IL270618B2
Apparatus and methods for inspecting reticles
Abstract
This record has no abstract on file.
Term
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Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| US2016012579A1 | Cites | United States of America | X | Search report | 1-30 |
50 members in 9 offices
Members50
| Document | Office | Kind | |
|---|---|---|---|
| US2015324963A1 | United States of America | A1 | |
| WO2015171506A1 | World Intellectual Property Organization (WIPO) | A1 | |
| US2016012579A1 | United States of America | A1 | |
| TW201602717A | Taiwan Province of China | A | |
| US9478019B2 | United States of America | B2 | |
| KR20170005054A | Republic of Korea | A | |
| US9547892B2 | United States of America | B2 | |
| WO2017027366A1 | World Intellectual Property Organization (WIPO) | A1 | |
| CN106463428A | China | A | |
| TW201708942A | Taiwan Province of China | A | |
| JP2017523444A | Japan | A | |
| EP3210189A1 | European Patent Office (EPO) | A1 | |
| US2017309008A1 | United States of America | A1 | |
| KR20180030228A | Republic of Korea | A | |
| US2018082415A1 | United States of America | A1 | |
| CN106463428B | China | B | |
| CN107851315A | China | A | |
| EP3210189A4 | European Patent Office (EPO) | A4 | |
| JP2018532139A | Japan | A | |
| WO2018212787A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TWI644169B | Taiwan Province of China | B | |
| TW201901291A | Taiwan Province of China | A | |
| US10304180B2 | United States of America | B2 | |
| US10395361B2 | United States of America | B2 | |
| KR20190143450A | Republic of Korea | A | |
| IL270618A | Israel | A | |
| DE112017007551T5 | Germany | T5 | |
| CN107851315B | China | B | |
| JP6669669B2 | Japan | B2 | |
| TWI695222B | Taiwan Province of China | B | |
| CN111340762A | China | A | |
| JP2020520481A | Japan | A | |
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| JP2020166283A | Japan | A | |
| JP6840129B2 | Japan | B2 | |
| KR102245701B1 | Republic of Korea | B1 | |
| CN111340762B | China | B | |
| TWI755453B | Taiwan Province of China | B | |
| EP3210189B1 | European Patent Office (EPO) | B1 | |
| JP7116757B2 | Japan | B2 | |
| JP2022164702A | Japan | A | |
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| KR20230070057A | Republic of Korea | A | |
| IL270618B1 | Israel | B1 | |
| IL270618B2This record | Israel | B2 | |
| JP7440580B2 | Japan | B2 | |
| KR102721342B1 | Republic of Korea | B1 | |
| KR102735948B1 | Republic of Korea | B1 | |
| KR20240169729A | Republic of Korea | A | |
| KR102875951B1 | Republic of Korea | B1 |
Numbers
- Publication
- 270618
- Application
- 270618
Titles2
- English
- APPARATUS AND METHODS FOR INSPECTING RETICLES
- Hebrew
- התקן ושיטה לבדיקת שריגים
Classification
- CPC, 10
- G03F1/84
- G03F7/2063
- G03F7/0002
- G03F7/70741
- G03F7/70483
- H01L21/0274
- H01L22/12
- H10P76/2041
- H10P74/203
- G03F7/706851
- IPC, 5
- H01L21 66
- G03F7 20
- G03F7 00
- G03F1 84
- H01L21 027