DE3585115D1

Process for forming and locating buried layers.

Abstract

This record has no abstract on file.

Term

Term ended

Expired 4 March 2005, 21.6 years ago.

  1. Priority
  2. Filed
  3. Granted
  4. Expired
  5. Today

9 members in 6 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
DocumentOfficeKindDate
59067884United States of AmericaA
8500355United States of AmericaW

Members9

Family members, oldest first
DocumentOfficeKind
US4487653AUnited States of AmericaA
WO8504134A1World Intellectual Property Organization (WIPO)A1
EP0174986A1European Patent Office (EPO)A1
JPS61501483AJapanA
EP0174986A4European Patent Office (EPO)A4
EP0174986B1European Patent Office (EPO)B1
AT71476TAustriaT
ATE71476T1AustriaT1
DE3585115D1This recordGermanyD1