EP3210189A4

Apparatus and methods for predicting wafer-level defect printability

Abstract

This record has no abstract on file.

EP3210189A4, drawing sheet 1 — Sheet 1 of 4

Term

9.9 yearsto projected expiry

Projected expiry 5 August 2036, counted from filing; an application has no term until it is granted.

4 sheets

Sheet 1
Sheet 2
Sheet 3
Sheet 4

Every citation, both ways

Citations
Document	Relation	Office	Cited during
US2010080443A1	Cites	United States of America	Search report
US2013283217A1	Cites	United States of America	Search report
US2015054940A1	Cites	United States of America	Search report
US7703069B1	Cites	United States of America	Search report
See also references of WO 2017027366A1	Non-patent	–	Search report

50 members in 9 offices

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
Document	Office	Kind	Date
201514822571	United States of America	–	2015-08-10
201514822571	United States of America	A	2015-08-10
2016045749	United States of America	W	2016-08-05

Members50

Family members, oldest first
Document	Office	Kind
US2015324963A1	United States of America	A1	2015-11-12
WO2015171506A1	World Intellectual Property Organization (WIPO)	A1	2015-11-12
US2016012579A1	United States of America	A1	2016-01-14
TW201602717A	Taiwan Province of China	A	2016-01-16
US9478019B2	United States of America	B2	2016-10-25
KR20170005054A	Republic of Korea	A	2017-01-11
US9547892B2	United States of America	B2	2017-01-17
WO2017027366A1	World Intellectual Property Organization (WIPO)	A1	2017-02-16
CN106463428A	China	A	2017-02-22
TW201708942A	Taiwan Province of China	A	2017-03-01
JP2017523444A	Japan	A	2017-08-17
EP3210189A1	European Patent Office (EPO)	A1	2017-08-30
US2017309008A1	United States of America	A1	2017-10-26
KR20180030228A	Republic of Korea	A	2018-03-21
US2018082415A1	United States of America	A1	2018-03-22
CN106463428B	China	B	2018-03-23
CN107851315A	China	A	2018-03-27
EP3210189A4This record	European Patent Office (EPO)	A4	2018-06-06
JP2018532139A	Japan	A	2018-11-01
WO2018212787A1	World Intellectual Property Organization (WIPO)	A1	2018-11-22
TWI644169B	Taiwan Province of China	B	2018-12-11
TW201901291A	Taiwan Province of China	A	2019-01-01
US10304180B2	United States of America	B2	2019-05-28
US10395361B2	United States of America	B2	2019-08-27
KR20190143450A	Republic of Korea	A	2019-12-30
IL270618A	Israel	A	2019-12-31
DE112017007551T5	Germany	T5	2020-02-13
CN107851315B	China	B	2020-03-17
JP6669669B2	Japan	B2	2020-03-18
TWI695222B	Taiwan Province of China	B	2020-06-01
CN111340762A	China	A	2020-06-26
JP2020520481A	Japan	A	2020-07-09
JP2020166282A	Japan	A	2020-10-08
JP2020166283A	Japan	A	2020-10-08
JP6840129B2	Japan	B2	2021-03-10
KR102245701B1	Republic of Korea	B1	2021-04-27
CN111340762B	China	B	2021-06-25
TWI755453B	Taiwan Province of China	B	2022-02-21
EP3210189B1	European Patent Office (EPO)	B1	2022-03-23
JP7116757B2	Japan	B2	2022-08-10
JP2022164702A	Japan	A	2022-10-27
JP7262423B2	Japan	B2	2023-04-21
KR20230070057A	Republic of Korea	A	2023-05-19
IL270618B1	Israel	B1	2023-07-01
IL270618B2	Israel	B2	2023-11-01
JP7440580B2	Japan	B2	2024-02-28
KR102721342B1	Republic of Korea	B1	2024-10-23
KR102735948B1	Republic of Korea	B1	2024-11-28
KR20240169729A	Republic of Korea	A	2024-12-03
KR102875951B1	Republic of Korea	B1	2025-10-23

76 legal events, as 9 offices reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code	Office
2025-12-12	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2025-10-10	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-09-15	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2024-09-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2024-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2024-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2024-03-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-09-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-07-05	Opt-out of the competence of the unified patent court (upc) registeredP01	P01	EP
2023-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-05-02	Lapsed because of non-payment of the annual feeLapsedMM	MM	BE
2023-04-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-04-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-04-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-04-26	Gb: european patent ceased through non-payment of renewal feeCeasedGBPC	GBPC	EP
2023-03-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-03-31	Patent ceasedCeasedPL	PL	CH
2023-03-01	No opposition filedOpposition26N	26N	EP
2023-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2023-01-27	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2023-01-27	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2023-01-02	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2022-11-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-11-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-11-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-08-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-08-15	Deletion acc. to par. 5 (withdrawal of the translation of the ep patent)MK05	MK05	AT
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2022-07-11	Invalidation of extension of european patentsMG9D	MG9D	LT
2022-04-20	Translation for ep filed (entry of ep into country)FP	FP	NL
2022-04-15	Reference to at number (ep patent validated in austria)REF	REF	AT
2022-04-14	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2022-04-13	European patents granted designating irelandGrantedFG4D	FG4D	IE
2022-03-31	European patent takes effect as a national patent in ch/liEP	EP	CH
2022-03-23	Designated contracting statesAK	AK	EP
2022-03-23	European patent grantedGrantedFG4D	FG4D	GB
2022-02-18	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2022-02-18	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE PATENT HAS BEEN GRANTEDSTAA	STAA	EP
2022-02-15	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2021-12-01	Intention to grant announcedINTG	INTG	EP
2021-11-24	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2021-11-24	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2021-11-24	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2021-11-07	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2021-11-07	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA	STAA	EP
2021-10-18	Amendment of ipc main classPREVIOUS MAIN CLASS: G06T0007000000R079	R079	DE
2018-11-14	Request for validation of the european patent (deleted)DAV	DAV	EP
2018-11-14	Request for extension of the european patent (deleted)DAX	DAX	EP
2018-06-06	Supplementary search report drawn up and despatchedA4	A4	EP
2018-06-06	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2018-06-06	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2017-08-30	Request for examination filed17P	17P	EP
2017-08-30	Designated contracting statesAK	AK	EP
2017-08-30	Request for extension of the european patentAX	AX	EP
2017-07-28	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP
2017-07-28	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: REQUEST FOR EXAMINATION WAS MADESTAA	STAA	EP
2017-02-18	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADESTAA	STAA	EP

Apparatus and methods for predicting wafer-level defect printability

Abstract

Term

Priority claims3

Members50

Over the term

Events

Numbers

Titles3

Classification

Designated states3