EP3910285C0
Scatterometry measurement of asymmetric structures
Abstract
This record has no abstract on file.
Term
4 yearsto projected expiry
Projected expiry 22 September 2030, counted from filing; an application has no term until it is granted.
- Priority and filed
- Published
- Today
- Projected expiry
13 members in 4 offices
Members13
| Document | Office | Kind | |
|---|---|---|---|
| US2011080585A1 | United States of America | A1 | |
| WO2011043930A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW201140026A | Taiwan Province of China | A | |
| EP2486378A1 | European Patent Office (EPO) | A1 | |
| US8525993B2 | United States of America | B2 | |
| TWI427284B | Taiwan Province of China | B | |
| EP2486378A4 | European Patent Office (EPO) | A4 | |
| EP2486378B1 | European Patent Office (EPO) | B1 | |
| EP3910285A1 | European Patent Office (EPO) | A1 | |
| EP3910285A4 | European Patent Office (EPO) | A4 | |
| EP3910285B1 | European Patent Office (EPO) | B1 | |
| EP3910285C0This record | European Patent Office (EPO) | C0 | |
| EP4650733A2 | European Patent Office (EPO) | A2 |
50 legal events, as 5 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
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| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Gb: european patent ceased through non-payment of renewal feeCeasedGBPC | GBPC | EP | |
| Ip right lapsedLapsedST27 STATUS EVENT CODE: U-0-0-H10-H13 (AS PROVIDED BY THE NATIONAL OFFICE)H13 | H13 | CH | |
| No opposition filedOpposition26N | 26N | EP | |
| Ip right review requestedST27 STATUS EVENT CODE: U-0-0-L10-L00 (AS PROVIDED BY THE NATIONAL OFFICE)L10 | L10 | CH | |
| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Renewal fee for the european patent with unitary effect paidU20 | U20 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Unitary effect registeredU07 | U07 | EP | |
| Request for unitary effect filedU01 | U01 | EP | |
| European patents granted designating irelandGrantedFG4D | FG4D | IE | |
| Dpma publication of mentioned ep patent grantGrantedR096 | R096 | DE | |
| European patent takes effect as a national patent in ch/liEP | EP | CH | |
| Divisional application: reference to earlier applicationAC | AC | EP | |
| Designated contracting statesAK | AK | EP | |
| European patent grantedGrantedFG4D | FG4D | GB | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE PATENT HAS BEEN GRANTEDSTAA | STAA | EP | |
| Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS | GRAS | EP | |
| Intention to grant announcedINTG | INTG | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA | STAA | EP | |
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| Information related to disapproval of communication of intention to grant by the applicant or resumption of examination proceedings by the epo deletedORIGINAL CODE: EPIDOSDIGR1GRAJ | GRAJ | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: EXAMINATION IS IN PROGRESSSTAA | STAA | EP | |
| Intention to grant announcedINTG | INTG | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA | STAA | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: EXAMINATION IS IN PROGRESSSTAA | STAA | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting states (corrected)RBV | RBV | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: REQUEST FOR EXAMINATION WAS MADESTAA | STAA | EP | |
| Divisional application: reference to earlier applicationAC | AC | EP | |
| Designated contracting statesAK | AK | EP | |
| Issuance of search results under rule 164(2) epcB565 | B565 | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN PUBLISHEDSTAA | STAA | EP |
Numbers
- Publication
- 3910285
- Application
- 21175735
Titles3
- German
- SCATTEROMETRIEMESSUNG ASYMMETRISCHER STRUKTUREN
- English
- SCATTEROMETRY MEASUREMENT OF ASYMMETRIC STRUCTURES
- French
- MESURE DE STRUCTURES ASYMÉTRIQUES PAR DIFFUSIOMÉTRIE
Classification
- CPC, 7
- G01N21/211
- G01N2021/213
- G01N2021/214
- G01B2210/56
- G03F7/70633
- G03F7/70625
- G01B11/065
- IPC, 3
- G01B11 24
- G01J4 00
- G01N21 21
Designated states37
- Contracting states, 37
- Albania
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Croatia
- Hungary
- Ireland
- Iceland
- Italy
- Liechtenstein
- Lithuania
- Luxembourg
- Latvia
and 13 moreShow fewer
- Monaco
- North Macedonia
- Malta
- Netherlands (Kingdom of the)
- Norway
- Poland
- Portugal
- Romania
- Sweden
- Slovenia
- Slovakia
- San Marino
- Türkiye