Wavelength measurement chip and wavelength measurement system
Abstract
A wavelength measurement chip (11) is provided. The wavelength measurement chip (11) includes: an optical splitter (112), configured to receive a first electromagnetic wave signal, and divide the first electromagnetic wave signal into two electromagnetic wave signals for output; and a first interferometer (113) and a second interferometer (114), where the optical splitter (112), the first interferometer (113), and the second interferometer (114) are sequentially coupled, and the first interferometer (113) and the second interferometer (114) are configured to receive one of the two electromagnetic wave signals, so that the one electromagnetic wave signal is interfered twice, to output a plurality of second electromagnetic wave signals. The other one of the two electromagnetic wave signals is output as a third electromagnetic wave signal, and the second electromagnetic wave signal and the third electromagnetic wave signal may be used to obtain wavelength information of the first electromagnetic wave signal through optical-electrical conversion. A wavelength measurement system (10) is further provided.

Term
15.2 yearsto projected expiry
Projected expiry 30 November 2041, counted from filing; an application has no term until it is granted.
- Priority and filed
- Published
- Today
- Projected expiry
13 claims: 1 independent, 12 dependent
- 1A optical chip, comprising:an optical splitter, configured to receive a first electromagnetic wave signal, and divide the first electromagnetic wave signal into two electromagnetic wave signals for output;and a first interferometer and a second interferometer, wherein the optical splitter, the first interferometer, and the second interferometer are sequentially coupled, and the first interferometer and the second interferometer are configured to receive one of the two electromagnetic wave signals, so that the one electromagnetic wave signal is interfered twice, to output a plurality of second electromagnetic wave signals, wherein the other one of the two electromagnetic wave signals is output as a third electromagnetic wave signal.
- 10A wavelength measurement system, comprising:a wavelength measurement chip, wherein the wavelength measurement chip is the optical chip according to any one of claims 1 to 9;a photoelectric detector, coupled to the wavelength measurement chip, and configured to receive a second electromagnetic wave signal and a third electromagnetic wave signal and convert the second electromagnetic wave signal and the third electromagnetic wave signal into electrical signals;and a processor, electrically connected to the photoelectric detector, and configured to obtain wavelength information of a first electromagnetic wave signal based on the electrical signals.
Independent claims6
62 paragraphs in 5 sections, as filed
TECHNICAL FIELD
0001The present invention relates to the field of optical chips, and in particular, to a wavelength measurement chip and a wavelength measurement system to which the wavelength measurement chip is applied.
BACKGROUND
0002A wavelength meter is a measurement tool commonly used in microwave measurement, and is configured to measure a wavelength or frequency of a microwave signal source (such as an electromagnetic wave).
0003A conventional wavelength meter is an independent instrument, including an optical path structure including a plurality of discrete components such as a lens, a curved mirror, an optical fiber, and a grating. In one aspect, the plurality of discrete components cause a large size and high space occupation of the conventional wavelength meter. In another aspect, the plurality of discrete components cause a low overall integrated level and poor apparatus reliability of the conventional wavelength meter.
SUMMARY
0004One aspect of this application provides a wavelength measurement chip, including: <ul id="ul0001" list-style="none" compact="compact"><li>an optical splitter, configured to receive a first electromagnetic wave signal, and divide the first electromagnetic wave signal into two electromagnetic wave signals for output; and</li><li>a first interferometer and a second interferometer, where the optical splitter, the first interferometer, and the second interferometer are sequentially coupled, and the first interferometer and the second interferometer are configured to receive one of the two electromagnetic wave signals, so that the one electromagnetic wave signal is interfered twice, to output a plurality of second electromagnetic wave signals.</li></ul>
0005The other one of the two electromagnetic wave signals is output as a third electromagnetic wave signal, and the second electromagnetic wave signal and the third electromagnetic wave signal may be used to obtain wavelength information of the first electromagnetic wave signal through optical-electrical conversion.
