NO20022045L

Temperature compensation mechanism for a micromechanical ring resonator

Abstract

Time reference oscillator comprising a resonator (4) and an integrated electronic circuit (3) to drive the resonator in oscillation and in response to the oscillation produce a signal at a given frequency. The resonator is an integrated micromechanical ring resonator (4) held in place on the upper side of a substrate (2) and adapted to oscillate in a first oscillation mode about a axis of rotation (O) which is substantially normal to the substrate's main plane, this ring resonator (4) comprises a central post (5) extending from the substrate (2) along the axis of rotation (0), and a free-standing oscillator structure (6) coupled to the central post.

Term

No projected expiry on record.

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41 members in 14 offices

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Priority claims8

Priority claims
DocumentOfficeKindDate
19952763GermanyA
19952763GermanyA
0000583SwitzerlandW
0000583SwitzerlandW
19952763
DE1999152763
PCTCH200000583
WO2000CH00583

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IL149397D0IsraelD0
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EP1313216A3European Patent Office (EPO)A3
DE60012217T2GermanyT2
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