Nova Patents
IL292787B2

Diffraction based overlay metrology tool and method

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

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60 members in 10 offices

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Priority claims
DocumentOfficeKindDate
607307United States of AmericaP
2008050785Netherlands (Kingdom of the)W

Members60

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DocumentOfficeKind
NL1036245A1Netherlands (Kingdom of the)A1
WO2009078708A1World Intellectual Property Organization (WIPO)A1
TW200933316ATaiwan Province of ChinaA
EP2223186A1European Patent Office (EPO)A1
KR20100108386ARepublic of KoreaA
CN101903832AChinaA
IL206290A0IsraelA0
IL206290D0IsraelD0
US2010328655A1United States of AmericaA1
JP2011507264AJapanA
US8339595B2United States of AmericaB2
SG188895A1SingaporeA1
US2013155406A1United States of AmericaA1
JP5232871B2JapanB2
TWI414910BTaiwan Province of ChinaB
US8670118B2United States of AmericaB2
US2014192338A1United States of AmericaA1
KR20140130222ARepublic of KoreaA
KR20140141717ARepublic of KoreaA
KR101492195B1Republic of KoreaB1
KR20150036795ARepublic of KoreaA
KR101551340B1Republic of KoreaB1
KR101596371B1Republic of KoreaB1
KR101627257B1Republic of KoreaB1
KR20160066562ARepublic of KoreaA
CN106019855AChinaA
SG10201607528VASingaporeA
KR101717563B1Republic of KoreaB1
KR20170031793ARepublic of KoreaA
US2017350829A1United States of AmericaA1
KR20180021218ARepublic of KoreaA
US9909996B2United States of AmericaB2
EP2223186B1European Patent Office (EPO)B1
KR20190029781ARepublic of KoreaA
CN106019855BChinaB
KR102002005B1Republic of KoreaB1
KR102029967B1Republic of KoreaB1
KR20190114044ARepublic of KoreaA
IL243020AIsraelA
IL243020BIsraelB
IL270014AIsraelA
US10520451B2United States of AmericaB2
KR102102302B1Republic of KoreaB1
US2020124542A1United States of AmericaA1
US2020124543A1United States of AmericaA1
KR102173598B1Republic of KoreaB1
KR20200126021ARepublic of KoreaA
KR102328016B1Republic of KoreaB1
KR20210141774ARepublic of KoreaA
IL270014BIsraelB
KR102414471B1Republic of KoreaB1
IL292787AIsraelA
IL298089AIsraelA
US2023075781A1United States of AmericaA1
US11619595B2United States of AmericaB2
US11644428B2United States of AmericaB2
IL292787B2This recordIsraelB2
US11953450B2United States of AmericaB2
IL298089B1IsraelB1
IL298089B2IsraelB2