0006The wavelength measurement chip includes a substrate, and the optical splitter, the first interferometer, and the second interferometer that are disposed on the substrate. The wavelength measurement chip is configured to receive the first electromagnetic wave signal, output the plurality of second electromagnetic wave signals and the third electromagnetic wave signal based on the first electromagnetic wave signal, convert the second electromagnetic wave signal and the third electromagnetic wave signal into electrical signals, and obtain wavelength information of the first electromagnetic wave signal based on the electrical signals. The wavelength measurement chip does not need to establish a complex optical system. Compared with a wavelength meter in the conventional technology, the wavelength measurement chip has a simpler structure, which helps reduce a size and occupied space. In addition, components in the wavelength measurement chip have a compact structure, which further helps improve reliability of the wavelength measurement chip.
0007In some embodiments, the wavelength measurement chip defines a first path and a second path, the two electromagnetic wave signals are respectively transmitted in the first path and the second path, and a loss of the electromagnetic wave propagated in the first path is greater than a loss of the electromagnetic wave propagated in the second path.
0008The optical splitter divides the first electromagnetic wave signal into the two electromagnetic wave signals according to a preset proportion for output. A proportion of the electromagnetic wave signal propagated in the first path in the first electromagnetic wave is greater than a proportion of the electromagnetic wave signal propagated in the second path in the first electromagnetic wave.
0009A specific value of the preset proportion is determined based on optical losses of the first path and the second path. Compared with propagation of the electromagnetic wave in the second path, propagation of the electromagnetic wave in the first path has a higher strength loss. Therefore, in this embodiment, a strength proportion of the electromagnetic wave signal output by the optical splitter to the first path in the first electromagnetic wave is set to be higher than that of the electromagnetic wave signal output to the second path in the first electromagnetic wave, to balance a difference between the strength loss of the electromagnetic wave signal in the first path and the strength loss of the electromagnetic wave signal in the second path.
0010In some embodiments, the first path includes the first interferometer and the second interferometer.
0011The first path includes the first interferometer and the second interferometer. When being propagated in the first path, the electromagnetic wave signal needs to pass through more components than those through which the electromagnetic wave signal passes when being propagated in the second path. Therefore, compared with propagation of the electromagnetic wave in the first path, propagation of the electromagnetic wave in the second path has a higher strength loss. A strength proportion of the electromagnetic wave signal output by the optical splitter to the first path in the first electromagnetic wave is set to be higher than that of the electromagnetic wave signal output to the second path in the first electromagnetic wave, to balance a difference between the strength loss of the electromagnetic wave signal in the first path and the strength loss of the electromagnetic wave signal in the second path.
0012In some embodiments, the first interferometer is a Mach-Zehnder interferometer, and the second interferometer is a multimode interferometer.
0013In some embodiments, there is a preset phase shift between the plurality of second electromagnetic wave signals output by the second interferometer, and the preset phase shift between the plurality of second electromagnetic wave signals can be adjusted by adjusting a quantity of the second electromagnetic waves output by the second interferometer.
0014The preset phase shift between the plurality of second electromagnetic wave signals can be adjusted by adjusting the quantity of the second electromagnetic waves output by the second interferometer, and a larger quantity of the second electromagnetic waves indicates more accurate wavelength measurement.
0015In some embodiments, the second interferometer outputs four second electromagnetic wave signals, and a preset phase shift between the four electromagnetic wave signals is π/2.
0016In some embodiments, a coupler is further included, and the coupler is configured to receive the first electromagnetic wave and transmit the first electromagnetic wave to the optical splitter.
0017A manner in which the coupler is disposed to receive the first electromagnetic wave signal and transmit the first electromagnetic wave signal to the optical splitter is more conducive to reducing an input loss of the first electromagnetic wave signal, thereby improving accuracy of the wavelength information measured by the wavelength measurement chip.
0018In some embodiments, a high-order mode filter is further included, and the high-order mode filter is coupled between the optical splitter and the first interferometer.
0019The high-order mode filter can reduce a high-order mode of the electromagnetic wave transmitted in the first path. Disposing the high-order mode filter helps increase an extinction ratio of the interferometer in the first path, thereby further improving accuracy of the wavelength information measured by the wavelength measurement chip.
0020In some embodiments, the optical splitter, the first interferometer, and the second interferometer form the substrate.
