EP3910285A4

Scatterometry measurement of asymmetric structures

Abstract

This record has no abstract on file.

Term

4 yearsto projected expiry

Projected expiry 22 September 2030, counted from filing; an application has no term until it is granted.

10 members in 4 offices

This recordMember, by publication datePriority claim

Priority claims14

Priority claims
Document	Office	Kind	Date
24943909	United States of America	P	2009-10-07
26031409	United States of America	P	2009-11-11
69697410	United States of America	A	2010-01-29
10822422	European Patent Office (EPO)	A	2010-09-22
2010049878	United States of America	W	2010-09-22
108224221	–	–	–
24943909P	–	–	–
26031409P	–	–	–
69697410	–	–	–
EP20100822422	–	–	–
US20090249439P	–	–	–
US20090260314P	–	–	–
US20100696974	–	–	–
WO2010US49878	–	–	–

Members10

Family members, oldest first
Document	Office	Kind
US2011080585A1	United States of America	A1	2011-04-07
WO2011043930A1	World Intellectual Property Organization (WIPO)	A1	2011-04-14
TW201140026A	Taiwan Province of China	A	2011-11-16
EP2486378A1	European Patent Office (EPO)	A1	2012-08-15
US8525993B2	United States of America	B2	2013-09-03
TWI427284B	Taiwan Province of China	B	2014-02-21
EP2486378A4	European Patent Office (EPO)	A4	2017-12-20
EP2486378B1	European Patent Office (EPO)	B1	2021-05-26
EP3910285A1	European Patent Office (EPO)	A1	2021-11-17
EP3910285A4This record	European Patent Office (EPO)	A4	2021-11-17

8 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2022-06-22	Request for examination filed17P	17P
2022-06-22	Designated contracting states (corrected)RBV	RBV
2022-05-20	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: REQUEST FOR EXAMINATION WAS MADESTAA	STAA
2021-11-17	Divisional application: reference to earlier applicationAC	AC
2021-11-17	Designated contracting statesAK	AK
2021-11-17	Issuance of search results under rule 164(2) epcB565	B565
2021-10-15	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI
2021-10-15	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION HAS BEEN PUBLISHEDSTAA	STAA