IL298089B2
Diffraction based overlay metrology tool and method
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Published
- Today
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| US7289214B1 | Cites | United States of America | X | Search report | 11 |
60 members in 10 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 61006073 | United States of America | – | |
| 607307 | United States of America | P | |
| 2008050785 | Netherlands (Kingdom of the) | W |
Members60
| Document | Office | Kind | |
|---|---|---|---|
| NL1036245A1 | Netherlands (Kingdom of the) | A1 | |
| WO2009078708A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW200933316A | Taiwan Province of China | A | |
| EP2223186A1 | European Patent Office (EPO) | A1 | |
| KR20100108386A | Republic of Korea | A | |
| CN101903832A | China | A | |
| IL206290A0 | Israel | A0 | |
| IL206290D0 | Israel | D0 | |
| US2010328655A1 | United States of America | A1 | |
| JP2011507264A | Japan | A | |
| US8339595B2 | United States of America | B2 | |
| SG188895A1 | Singapore | A1 | |
| US2013155406A1 | United States of America | A1 | |
| JP5232871B2 | Japan | B2 | |
| TWI414910B | Taiwan Province of China | B | |
| US8670118B2 | United States of America | B2 | |
| US2014192338A1 | United States of America | A1 | |
| KR20140130222A | Republic of Korea | A | |
| KR20140141717A | Republic of Korea | A | |
| KR101492195B1 | Republic of Korea | B1 | |
| KR20150036795A | Republic of Korea | A | |
| KR101551340B1 | Republic of Korea | B1 | |
| KR101596371B1 | Republic of Korea | B1 | |
| KR101627257B1 | Republic of Korea | B1 | |
| KR20160066562A | Republic of Korea | A | |
| CN106019855A | China | A | |
| SG10201607528VA | Singapore | A | |
| KR101717563B1 | Republic of Korea | B1 | |
| KR20170031793A | Republic of Korea | A | |
| US2017350829A1 | United States of America | A1 | |
| KR20180021218A | Republic of Korea | A | |
| US9909996B2 | United States of America | B2 | |
| EP2223186B1 | European Patent Office (EPO) | B1 | |
| KR20190029781A | Republic of Korea | A | |
| CN106019855B | China | B | |
| KR102002005B1 | Republic of Korea | B1 | |
| KR102029967B1 | Republic of Korea | B1 | |
| KR20190114044A | Republic of Korea | A | |
| IL243020A | Israel | A | |
| IL243020B | Israel | B | |
| IL270014A | Israel | A | |
| US10520451B2 | United States of America | B2 | |
| KR102102302B1 | Republic of Korea | B1 | |
| US2020124542A1 | United States of America | A1 | |
| US2020124543A1 | United States of America | A1 | |
| KR102173598B1 | Republic of Korea | B1 | |
| KR20200126021A | Republic of Korea | A | |
| KR102328016B1 | Republic of Korea | B1 | |
| KR20210141774A | Republic of Korea | A | |
| IL270014B | Israel | B | |
| KR102414471B1 | Republic of Korea | B1 | |
| IL292787A | Israel | A | |
| IL298089A | Israel | A | |
| US2023075781A1 | United States of America | A1 | |
| US11619595B2 | United States of America | B2 | |
| US11644428B2 | United States of America | B2 | |
| IL292787B2 | Israel | B2 | |
| US11953450B2 | United States of America | B2 | |
| IL298089B1 | Israel | B1 | |
| IL298089B2This record | Israel | B2 |
Numbers
- Publication
- 298089
- Application
- 298089
Titles2
- English
- DIFFRACTION BASED OVERLAY METROLOGY TOOL AND METHOD
- Hebrew
- כלי כיסוי מטרולוגי מבוסס דיפרקציה ושיטה
Classification
- CPC, 7
- G01N21/95607
- G03F7/70633
- G03F7/7015
- G03F7/706849
- H01L21/0274
- G03F7/20
- H10P76/2041
- IPC, 5
- H01L21 027
- G03F7 20
- G03F7 00
- G01N21 956
- H10W46 00