0021Another aspect of this application provides a wavelength measurement system, including: <ul id="ul0002" list-style="none" compact="compact"><li>a wavelength measurement chip, where the wavelength measurement chip is the wavelength measurement chip according to any one of the foregoing items;</li><li>a photoelectric detector, coupled to the wavelength measurement chip, and configured to receive a second electromagnetic wave signal and a third electromagnetic wave signal and convert the second electromagnetic wave signal and the third electromagnetic wave signal into electrical signals; and</li><li>a processor, electrically connected to the photoelectric detector, and configured to obtain wavelength information of a first electromagnetic wave signal based on the electrical signals.</li></ul>
0022The wavelength measurement system provided in this embodiment of this application includes the wavelength measurement chip. The wavelength measurement chip includes a substrate, and an optical splitter, a first interferometer, and a second interferometer that are disposed on the substrate. The wavelength measurement chip is configured to receive the first electromagnetic wave signal, and output a plurality of second electromagnetic wave signals and a third electromagnetic wave signal based on the first electromagnetic wave signal. The wavelength measurement system further includes the photoelectric detector and the processor that are electrically connected to each other, the second electromagnetic wave signal and the third electromagnetic wave signal are converted into the electrical signals by the photoelectric detector, and the wavelength information of the first electromagnetic wave signal is obtained by the processor based on the electrical signals. The wavelength measurement system does not need to establish a complex optical system. Compared with a wavelength meter in the conventional technology, the wavelength measurement system has a simpler structure, which helps reduce a size and occupied space. In addition, components in the wavelength measurement chip 11 have a compact structure, which further helps improve reliability of the wavelength measurement system.
0023In some embodiments, the processor is configured to obtain a plurality of wavelength values based on the plurality of second electromagnetic wave signals output by the second interferometer, and determine, from the plurality of wavelength values based on the third electromagnetic wave signal output by the optical splitter, a wavelength value as a wavelength value of the first electromagnetic wave signal.
0024A spectral image is regularly and periodically arranged, a determined signal strength may correspond to a plurality of wavelength values, and a wavelength value can be uniquely determined based on the third electromagnetic wave signal output by the optical splitter.
0025In some embodiments, the photoelectric detector has a sensing zone, the wavelength measurement chip has a coupling plane for outputting the second electromagnetic wave signal and the third electromagnetic wave signal, and the coupling plane is parallel to a plane on which the sensing zone is located.
0026In this way, transmission directions of the second electromagnetic wave signal and the third electromagnetic wave signal are perpendicular to the coupling plane, that is, perpendicular to a sensing zone. In this case, the second electromagnetic wave signal and the third electromagnetic wave signal can directly enter the photoelectric detector after being output from the coupling plane, and the transmission directions of the second electromagnetic wave signal and the third electromagnetic wave signal do not need to be specifically changed.
0027In some embodiments, the photoelectric detector has a sensing zone, and a plane on which the sensing zone is located is parallel to a plane on which the second electromagnetic wave and the third electromagnetic wave signal are propagated on the wavelength measurement chip.
0028In this way, the wavelength measurement chip, the photoelectric detector, and the processor are sequentially stacked, and there is no protrusion structure perpendicular to a direction of the wavelength measurement chip. This helps simplify a subsequent packaging process.
BRIEF DESCRIPTION OF DRAWINGS
0029<ul id="ul0003" list-style="none" compact="compact"><li><figref idref="f0001">FIG. 1</figref> is a schematic diagram of a propagation process of an electromagnetic wave;</li><li><figref idref="f0001">FIG. 2</figref> is a schematic diagram of a module structure of a wavelength measurement system according to an embodiment of this application;</li><li><figref idref="f0002">FIG. 3</figref> is a schematic diagram of a plane structure of a wavelength measurement chip in <figref idref="f0001">FIG. 2</figref>;</li><li><figref idref="f0002">FIG. 4</figref> is a schematic diagram of a spectrum of an electromagnetic wave output by a first interferometer in <figref idref="f0002">FIG. 3</figref>;</li><li><figref idref="f0003">FIG. 5</figref> is a schematic diagram of a structure of a wavelength measurement system according to an embodiment of this application;</li><li><figref idref="f0003">FIG. 6</figref> is a schematic diagram of a structure of a wavelength measurement system according to a changed embodiment of this application;</li><li><figref idref="f0003">FIG. 7</figref> is a schematic diagram of a structure of a wavelength measurement system according to another changed embodiment of this application;</li><li><figref idref="f0004">FIG. 8</figref> is a schematic diagram of a spectrum of an electromagnetic wave output by a second interferometer in <figref idref="f0002">FIG. 3</figref>; and</li><li><figref idref="f0004">FIG. 9</figref> is a schematic diagram of another plane structure of a wavelength measurement chip in <figref idref="f0001">FIG. 2</figref>.</li></ul>
DESCRIPTION OF EMBODIMENTS
0030The following describes embodiments of this application with reference to the accompanying drawings in embodiments of this application.
