DE3585115D1
Process for forming and locating buried layers.
Abstract
This record has no abstract on file.
Term
Term ended
Expired 4 March 2005, 21.6 years ago.
- Priority
- Filed
- Granted
- Expired
- Today
9 members in 6 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 59067884 | United States of America | A | |
| 8500355 | United States of America | W |
Members9
| Document | Office | Kind | |
|---|---|---|---|
| US4487653A | United States of America | A | |
| WO8504134A1 | World Intellectual Property Organization (WIPO) | A1 | |
| EP0174986A1 | European Patent Office (EPO) | A1 | |
| JPS61501483A | Japan | A | |
| EP0174986A4 | European Patent Office (EPO) | A4 | |
| EP0174986B1 | European Patent Office (EPO) | B1 | |
| AT71476T | Austria | T | |
| ATE71476T1 | Austria | T1 | |
| DE3585115D1This record | Germany | D1 |
2 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Ceased/non-payment of the annual feeCeased8339 | 8339 | |
| No opposition during term of oppositionOpposition8364 | 8364 |
Numbers
- Application
- 3585115
Titles2
- English
- METHOD FOR PRODUCING AND ADJUSTING BURNED LAYERS.
- German
- VERFAHREN ZUR HERSTELLUNG UND EINSTELLUNG VON EINGEGRABENEN SCHICHTEN.
Classification
- CPC, 9
- H10W15/00
- Y10S438/975
- H10P14/2905
- H10P14/3411
- H10P14/24
- H10W15/01
- H10W46/00
- H10W46/301
- H10W46/501
- IPC, 6
- H01L21 20
- H01L21 302
- H01L21 30
- H01L21 3065
- H01L21 74
- H10W46 00