ATE133147T1 - METHOD FOR PREPARING VAPORIZED REACTANTS FOR CHEMICAL VAPOR DEPOSITION

42 members in 28 offices

This recordMember, by publication datePriority claim18 more offices are in the list below

Priority claims
Document	Office	Kind	Date
42263689	United States of America	A	1989-10-17
59112190	United States of America	A	1990-10-04

Family members, oldest first
Document	Office	Kind
CA2027761A1	Canada	A1	1991-04-18
IE903601A1	Ireland	A1	1991-04-24
WO9105743A1	World Intellectual Property Organization (WIPO)	A1	1991-05-02
AU6529790A	Australia	A	1991-05-16
CN1051899A	China	A	1991-06-05
FI912845A0	Finland	A0	1991-06-13
NO912320D0	Norway	D0	1991-06-14
NO912320L	Norway	L	1991-06-14
ZA908296B	South Africa	B	1991-08-28
PT95613A	Portugal	A	1991-09-13
BR9005227A	Brazil	A	1991-09-17
EP0450016A1	European Patent Office (EPO)	A1	1991-10-09
HU907561D0	Hungary	D0	1991-10-28
HUT57682A	Hungary	A	1991-12-30
US5090985A	United States of America	A	1992-02-25
JPH04502305A	Japan	A	1992-04-23
KR920701064A	Republic of Korea	A	1992-08-11
AU632175B2	Australia	B2	1992-12-17
NZ235700A	New Zealand	A	1992-12-23
EP0450016A4	European Patent Office (EPO)	A4	1993-03-03
TR25795A	Türkiye	A	1993-09-01
YU194490A	Yugoslavia, later Serbia and Montenegro (until 2006)	A	1993-10-20
BG94619A	Bulgaria	A	1993-12-24
MX173282B	Mexico	B	1994-02-14
CN1025322C	China	C	1994-07-06
PL167110B1	Poland	B1	1995-07-31
MY107107A	Malaysia	A	1995-09-30
YU47521B	Yugoslavia, later Serbia and Montenegro (until 2006)	B	1995-10-03
EP0450016B1	European Patent Office (EPO)	B1	1996-01-17
AT133147T	Austria	T	1996-02-15
ATE133147T1This record	Austria	T1	1996-02-15
DE69024938D1	Germany	D1	1996-02-29
ES2082007T3	Spain	T3	1996-03-16
RU2062258C1	Russian Federation	C1	1996-06-20
DE69024938T2	Germany	T2	1996-08-14
RO111756B1	Romania	B1	1997-01-30
PT95613B	Portugal	B	1997-08-29
HU213646B	Hungary	B	1997-09-29
KR0147042B1	Republic of Korea	B1	1998-08-17
CZ502090A3	Czechia	A3	1998-10-14
NO304109B1	Norway	B1	1998-10-26
JP3078835B2	Japan	B2	2000-08-21

1 legal event, as the office reported them to INPADOC

Legal events, newest first
	Event	Code
1996-07-15	Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER	RER

German: VERFAHREN ZUR DARSTELLUNG DAMPFFÖRMIGER REAGENZIEN FÜR DIE CHEMISCHE ABSCHEIDUNG AUS DER DAMPFPHASE
English: METHOD FOR PREPARING VAPOR REAGENTS FOR CHEMICAL DEPOSIT FROM THE VAPOR PHASE

CPC, 6: C03C17/245
C03B37/01413
C03B2207/85
C03C2217/229
C03C2218/152
C23C16/4481
Filled: the office’s first classification
IPC, 7: C03C17 22
B05D5 06
C03B37 014
C03C17 245
C23C16 40
C23C16 44
C23C16 448

Method for preparing vaporized reactants for chemical vapor deposition