0031As shown in <figref idref="f0001">FIG. 1</figref>, a horizontal axis indicates a propagation direction of an electromagnetic wave, and a vertical axis represents a vibration direction of the electromagnetic wave. A wavelength λ of an electromagnetic wave is defined as a distance of propagation of the electromagnetic wave in a vibration cycle. In other words, the wavelength λ of the electromagnetic wave is a distance between two adjacent points of which a difference between vibration phases is 2π along a propagation direction of the electromagnetic wave. For example, as shown in <figref idref="f0001">FIG. 1</figref>, a distance between two adjacent peaks is one wavelength, and a distance between two adjacent troughs is also one wavelength.
0032As shown in <figref idref="f0001">FIG. 2</figref>, a wavelength measurement system 10 provided in an embodiment is configured to measure a wavelength of an electromagnetic wave, and may be applied to scenarios such as an ultra-dense wavelength-division multiplexing system, a wavelength selective switch, and a laser.
0033The wavelength measurement system 10 includes a wavelength measurement chip 11, a plurality of photoelectric detectors 12, and a processor 13. The photoelectric detector 12 is coupled to the wavelength measurement chip 11, and is electrically connected to the processor 13. The wavelength measurement chip 11 is configured to receive a first electromagnetic wave signal, and output a plurality of (in this application, "a plurality of" means two or more) second electromagnetic wave signals and a third electromagnetic wave signal based on the first electromagnetic wave signal. The photoelectric detector 12 is configured to receive the plurality of second electromagnetic wave signals and the third electromagnetic wave signal, and generate electrical signals based on the plurality of second electromagnetic wave signals and the third electromagnetic wave signal. The processor 13 is configured to obtain wavelength information of the first electromagnetic wave signal based on the electrical signals.
0034The wavelength measurement chip 11 is a wavelength measurement chip based on a planar optical waveguide. As shown in <figref idref="f0002">FIG. 3</figref>, the wavelength measurement chip 11 includes an optical splitter 112, a first interferometer 113, and a second interferometer 114.
0035According to different propagation paths of the first electromagnetic wave signal, the wavelength measurement chip 11 defines a first path and a second path. In this embodiment, the first path includes the first interferometer 113 and the second interferometer 114. The first path further includes a waveguide structure (not shown in <figref idref="f0002">FIG. 3</figref>) that is coupled between adjacent components (for example, between the optical splitter 112 and the first interferometer 113, and between the first interferometer 113 and the second interferometer 114) and that is for guiding an electromagnetic wave signal. In this embodiment, the second path includes a waveguide structure (not shown in <figref idref="f0002">FIG. 3</figref>) for guiding an electromagnetic wave signal. The foregoing waveguide structure is a waveguide structure having a high refractive index difference. To be specific, the foregoing waveguide structure separately includes a waveguide core layer and a cladding layer covering the waveguide core layer. Both the core layer and the cladding layer are made from a silicon oxide material, but the core layer is doped, so that a refractive index of the core layer is higher than a refractive index of the cladding layer. Therefore, the waveguide structure can guide an electromagnetic wave.
0036The optical splitter 112 is a Y-shaped optical splitter, and is configured to receive the first electromagnetic wave signal, and divide the first electromagnetic wave signal into two electromagnetic wave signals for output. One electromagnetic wave signal is guided to the first path, and the other electromagnetic wave signal is guided to the second path.
0037The optical splitter 112 performs dividing according to a preset proportion to obtain the two electromagnetic wave signals. In other words, strengths of the two electromagnetic wave signals are in a preset proportion. For example, a ratio of a strength of the electromagnetic wave signal output by the optical splitter 112 to the first path to a strength of the electromagnetic wave signal output by the optical splitter 112 to the second path is equal to 9:1 or 5:5. A specific preset proportion is not limited in this application.
