EP1520892A3

Polishing composition

Abstract

A polishing composition of the present invention, to be used in polishing for forming wiring in a semiconductor device, includes: a specific surfactant; a silicon oxide; at least one selected from the group consisting of carboxylic acid and alpha-amino acid; a corrosion inhibitor; an oxidant; and water. This polishing composition is capable of suppressing the occurrence of the dishing.

EP1520892A3, drawing sheet 1 — Sheet 1 of 1

Term

Term ended

Projected expiry passed 30 September 2024, 2 years ago.

1 sheet

Sheet 1

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
US2002095874A1	Cites	United States of America	A	Search report	1
US2003170991A1	Cites	United States of America	A	Search report	1

35 members in 8 offices; this record represents the family

This recordMember, by publication datePriority claim

Priority claims10

Priority claims
Document	Office	Kind	Date
2003342530	Japan	–	2003-09-30
2003342531	Japan	–	2003-09-30
2003342530	Japan	A	2003-09-30
2003342531	Japan	A	2003-09-30
2003352952	Japan	–	2003-10-10
2003352952	Japan	A	2003-10-10
2003394593	Japan	–	2003-11-25
2003394593	Japan	A	2003-11-25
2003396171	Japan	–	2003-11-26
2003396171	Japan	A	2003-11-26

Members35

Family members, oldest first
Document	Office	Kind
EP1520892A2	European Patent Office (EPO)	A2	2005-04-06
KR20050031992A	Republic of Korea	A	2005-04-06
JP2005109256A	Japan	A	2005-04-21
JP2005116987A	Japan	A	2005-04-28
SG110211A1	Singapore	A1	2005-04-28
CN1616575A	China	A	2005-05-18
JP2005129880A	Japan	A	2005-05-19
US2005108949A1	United States of America	A1	2005-05-26
JP2005158970A	Japan	A	2005-06-16
TW200532007A	Taiwan Province of China	A	2005-10-01
EP1520892A3This record	European Patent Office (EPO)	A3	2006-06-21
CN101177592A	China	A	2008-05-14
CN101186784A	China	A	2008-05-28
CN100393833C	China	C	2008-06-11
CN101215447A	China	A	2008-07-09
US7485162B2	United States of America	B2	2009-02-03
JP4406554B2	Japan	B2	2010-01-27
JP4608196B2	Japan	B2	2011-01-05
CN101186784B	China	B	2011-04-27
KR20110084481A	Republic of Korea	A	2011-07-25
KR20110084482A	Republic of Korea	A	2011-07-25
CN101177592B	China	B	2011-08-10
JP4759219B2	Japan	B2	2011-08-31
TWI347969B	Taiwan Province of China	B	2011-09-01
CN101215447B	China	B	2011-09-28
KR101074875B1	Republic of Korea	B1	2011-10-19
EP1520892B1	European Patent Office (EPO)	B1	2011-12-21
AT538188T	Austria	T	2012-01-15
ATE538188T1	Austria	T1	2012-01-15
EP2418259A1	European Patent Office (EPO)	A1	2012-02-15
EP2418260A1	European Patent Office (EPO)	A1	2012-02-15
KR101110707B1	Republic of Korea	B1	2012-04-16
KR101216514B1	Republic of Korea	B1	2012-12-31
EP2418259B1	European Patent Office (EPO)	B1	2013-02-13
EP2418260B1	European Patent Office (EPO)	B1	2013-02-13

61 legal events, as 8 offices reported them to INPADOC

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Events

Legal events, newest first
	Event	Code	Office
2018-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2018-04-04	Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal feeWithdrawnR119	R119	DE
2017-01-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2015-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2015-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2015-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2015-07-01	Patent lapsedLapsedMM4A	MM4A	IE
2015-06-26	Notification of lapseLapsedST	ST	FR
2014-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-05-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2014-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-12-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2013-11-29	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2013-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2013-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-06-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-05-29	Gb: european patent ceased through non-payment of renewal feeCeasedGBPC	GBPC	EP
2013-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-04-30	Patent ceasedCeasedPL	PL	CH
2013-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2013-01-17	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2012-11-28	No opposition filedOpposition26N	26N	EP
2012-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-10-26	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2012-10-26	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2012-09-15	Deletion acc. to par. 5 (withdrawal of the translation of the ep patent)MK05	MK05	AT
2012-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-06-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-06-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2012-04-11	Discontinued in the netherlands as no translation has been filedVDEP	VDEP	NL
2012-02-09	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2012-01-18	European patents granted designating irelandGrantedFG4D	FG4D	IE
2012-01-15	Reference to at number (ep patent enters austrian national phase)REF	REF	AT
2011-12-30	European patent takes effect as a national patent in ch/liEP	EP	CH
2011-12-21	Designated contracting statesAK	AK	EP
2011-12-21	European patent grantedGrantedFG4D	FG4D	GB
2011-11-18	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2011-11-04	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2011-07-12	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2010-11-03	First examination report despatched17Q	17Q	EP
2007-02-28	Designation fees paidAKX	AKX	EP
2006-11-29	Request for examination filed17P	17P	EP
2006-06-21	Designated contracting statesAK	AK	EP
2006-06-21	Request for extension of the european patentAX	AX	EP
2006-05-19	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL	EP
2005-04-06	Designated contracting statesAK	AK	EP
2005-04-06	Request for extension of the european patentAX	AX	EP
2005-02-18	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Polishing composition

Abstract

Term

Priority claims10

Members35

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Titles3

Classification

Designated states33