Nova Patents
IL280148B

Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

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18 members in 8 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
DocumentOfficeKindDate
15177294European Patent Office (EPO)A
2016065258European Patent Office (EPO)W

Members18

Family members, oldest first
DocumentOfficeKind
NL2017074ANetherlands (Kingdom of the)A
US2017017738A1United States of AmericaA1
WO2017012840A1World Intellectual Property Organization (WIPO)A1
TW201712437ATaiwan Province of ChinaA
TWI606312BTaiwan Province of ChinaB
KR20180030162ARepublic of KoreaA
IL256753AIsraelA
CN107924142AChinaA
JP2018522279AJapanA
US10592618B2United States of AmericaB2
KR102099283B1Republic of KoreaB1
US2020202054A1United States of AmericaA1
JP6810734B2JapanB2
IL256753BIsraelB
IL280148AIsraelA
CN107924142BChinaB
IL280148BThis recordIsraelB
US11429763B2United States of AmericaB2