0038A specific value of the preset proportion is determined based on optical losses of the first path and the second path. In this embodiment, the first path includes the first interferometer 113, the second interferometer 114, and a waveguide structure 115, and the second path includes only a waveguide structure 116. Therefore, when being propagated in the first path, the electromagnetic wave signal needs to pass through more components than those through which the electromagnetic wave signal passes when being propagated in the second path, and compared with propagation of the electromagnetic wave in the first path, propagation of the electromagnetic wave in the second path has a higher strength loss. Therefore, in this embodiment, the strength of the electromagnetic wave signal output by the optical splitter 112 to the first path is set to be greater than the strength of the electromagnetic wave signal output to the second path, that is, a strength proportion of the electromagnetic wave signal output by the optical splitter 112 to the first path in the first electromagnetic wave is set to be greater than the strength proportion of the electromagnetic wave signal output to the second path in the first electromagnetic wave, to balance a difference between the strength loss of the electromagnetic wave signal in the first path and the strength loss of the electromagnetic wave signal in the second path.
0039The electromagnetic wave signal output to the first path is sequentially guided by the waveguide structure 115 to the first interferometer 113 and the second interferometer 114. In an embodiment, the first interferometer 113 is a Mach-Zehnder interferometer (Mach-Zehnder interferometer, MZI). The first interferometer 113 is configured to receive the electromagnetic wave signal and cause interference to the electromagnetic wave signal, to output two electromagnetic wave signals based on the electromagnetic wave signal. Spectra of the two electromagnetic wave signals output by the first interferometer 113 are shown in <figref idref="f0002">FIG. 4</figref>. In <figref idref="f0002">FIG. 4</figref>, a horizontal coordinate indicates a wavelength, and a vertical coordinate indicates a signal strength.
0040Still as shown in <figref idref="f0002">FIG. 3</figref>, the two electromagnetic wave signals output by the first interferometer 113 are transmitted to the second interferometer 114. In an embodiment, the second interferometer 114 is a multimode interferometer (MMI). The second interferometer 114 is configured to receive the two electromagnetic wave signals and cause interference to the two electromagnetic wave signals, to output four electromagnetic wave signals. The electromagnetic wave signals output by the second interferometer 114 each are defined as the foregoing second electromagnetic wave signals.
0041In another embodiment, a quantity of input signals of the second interferometer 114 may not be two, and a quantity of output signals of the second interferometer 114 may not be four. For example, in one embodiment, the second interferometer 114 may have four inputs and six outputs, in another embodiment, the second interferometer 114 has two inputs and two outputs, and in still another embodiment, the second interferometer 114 has four inputs and four outputs.
0042There is a preset phase shift between the plurality of second electromagnetic wave signals output by the second interferometer 114. To be specific, the plurality of second electromagnetic wave signals output by the second interferometer 114 are sequentially numbered 1, 2, 3, ..., and there is a preset phase shift between every two second electromagnetic wave signals whose numbers are adjacent (for example, a number 1 is adjacent to a number 2, and the number 2 is adjacent to a number 3). In addition, in this embodiment, the preset phase shifts between every two second electromagnetic wave signals whose numbers are adjacent are the same.
0043In this embodiment, the second interferometer 114 outputs four second electromagnetic wave signals, and there is a preset phase shift of π/2 between the four second electromagnetic wave signals in sequence. When the second interferometer 114 has two outputs, there is a preset phase shift of π between the two second electromagnetic wave signals. When the second interferometer 114 has six outputs, there is a preset phase shift of π/3 between the six second electromagnetic wave signals in sequence. To be specific, in the second electromagnetic wave signals output by the second interferometer 114, a maximum phase shift is 2π. Therefore, the preset phase shift between the second electromagnetic wave signals may be adjusted by adjusting a quantity of the second electromagnetic wave signals output by the second interferometer 114. When the maximum phase shift between the plurality of second electromagnetic wave signals output by the second interferometer 114 is fixed, a larger quantity of the second electromagnetic wave signals output by the second interferometer 114 indicates a smaller preset phase shift between two adjacent second electromagnetic wave signals.
