IL256753B

Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
WO0227288A1	Cites	World Intellectual Property Organization (WIPO)	Y	Search report	1-8,11-18,24-25
US2005200859A1	Cites	United States of America	Y	Search report	1-8,11-18,24-25
US5963329A	Cites	United States of America	Y	Search report	1-8,11-18,24-25

18 members in 8 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
Document	Office	Kind	Date
15177294	European Patent Office (EPO)	A	2015-07-17
2016065258	European Patent Office (EPO)	W	2016-06-30

Members18

Family members, oldest first
Document	Office	Kind
NL2017074A	Netherlands (Kingdom of the)	A	2017-01-19
US2017017738A1	United States of America	A1	2017-01-19
WO2017012840A1	World Intellectual Property Organization (WIPO)	A1	2017-01-26
TW201712437A	Taiwan Province of China	A	2017-04-01
TWI606312B	Taiwan Province of China	B	2017-11-21
KR20180030162A	Republic of Korea	A	2018-03-21
IL256753A	Israel	A	2018-03-29
CN107924142A	China	A	2018-04-17
JP2018522279A	Japan	A	2018-08-09
US10592618B2	United States of America	B2	2020-03-17
KR102099283B1	Republic of Korea	B1	2020-04-10
US2020202054A1	United States of America	A1	2020-06-25
JP6810734B2	Japan	B2	2021-01-06
IL256753BThis record	Israel	B	2021-01-31
IL280148A	Israel	A	2021-03-01
CN107924142B	China	B	2021-06-04
IL280148B	Israel	B	2021-08-31
US11429763B2	United States of America	B2	2022-08-30

2 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2021-07-29	Patent renewedKB	KB
2021-05-31	Patent grantedGrantedFF	FF