IL259816B

Metrology methods, metrology apparatus and device manufacturing method

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

16 members in 7 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
Document	Office	Kind	Date
15202273	European Patent Office (EPO)	A	2015-12-23
2016080058	European Patent Office (EPO)	W	2016-12-07

Members16

Family members, oldest first
Document	Office	Kind
NL2017943A	Netherlands (Kingdom of the)	A	2017-06-28
US2017184981A1	United States of America	A1	2017-06-29
WO2017108404A1	World Intellectual Property Organization (WIPO)	A1	2017-06-29
TW201732270A	Taiwan Province of China	A	2017-09-16
IL259816A	Israel	A	2018-07-31
CN108431692A	China	A	2018-08-21
TWI633299B	Taiwan Province of China	B	2018-08-21
KR20180095679A	Republic of Korea	A	2018-08-27
US10101671B2	United States of America	B2	2018-10-16
IL259816BThis record	Israel	B	2020-11-30
IL278006A	Israel	A	2020-11-30
KR102190305B1	Republic of Korea	B1	2020-12-14
CN108431692B	China	B	2021-06-18
CN113376975A	China	A	2021-09-10
IL278006B	Israel	B	2021-12-01
CN113376975B	China	B	2025-01-07

2 legal events, as the office reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code
2021-06-30	Patent renewedKB	KB
2021-03-25	Patent grantedGrantedFF	FF