AT538188T
Polishing composition
Abstract
This record has no abstract on file.
Term
Term ended
Expired 30 September 2024, 2 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
5 priority claims, no other members on record
Priority claims5
| Document | Office | Kind | Date |
|---|---|---|---|
| 2003342530 | Japan | A | |
| 2003342531 | Japan | A | |
| 2003352952 | Japan | A | |
| 2003394593 | Japan | A | |
| 2003396171 | Japan | A |
Numbers
- Application
- 4023363
Titles2
- German
- POLIERZUSAMMENSETZUNG
- English
- POLISHING COMPOSITION
Classification
- CPC, 5
- H01L21/7684
- C09G1/02
- C09K3/1463
- C23F3/04
- H01L21/3212
- IPC, 5
- C09G1 02
- C09K3 14
- H01L21 3105
- H01L21 321
- H01L21 768