Nova Patents
IL278006B

Metrology methods, metrology apparatus and device manufacturing method

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

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16 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
DocumentOfficeKindDate
152022737European Patent Office (EPO)–
15202273European Patent Office (EPO)A
2016080058European Patent Office (EPO)W

Members16

Family members, oldest first
DocumentOfficeKind
NL2017943ANetherlands (Kingdom of the)A
US2017184981A1United States of AmericaA1
WO2017108404A1World Intellectual Property Organization (WIPO)A1
TW201732270ATaiwan Province of ChinaA
IL259816AIsraelA
CN108431692AChinaA
TWI633299BTaiwan Province of ChinaB
KR20180095679ARepublic of KoreaA
US10101671B2United States of AmericaB2
IL259816BIsraelB
IL278006AIsraelA
KR102190305B1Republic of KoreaB1
CN108431692BChinaB
CN113376975AChinaA
IL278006BThis recordIsraelB
CN113376975BChinaB