0044The second interferometer 114 outputs at least two second electromagnetic wave signals. A larger quantity of second electromagnetic wave signals output by the second interferometer 114 indicates more accurate wavelength information of the first electromagnetic wave signal measured by the wavelength measurement system 10.
0045In this embodiment, the four second electromagnetic wave signals may be transmitted to the photoelectric detector 12. The electromagnetic wave signal of the second path is propagated by using the waveguide structure 116, and is transmitted to the photoelectric detector 12 as a third electromagnetic wave signal. The photoelectric detector 12 is configured to separately convert the received second electromagnetic wave signals and third electromagnetic wave signal into electrical signals through photoelectric conversion.
0046As shown in <figref idref="f0003">FIG. 5</figref>, in this embodiment, the processor 13 is disposed on a printed circuit board (PCB) 20. A conductive wire (not shown in the figure) is formed in the PCB 20, and the plurality of photoelectric detectors 12 are electrically connected to the processor 13 through the conductive wire. The processor 13 is configured to receive the electrical signals generated by the photoelectric detector 12, and is configured to obtain a wavelength of the first electromagnetic wave signal based on the electrical signals by using a preset algorithm.
0047An end face (namely, an end face for outputting the second electromagnetic wave signal and the third electromagnetic wave signal) that is on the wavelength measurement chip 11 and that is coupled to the plurality of photoelectric detectors 12 is defined as a coupling plane S1. Each photoelectric detector 12 has a sensing zone S2. The sensing zone S2 is a zone that is on the photoelectric detector 12 and that can effectively receive an electromagnetic wave signal for photoelectric conversion. To effectively use area of the sensing zone S2, a zone in which the coupling plane S1 outputs the second electromagnetic wave signal and the third electromagnetic wave signal needs to be aligned with the sensing zone S2 as much as possible.
0048In this embodiment, on the basis of meeting the foregoing alignment requirement, a coupling manner between the photoelectric detector 12 and the wavelength measurement chip 11 is further set to adjust difficulty of packaging of the wavelength measurement chip 11.
0049Still as shown in <figref idref="f0003">FIG. 5</figref>, in this embodiment, the photoelectric detector 12 is disposed on the PCB 20, and a plane on which the sensing zoneS2 of the photoelectric detector 12 is located is parallel to a plane on which the second electromagnetic wave and the third electromagnetic wave signal are propagated on the wavelength measurement chip 11. Transmission directions of the second electromagnetic wave signal and the third electromagnetic wave signal that are output by the wavelength measurement chip 11 need to be changed on the coupling plane S1, so that the second electromagnetic wave signal and the third electromagnetic wave signal enter the photoelectric detector 12 in a direction pointing to the sensing zoneS2 of the photoelectric detector 12. In this case, the coupling plane S1 is an oblique plane.
0050<figref idref="f0003">FIG. 6</figref> shows another structure of the coupling plane S 1. The structure of the coupling plane S1 shown in <figref idref="f0003">FIG. 6</figref> is similar to the structure of the coupling plane S1 shown in <figref idref="f0003">FIG. 5</figref>. A difference lies in that oblique directions of the coupling plane S1 are different. Details are not described again.
0051<figref idref="f0003">FIG. 7</figref> shows still another structure of the coupling plane S 1. In <figref idref="f0003">FIG. 7</figref>, the coupling plane S1 is disposed in parallel with a plane on which the sensing zoneS2 of the photoelectric detector 12 is located. The transmission directions of the second electromagnetic wave signal and the third electromagnetic wave signal are perpendicular to the coupling plane S1, that is, perpendicular to the sensing zoneS2. In this case, the second electromagnetic wave signal and the third electromagnetic wave signal can directly enter the photoelectric detector 12 after being output from the coupling plane S1, and the transmission directions of the second electromagnetic wave signal and the third electromagnetic wave signal do not need to be specifically changed.
0052Compared with the position relationships between the coupling plane S1 and the photoelectric detector 12 shown in <figref idref="f0003">FIG. 5 and FIG. 6</figref>, the position relationship between the coupling plane S1 and the photoelectric detector 12 shown in <figref idref="f0003">FIG. 7</figref> does not need to change the transmission directions of the second electromagnetic wave signal and the third electromagnetic wave signal on the coupling plane S1. This helps simplify a manufacturing process of the wavelength measurement chip 11.
