1 | Russian Federation | C1 | |
| DE69024938T2 | Germany | T2 | |
| RO111756B1 | Romania | B1 | |
| PT95613B | Portugal | B | |
| HU213646B | Hungary | B | |
| KR0147042B1 | Republic of Korea | B1 | |
| CZ502090A3 | Czechia | A3 | |
| NO304109B1 | Norway | B1 | |
| JP3078835B2 | Japan | B2 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Definitive protectionFG2A | FG2A |
Numbers
- Publication
- 2082007
- Publication, DOCDB
- 2082007
- Publication, EPODOC
- ES2082007T
- Application
- 90915247
- Application, DOCDB
- 90915247
- Application, EPODOC
- ES19900915247T
Titles2
- Spanish
- METODO PARA PREPARAR REACTIVOS VAPORIZADOS PARA EL DEPOSITO QUIMICO POR VAPOR.
- English
- METHOD FOR PREPARING VAPORIZED REAGENTS FOR THE CHEMICAL VAPOR TANK.
Classification
- CPC, 6
- C03C17/245
- C03B37/01413
- C03B2207/85
- C03C2217/229
- C03C2218/152
- C23C16/4481
- IPC, 7
- C03C17 22
- B05D5 06
- C03B37 014
- C03C17 245
- C23C16 40
- C23C16 44
- C23C16 448