US8092643B2

Method and apparatus for cleaning and surface conditioning objects using plasma

Summary by NHIP

Plasma cleaning apparatus

The apparatus cleans objects using plasma generated between elongated dielectric barrier members and a ground plane. A voltage source creates a dielectric barrier discharge across gaps aligned with the objects, which may include probes arranged proximate the barrier members.

Claim Score by NHIP

Read claim 18, the broadest

Abstract

A method and apparatus for cleaning and surface conditioning objects using plasma are disclosed. One embodiment of the method discloses providing a plurality of elongated dielectric barrier members arranged adjacent each other, the elongated dielectric barrier members having electrodes coupled therein, providing a ground plane, introducing the objects proximate the elongated dielectric barrier members and the ground plane, and producing a dielectric barrier discharge to form plasma between the ground plane and the elongated dielectric barrier members for cleaning the objects. One embodiment of the apparatus for cleaning objects using plasma discloses a plurality of elongated dielectric barrier members arranged adjacent each other, a plurality of electrodes, each contained within, and extending substantially along the length of, respective ones of the elongated dielectric barrier members, and a ground plane proximate the plurality of elongated dielectric barrier members.

US8092643B2, drawing sheet 1
Sheet 1 of 11

Term

Projected expiry 16 October 2027.

  1. Priority
  2. Filed
  3. Granted
  4. Today
  5. Projected expiry

19 claims: 2 independent, 17 dependent

  1. 1
    An apparatus for cleaning objects using plasma, comprising:a microplate provided with a plurality of elongated dielectric barrier members arranged adjacent each other defining a gap therebetween;a plurality of electrodes, each contained within, and extending substantially along the length of, respective ones of the elongated dielectric barrier members;and a ground member proximate the plurality of elongated dielectric barrier members;wherein said ground member defines at least one gap aligned with the gap between each adjacent elongated dielectric barrier member suitable for receiving at least a portion of the objects to be cleaned.
  2. 18
    Broadest claimClaim Score 75, broad(NHIP)An apparatus for cleaning objects using plasma, comprising:a microplate further provided with a plurality of elongated dielectric barrier members arranged adjacent each other in a microtiter plate matrix format;a plurality of electrodes, each contained within, and extending substantially along the length of, respective ones of the elongated dielectric barrier members;and a ground member proximate the plurality of elongated dielectric barrier members.