0053In the structures shown in <figref idref="f0003">FIG. 5 and FIG. 6</figref>, the wavelength measurement chip 11, the photoelectric detector 12, and the PCB 20 are sequentially stacked, and there is no protrusion structure perpendicular to a direction of the wavelength measurement chip 11. However, in the structure shown in <figref idref="f0003">FIG. 7</figref>, a height of the photoelectric detector 12 is greater than a height of the wavelength measurement chip 11. Therefore, when the chip is packaged, there is a protrusion structure perpendicular to a direction of the wavelength measurement chip 11 at a position at which the photoelectric detector 12 is disposed. Therefore, compared with the structure shown in <figref idref="f0003">FIG. 7</figref>, the structures in <figref idref="f0003">FIG. 5 and FIG. 6</figref> are more conducive to packaging.
0054For ease of packaging, in the structure shown in <figref idref="f0003">FIG. 7</figref>, the photoelectric detector 12 may be usually disposed at a height equal to that of a packaged wavelength measurement chip 11 by disposing a riser layer. In another aspect, the photoelectric detector 12 and the packaged wavelength measurement chip 11 are disposed at the same height, so that the second electromagnetic wave signal and the third electromagnetic wave signal are output to the sensing zoneS2 of the photoelectric detector 12 as much as possible, to make full use of the sensing zoneS2 of the photoelectric detector 12.
0055In this embodiment, the four second electromagnetic wave signals output by the second interferometer 114 may form a spectral image shown in <figref idref="f0004">FIG. 8</figref>. In <figref idref="f0004">FIG. 8</figref>, a horizontal coordinate indicates a wavelength, and a vertical coordinate indicates a signal strength. Spectral images of the four second electromagnetic wave signals are respectively displayed by using four different lines.
0056As shown in <figref idref="f0004">FIG. 8</figref>, if a value λ1 is taken on the horizontal coordinate, the value λ1 on the horizontal coordinate corresponds to a plurality of vertical coordinates (that is, one wavelength value corresponds to a plurality of strength values). When the horizontal coordinate λ1 is determined, a plurality of strength values corresponding to the horizontal coordinate λ1 are determined. However, it can be learned from <figref idref="f0004">FIG. 8</figref> that the spectral image is regularly and periodically arranged, and that λ1 is corresponding to the plurality of strength values repeatedly appears once in each subsequent cycle. For example, in a next cycle, a plurality of strength values corresponding to λ2 are the same as the plurality of strength values corresponding to λ1. Therefore, when a group of strength values are determined, a wavelength value cannot be uniquely determined.
0057In this embodiment, a wavelength value is uniquely determined based on the third electromagnetic wave signal output from the second path. A strength of the third electromagnetic wave signal output from the second path is inversely proportional to a wavelength of the third electromagnetic wave signal, and there is a unique correspondence between the strength and a value of the wavelength. At a moment, when the photoelectric detector 12 obtains a signal strength, the processor 13 can obtain a plurality of wavelength values based on spectra shown in <figref idref="f0004">FIG. 8</figref>, and the processor 13 can obtain a unique wavelength value based on the strength of the third electromagnetic wave signal output from the second path. Among the plurality of obtained wavelength values, a wavelength value closest to the obtained unique wavelength value is calibrated as a wavelength value of the first electromagnetic wave.
0058As shown in <figref idref="f0004">FIG. 9</figref>, the wavelength measurement chip 11 in this embodiment includes a substrate 111. The substrate 111 is made from a semiconductor material, for example, silicon oxide. The substrate 111 is configured to carry the optical splitter 112, the first interferometer 113, the second interferometer 114, and the waveguide structures 115 and 116.
