Nova Patents
ATE205017T1

Wet chemical treatment installation

Abstract

PCT No. PCT/EP95/05153 Sec. 371 Date Jul. 3, 1997 Sec. 102(e) Date Jul. 3, 1997 PCT Filed Dec. 29, 1995 PCT Pub. No. WO96/21241 PCT Pub. Date Jul. 11, 1996A device for chemical wet treatment of substrates has a tank containing a treatment fluid for treating the substrates. At least one substrate carrier for supporting the substrates within the tank is provided. At least one substrate lifting device for lifting the substrates off the substrate carrier is provided. A lifting apparatus for lifting and lowering the substrate carrier is positioned in the tank. The lifting apparatus has a first transport carriage connected to the substrate lifting device and a second transport carriage connected to a holder of the substrate carrier. The first and second transport carriages are connected to one another by a jointed connection.

Term

Term ended

Projected expiry passed 29 December 2015, 10.7 years ago.

  1. Priority
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  3. Published
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23 members in 11 offices

This recordMember, by publication datePriority claim1 more office is in the list below

Priority claims3

Priority claims
DocumentOfficeKindDate
19500239GermanyA
19546990GermanyA
9505153European Patent Office (EPO)W

Members23

Family members, oldest first
DocumentOfficeKind
CA2209339A1CanadaA1
DE19546990A1GermanyA1
WO9621241A1World Intellectual Property Organization (WIPO)A1
FI972733AFinlandA
FI972733A7FinlandA7
FI972733LFinlandL
DE19546990C2GermanyC2
EP0801814A1European Patent Office (EPO)A1
CN1171858AChinaA
JPH10503327AJapanA
KR980701133ARepublic of KoreaA
US5902402AUnited States of AmericaA
TW399224BTaiwan Province of ChinaB
JP3088463B2JapanB2
DE19549487C2GermanyC2
KR100275166B1Republic of KoreaB1
DE19549490C2GermanyC2
DE19549488C2GermanyC2
EP0801814B1European Patent Office (EPO)B1
AT205017TAustriaT
ATE205017T1This recordAustriaT1
DE59509568D1GermanyD1
CN1084048CChinaC