Temperature compensation mechanism for a micromechanical ring resonator
Abstract
There is described a time base comprising a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate, according to a first oscillation mode, around an axis of rotation (O) substantially perpendicular to the substrate, the ring resonator comprising a central post (5) extending from the substrate along the axis of rotation, a free-standing oscillating structure (6) connected to the central post and including an outer ring (60) coaxial with the axis of rotation and connected to the central post by means of a plurality of spring elements (62), and electrode structures (9; 9*) disposed around the outer ring and connected to the integrated electronic circuit. Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.
Term
No projected expiry on record.
- Priority
- Filed and published
- Today
41 members in 14 offices
Priority claims8
| Document | Office | Kind | Date |
|---|---|---|---|
| 19952763 | Germany | A | |
| 19952763 | Germany | A | |
| 0000583 | Switzerland | W | |
| 0000583 | Switzerland | W | |
| 0000583 | – | – | – |
| 19952763 | – | – | – |
| DE1999152763 | – | – | – |
| WO2000CH00583 | – | – | – |
Members41
| Document | Office | Kind | |
|---|---|---|---|
| CA2389980A1 | Canada | A1 | |
| WO0133711A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU7897900A | Australia | A | |
| NO20022045D0This record | Norway | D0 | |
| NO20022045L | Norway | L | |
| EP1232563A1 | European Patent Office (EPO) | A1 | |
| KR20020074147A | Republic of Korea | A | |
| IL149397D0 | Israel | D0 | |
| CN1387696A | China | A | |
| EP1313215A2 | European Patent Office (EPO) | A2 | |
| EP1313216A2 | European Patent Office (EPO) | A2 | |
| HK1050433A1 | Hong Kong, China | A1 | |
| JP2003530540A | Japan | A | |
| US2004004520A1 | United States of America | A1 | |
| US6686807B1 | United States of America | B1 | |
| US2004041643A1 | United States of America | A1 | |
| RU2002114350A | Russian Federation | A | |
| AU771159B2 | Australia | B2 | |
| EP1232563B1 | European Patent Office (EPO) | B1 | |
| AT271276T | Austria | T | |
| ATE271276T1 | Austria | T1 | |
| DE60012217D1 | Germany | D1 | |
| CN1549443A | China | A | |
| US6859113B2 | United States of America | B2 | |
| CN1592101A | China | A | |
| RU2249299C2 | Russian Federation | C2 | |
| US6894576B2 | United States of America | B2 | |
| EP1313215A3 | European Patent Office (EPO) | A3 | |
| EP1313216A3 | European Patent Office (EPO) | A3 | |
| DE60012217T2 | Germany | T2 | |
| CN1265547C | China | C | |
| JP2007010675A | Japan | A | |
| JP2007024901A | Japan | A | |
| KR100776474B1 | Republic of Korea | B1 | |
| CN100420148C | China | C | |
| CN100483941C | China | C | |
| EP1313216B1 | European Patent Office (EPO) | B1 | |
| JP4745575B2 | Japan | B2 | |
| JP4745907B2 | Japan | B2 | |
| JP4814715B2 | Japan | B2 | |
| EP1313215B1 | European Patent Office (EPO) | B1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Withdrawal, rejection or dismissal of laid open patent applicationFC2A | FC2A |
Numbers
- Publication, DOCDB
- 20022045
- Publication, EPODOC
- NO20022045D
- Application
- 2045
- Application, DOCDB
- 20022045
- Application, EPODOC
- NO20020002045
Titles2
- Norwegian
- Tidsreferanseoscillator med mikromekanisk ringresonator
- English
- Time reference oscillator with micromechanical ring resonator
Classification
- CPC, 2
- G01C19/5712
- H03B5/30
- IPC, 9
- B81B3 00
- G04G3 00
- G01C19 56
- G01C19 5684
- G01C19 5712
- G04F5 04
- H03B5 30
- H03B5 32
- H03H9 24