0059The wavelength measurement chip 11 further includes a coupler 117 disposed on the substrate 111. The coupler 117 is a spotsize converter grating (SSC grating). The coupler 117 is coupled to the optical splitter 112 by using a waveguide structure. The coupler 117 is disposed close to an end face on which the wavelength measurement chip 11 receives the first electromagnetic wave signal, and is configured to couple the first electromagnetic wave signal to the optical splitter 112. Compared with a manner in which the optical splitter 112 directly receives the first electromagnetic wave signal, the manner in which the coupler 117 receives the first electromagnetic wave signal and transmits the first electromagnetic wave signal to the optical splitter 112 is more conducive to reducing an input loss of the first electromagnetic wave signal, thereby improving accuracy of the wavelength information measured by the wavelength measurement chip 11.
0060The wavelength measurement chip 11 in this embodiment further includes a high-order mode filter 118 disposed on the substrate 111. The high-order mode filter 118 is coupled between the optical splitter 112 and the first interferometer 113, and is configured to reduce a high-order mode of an electromagnetic wave transmitted in the first path. Disposing the high-order mode filter 118 helps increase an extinction ratio of the interferometers (namely, the first interferometer 113 and the second interferometer 114) in the first path, thereby further improving the accuracy of the wavelength information measured by the wavelength measurement chip 11.
0061The wavelength measurement system 10 provided in this embodiment of this application includes the wavelength measurement chip 11. The wavelength measurement chip 11 includes the substrate 111, and the optical splitter 112, the first interferometer 113, and the second interferometer 114 that are disposed on the substrate 111. The wavelength measurement chip 11 is configured to receive the first electromagnetic wave signal, and output the plurality of second electromagnetic wave signals and the third electromagnetic wave signal based on the first electromagnetic wave signal. The wavelength measurement system 10 further includes the photoelectric detector 12 and the processor 13 that are electrically connected to each other, the second electromagnetic wave signal and the third electromagnetic wave signal are converted into the electrical signals by the photoelectric detector 12, and the wavelength information of the first electromagnetic wave signal is obtained by the processor 13 based on the electrical signals. The wavelength measurement chip 11 does not need to establish a complex optical system. Compared with a wavelength meter in the conventional technology, the wavelength measurement system has a simpler structure, which helps reduce a size and occupied space. In addition, components in the wavelength measurement chip 11 have a compact structure, which further helps improve reliability of the wavelength measurement chip 11 and the wavelength measurement system 10.
0062A person of ordinary skill in the art should be aware that the foregoing implementations are merely used to describe the present invention, but are not intended to limit the present invention. Appropriate modifications and variations made to the foregoing embodiments shall fall within the protection scope of the present invention as long as they fall within the substantive scope of the present invention.
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| Document | Office | Kind | |
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| CN114689188A | China | A | |
| WO2022142966A1 | World Intellectual Property Organization (WIPO) | A1 | |
| EP4257939A1This record | European Patent Office (EPO) | A1 | |
| US2023341266A1 | United States of America | A1 | |
| JP2024501712A | Japan | A | |
| EP4257939A4 | European Patent Office (EPO) | A4 | |
| JP7648770B2 | Japan | B2 |
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Numbers
- Publication
- 4257939
- Application
- 219137072
Titles3
- German
- WELLENLÄNGENMESSCHIP UND WELLENLÄNGENMESSSYSTEM
- English
- WAVELENGTH MEASUREMENT CHIP AND WAVELENGTH MEASUREMENT SYSTEM
- French
- PUCE DE MESURE DE LONGUEUR D'ONDE ET SYSTÈME DE MESURE DE LONGUEUR D'ONDE
Classification
- CPC, 7
- G01J9/0246
- G01J9/02
- G01J3/45
- G01J2009/023
- G01J2009/0288
- G01J3/0229
- G02B27/1006
- IPC, 2
- G01J3 12
- G01J3 28
Designated states44
- Contracting states, 38
- Albania
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Croatia
- Hungary
- Ireland
- Iceland
- Italy
- Liechtenstein
- Lithuania
- Luxembourg
- Latvia
and 14 moreShow fewer
- Monaco
- North Macedonia
- Malta
- Netherlands (Kingdom of the)
- Norway
- Poland
- Portugal
- Romania
- Serbia
- Sweden
- Slovenia
- Slovakia
- San Marino
- Türkiye
- Extension states, 2
- Bosnia and Herzegovina
- Montenegro
- Validation states, 4
- Cambodia
- Morocco
- Republic of Moldova
- Tunisia