Wet chemical treatment installation
Abstract
PCT No. PCT/EP95/05153 Sec. 371 Date Jul. 3, 1997 Sec. 102(e) Date Jul. 3, 1997 PCT Filed Dec. 29, 1995 PCT Pub. No. WO96/21241 PCT Pub. Date Jul. 11, 1996A device for chemical wet treatment of substrates has a tank containing a treatment fluid for treating the substrates. At least one substrate carrier for supporting the substrates within the tank is provided. At least one substrate lifting device for lifting the substrates off the substrate carrier is provided. A lifting apparatus for lifting and lowering the substrate carrier is positioned in the tank. The lifting apparatus has a first transport carriage connected to the substrate lifting device and a second transport carriage connected to a holder of the substrate carrier. The first and second transport carriages are connected to one another by a jointed connection.
Term
Term ended
Projected expiry passed 25 June 2017, 9.2 years ago.
- Priority
- Filed and published
- Projected expiry
- Today
21 members in 11 offices
Priority claims12
| Document | Office | Kind | Date |
|---|---|---|---|
| 19500239 | Germany | A | |
| 19500239 | Germany | A | |
| 19546990 | Germany | A | |
| 19546990 | Germany | A | |
| 9505153 | European Patent Office (EPO) | W | |
| 9505153 | European Patent Office (EPO) | W | |
| 19500239P | – | – | – |
| 19546990P | – | – | – |
| DE1995100239 | – | – | – |
| DE1995146990 | – | – | – |
| PCTEP9505153 | – | – | – |
| WO1995EP05153 | – | – | – |
Members21
| Document | Office | Kind | |
|---|---|---|---|
| CA2209339A1 | Canada | A1 | |
| DE19546990A1 | Germany | A1 | |
| WO9621241A1 | World Intellectual Property Organization (WIPO) | A1 | |
| FI972733AThis record | Finland | A | |
| DE19546990C2 | Germany | C2 | |
| EP0801814A1 | European Patent Office (EPO) | A1 | |
| CN1171858A | China | A | |
| JPH10503327A | Japan | A | |
| KR980701133A | Republic of Korea | A | |
| US5902402A | United States of America | A | |
| TW399224B | Taiwan Province of China | B | |
| JP3088463B2 | Japan | B2 | |
| DE19549487C2 | Germany | C2 | |
| KR100275166B1 | Republic of Korea | B1 | |
| DE19549490C2 | Germany | C2 | |
| DE19549488C2 | Germany | C2 | |
| EP0801814B1 | European Patent Office (EPO) | B1 | |
| AT205017T | Austria | T | |
| ATE205017T1 | Austria | T1 | |
| DE59509568D1 | Germany | D1 | |
| CN1084048C | China | C |
Numbers
- Publication, DOCDB
- 972733
- Publication, EPODOC
- FI972733
- Application
- 972733
- Application, DOCDB
- 972733
- Application, EPODOC
- FI19970002733
Titles3
- Finnish
- Kemiallinen märkäkäsittelylaitteisto
- Swedish
- En kemisk våtbehandlingsanläggning
- English
- Chemical wet treatment equipment
Classification
- CPC, 7
- H01L21/67017
- H01L21/67781
- Y10S134/902
- Y10S414/137
- Y10S414/141
- Y10S414/14
- Y10S118/02
- IPC, 4
- H01L21 00
- H01L21 304
- H01L21 306
- H01L21 677