Nova Patents
IL147609A0

Organosilicon precursors for interlayer dielectric films with low dielectric constants

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

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22 members in 10 offices

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
DocumentOfficeKindDate
76126901United States of AmericaA
94404201United States of AmericaA

Members22

Family members, oldest first
DocumentOfficeKind
EP1225194A2European Patent Office (EPO)A2
KR20020062192ARepublic of KoreaA
IL147609A0This recordIsraelA0
CN1367205AChinaA
JP2002256434AJapanA
EP1225194A3European Patent Office (EPO)A3
US2002142579A1United States of AmericaA1
US6583048B2United States of AmericaB2
SG98468A1SingaporeA1
KR100447684B1Republic of KoreaB1
TWI235428BTaiwan Province of ChinaB
CN1644753AChinaA
CN1240780CChinaC
JP3762304B2JapanB2
IL147609AIsraelA
DE02001014T1GermanyT1
CN100410420CChinaC
EP1225194B1European Patent Office (EPO)B1
AT409717TAustriaT
ATE409717T1AustriaT1
DE60229077D1GermanyD1
EP1225194B2European Patent Office (EPO)B2