EP1580596A3

Structure formed with template having nanoscale features

Abstract

A structure 100 is provided that is formed with a template 500 defining a pattern having nanoscale features. The template 500 may be positioned on a substrate 420 and include a resist layer 230 having openings formed therein, where the template 500 is configured to accommodate the controlled assembly of nanoscale objects 910.

Term

Term ended

Projected expiry passed 22 March 2025, 1.5 years ago.

Every citation, both waysCites: the store holds 8 of 9

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP1484644A2	Cites	European Patent Office (EPO)	PX	Search report	1-32
US2002119251A1	Cites	United States of America	XY	Search report	1,22-28
US2003032046A1	Cites	United States of America	A	Search report	1-32
US2003054342A1	Cites	United States of America	Y	Search report	1-32
WO2004092836A1	Cites	World Intellectual Property Organization (WIPO)	PX	Search report	1-32
US2005118338A1	Cites	United States of America	E	Search report	1-32
US5776748A	Cites	United States of America	Y	Search report	1-32
US5948621A	Cites	United States of America	X	Search report	1-28
CHOU S Y ET AL: "Imprint Lithography with Sub-10 nm Feature Size and High Throughput", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 35, no. 1, February 1997 (1997-02-01), pages 237 - 240, XP004054048, ISSN: 0167-9317	Non-patent	–	–	Search report	–
PFEIFFER K ET AL: "Polymer stamps for nanoimprinting", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 61-62, July 2002 (2002-07-01), pages 393 - 398, XP004360560, ISSN: 0167-9317	Non-patent	–	–	Search report	–
SCHIFT H ET AL: "Chemical nano-patterning using hot embossing lithography", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 61-62, July 2002 (2002-07-01), pages 423 - 428, XP004360564, ISSN: 0167-9317	Non-patent	–	–	Search report	–
ELSNER C ET AL: "3D-microstructure replication processes using UV-curable acrylates", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 65, no. 1-2, January 2003 (2003-01-01), pages 163 - 170, XP004392360, ISSN: 0167-9317	Non-patent	–	–	Search report	–

10 members in 4 offices

This recordMember, by publication datePriority claim

Priority claims5

Priority claims
Document	Office	Kind	Date
807873	United States of America	–	2004-03-23
80787304	United States of America	A	2004-03-23
80787304	United States of America	A	2004-03-23
807873	–	–	–
US20040807873	–	–	–

Members10

Family members, oldest first
Document	Office	Kind
EP1580596A2	European Patent Office (EPO)	A2	2005-09-28
US2005214661A1	United States of America	A1	2005-09-29
JP2005271198A	Japan	A	2005-10-06
TW200536775A	Taiwan Province of China	A	2005-11-16
EP1580596A3This record	European Patent Office (EPO)	A3	2007-11-28
JP2008260297A	Japan	A	2008-10-30
US7597814B2	United States of America	B2	2009-10-06
JP4674366B2	Japan	B2	2011-04-20
TWI353340B	Taiwan Province of China	B	2011-12-01
EP1580596B1	European Patent Office (EPO)	B1	2013-09-04

40 legal events, as 4 offices reported them to INPADOC

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	Event	Code	Office
2025-04-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2025-04-16	Patent expired after termination of 20 yearsExpiredPE20	PE20	GB
2025-03-22	Expiry of rightR071	R071	DE
2024-05-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2024-04-30	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2024-04-30	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2023-07-12	Opt-out of the competence of the unified patent court (upc) registeredP01	P01	EP
2018-02-27	Fee paymentPLFP	PLFP	FR
2017-02-27	Fee paymentPLFP	PLFP	FR
2016-02-23	Fee paymentPLFP	PLFP	FR
2014-09-18	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2014-08-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-08-13	No opposition filedOpposition26N	26N	EP
2014-07-11	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2014-07-11	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2014-06-05	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2013-10-31	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2013-09-04	Designated contracting statesAK	AK	EP
2013-09-04	European patent grantedGrantedFG4D	FG4D	GB
2013-08-02	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2013-07-31	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2013-05-01	Intention to grant announcedINTG	INTG	EP
2013-04-02	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2013-03-20	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2013-03-20	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2013-03-20	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2012-09-26	Party data changed (applicant data changed or rights of an application transferred)RAP1	RAP1	EP
2011-03-09	Party data changed (applicant data changed or rights of an application transferred)RAP1	RAP1	EP
2009-07-01	First examination report despatched17Q	17Q	EP
2008-08-06	Designation fees paidAKX	AKX	EP
2008-08-06	Request for examination filed (corrected)R17P	R17P	EP
2008-07-02	Request for examination filed17P	17P	EP
2007-11-28	Designated contracting statesAK	AK	EP
2007-11-28	Request for extension of the european patentAX	AX	EP
2007-11-28	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2007-11-28	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2007-10-26	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL	EP
2005-09-28	Designated contracting statesAK	AK	EP
2005-09-28	Request for extension of the european patentAX	AX	EP
2005-08-12	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Structure formed with template having nanoscale features

Abstract

Term

Priority claims5

Members10

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