AT71476T
Process for forming and locating buried layers.
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
8 members in 6 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 59067884 | United States of America | A | |
| 8500355 | United States of America | W |
Members8
| Document | Office | Kind | |
|---|---|---|---|
| US4487653A | United States of America | A | |
| WO8504134A1 | World Intellectual Property Organization (WIPO) | A1 | |
| EP0174986A1 | European Patent Office (EPO) | A1 | |
| JPS61501483A | Japan | A | |
| EP0174986A4 | European Patent Office (EPO) | A4 | |
| EP0174986B1 | European Patent Office (EPO) | B1 | |
| AT71476TThis record | Austria | T | |
| DE3585115D1 | Germany | D1 |
Numbers
- Application
- 85901701
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG UND EINSTELLUNG VON EINGEGRABENEN SCHICHTEN.
- English
- METHOD FOR PRODUCING AND ADJUSTING ENGAGED LAYERS.
Classification
- CPC, 9
- H01L21/74
- H01L21/02381
- H01L21/02532
- H01L21/0262
- H01L23/544
- H01L2223/54426
- H01L2223/54453
- H01L2924/0002
- Y10S438/975
- IPC, 6
- H01L21 20
- H01L21 30
- H01L21 302
- H01L21 3065
- H01L21 74
- H01L23 544