IL252160B
Spectroscopic beam profile metrology
Abstract
This record has no abstract on file.
Term
No projected expiry on record.
- Priority
- Filed
- Published
- Today
17 members in 6 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 201462088290 | United States of America | P | |
| 201514960121 | United States of America | A | |
| 2015064150 | United States of America | W |
Members17
| Document | Office | Kind | |
|---|---|---|---|
| US2016161245A1 | United States of America | A1 | |
| WO2016090349A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW201629469A | Taiwan Province of China | A | |
| IL252160D0 | Israel | D0 | |
| CN107003114A | China | A | |
| KR20170094288A | Republic of Korea | A | |
| US10072921B2 | United States of America | B2 | |
| US2018347961A1 | United States of America | A1 | |
| US10234271B2 | United States of America | B2 | |
| TWI659204B | Taiwan Province of China | B | |
| CN107003114B | China | B | |
| CN110986818A | China | A | |
| CN110986818B | China | B | |
| IL252160BThis record | Israel | B | |
| IL282673A | Israel | A | |
| IL282673B | Israel | B | |
| KR102386664B1 | Republic of Korea | B1 |
2 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Patent grantedGrantedFF | FF | |
| Patent renewedKB | KB |
Numbers
- Publication
- 252160
- Application
- 252160
Titles2
- English
- Spectroscopic beam profile metrology
- Hebrew
- מטרולוגיית פרופיל קרן ספקטרוסקופית
Classification
- CPC, 6
- G01B11/24
- G01B11/002
- G01N21/956
- G01N2021/213
- G01B2210/56
- G03F7/00