Flip-Chip bonding of light emitting devices and light emitting devices suitable for Flip-Chip bonding

<u>Related Applications</u>

0001The present application claims priority from United States Provisional Patent Application Serial No. <patcit id="pcit0001" dnum="US60307311B"><text>60/307,311</text></patcit> entitled "FLIP CHIP BONDING OF LIGHT EMITTING DIODES" and filed July 23, 2001, the disclosure of which is incorporated herein by reference as if set forth fully.

<u>Field of the Invention</u>

0002The present invention relates to semiconductor devices, and more particularly to semiconductor devices mounted to a submount in a flip-chip configuration.

<u>Background of the Invention</u>

0003GaN-based light emitting diodes (LEDs) typically comprise an insulating, semiconducting or conducting substrate such as sapphire or SiC on which a plurality of GaN-based epitaxial layers are deposited. The epitaxial layers comprise an active region having a p-n junction that emits light when energized. A typical LED is mounted substrate side down onto a submount, also called a package or lead frame (hereinafter referred to as a "submount"). <figref idref="f0001"><b>Figure 1</b></figref> schematically illustrates a conventional LED having an n-type SiC substrate <b>10,</b> an active region <b>12</b> comprising an n-GaN-based layer <b>14</b> and a p-GaN-based layer <b>16</b> grown on the substrate and patterned into a mesa. A metal p-electrode <b>18</b> is deposited on and electrically coupled to the p-GaN layer <b>16</b> and a wire bond connection <b>28</b> is made to a bond pad <b>20</b> on the p-electrode <b>18.</b> An n-eleetrode <b>22</b> on and electrically coupled to the conductive substrate is attached to metallic submount <b>24</b> using a conductive epoxy <b>26.</b> In the conventional process, the conductive epoxy <b>26</b> (usually silver epoxy) is deposited on the submount and the LED is pressed into the epoxy <b>26.</b> The epoxy is then heat cured which causes it to harden, providing a stable and electrically conductive mount for the LED chip. Light generated in the active region <b>12</b> is directed up and out of the device. However, a substantial amount of the generated light may be transmitted into the substrate and partially absorbed by the epoxy 26.

0004Flip-chip mounting of LEDs involves mounting the LED onto the submount substrate side up. Light is then extracted and emitted through the transparent substrate. Flip chip mounting may be an especially desirable technique for mounting SiC-based LEDs. Since SiC has a higher index of refraction than GaN, light generated in the active region does not internally reflect (<i>i.e.</i> reflect back into the GaN-based layers) at the GaN/SiC interface. Flip chip mounting of SiC-based LEDs may offer improved light extraction when employing certain chip-shaping techniques known in the art. Flip chip packaging of SiC LEDs may have other benefits as well, such as improved heat extraction/dissipation, which may be desirable depending on the particular application for the chip.

0005One problem with flip-chip mounting is illustrated in <figref idref="f0002"><b>Figure 2</b></figref><b>.</b> Namely, when a chip is flip-chip mounted on a conductive submount or package conventional techniques may not be possible. Conventionally, a conductive die attach material <b>26,</b> such as silver epoxy, is deposited on the chip and/or on the submount <b>24,</b> and the chip is pressed onto the submount <b>24.</b> This can cause the viscous conductive die attach material <b>26</b> to squeeze out and make contact with the n-type layers <b>14</b> and <b>10</b> in the device, thereby forming a Schottky diode connection that shunts the p-n junction in the active region with predictably undesirable results. Thus, new techniques may be needed for flip-chip mounting of LEDs.

<u>Summary of the Invention</u>

0006Embodiments of the present invention provide for mounting a light emitting device having a gallium nitride based light emitting region on a silicon carbide substrate in a flip-chip configuration by mounting an electrode of the gallium nitride based light emitting region to a submount utilizing a B-stage curable die epoxy.

0007In particular embodiments of the present invention, the electrode is mounted to the submount by forming a predefined pattern of the B-stage curable die epoxy on the electrode, the predefined pattern covering only a predefined portion of the electrode. The electrode of the gallium nitride based light emitting region is attached to the submount utilizing the predefined pattern of the B-stage curable die epoxy. The predefined pattern of B-stage curable die epoxy may be provided by applying the B-stage curable die epoxy to the electrode by screen printing. Preferably, the screen printing provides a resolution of application of the B-stage curable die epoxy of about 4 mils.

0008The predefined pattern of B-stage curable die epoxy may also be provided by dispensing the B-stage epoxy onto desired locations of the electrode. Furthermore, the predefined pattern of B-stage curable die epoxy can be provided by coating the electrode with a B-stage epoxy and selectively removing B-stage epoxy from the electrode to provide the predefined pattern. The B-stage epoxy may be selectively removed by laser scribing the B-stage epoxy to selectively remove epoxy to provide the predefined pattern. If the B-stage epoxy is a photo-sensitive B-stage epoxy the B-stage epoxy may be selectively removed utilizing photolithography to provide the predefined pattern. The predefined pattern of B-stage curable die epoxy may also be provided by pin transferring the B-stage epoxy to locations on the electrode to provide the predefined pattern.

0009In further embodiments of the present invention, forming a predefined pattern of B-stage curable die epoxy is followed by pre-curing the B-stage epoxy. The pre-curing of the B-stage epoxy can be provided by pre-curing the B-stage epoxy utilizing a temperature of from about 50 to about150 °C. In particular, the B-stage epoxy can be pre-cured utilizing a temperature of about 85 °C. Furthermore, the electrode of the gallium nitride based light emitting region may be attached to the submount utilizing the predefined pattern of the B-stage curable die epoxy by placing the light emitting device on the submount and heating the B-stage epoxy to a final curing temperature so as to cause the B-stage epoxy to re-flow. The B-stage epoxy may be heated to a temperature of at least about 150 °C.

0010In particular embodiments, the predefined pattern is a single nodule of B-stage epoxy on the electrode. The predefined pattern may also be a plurality of bumps of B-stage epoxy on the electrode. The predefined pattern may further be a plurality of lines of B-stage epoxy on the electrode. The predefined pattern could also be a criss-cross pattern of B-stage epoxy on the electrode.

0011In additional embodiments of the present invention, a light emitting device die having a mesa configuration on a substrate and an electrode on the mesa is attached to a submount in a flip-chip configuration by forming predefined pattern of conductive die attach material on at least one of the electrode and the submount and mounting the light emitting device die to the submount. The predefined pattern of conductive die attach material is selected so as to prevent the conductive die attach material from contacting sidewalls of the mesa or the substrate when the light emitting device die is mounted to the submount. The predefined pattern of conductive die attach material may provide a volume of die attach material that is less than a volume defined by an area of the electrode and a distance between the electrode and the submount.

0012In further embodiments of the present invention, the predefined pattern is a single nodule of conductive die attach material on the electrode. The predefined pattern may also be a plurality of bumps of conductive die attach material on the electrode. The predefined pattern may further be a plurality of lines of conductive die attach material on the electrode. The predefined pattern could also be a criss-cross pattern of conductive die attach material on the electrode.

0013In additional embodiments of the present invention, the conductive die attach material is at least one of a B-stage curable die epoxy, a solder paste, a pattern of solder bumps, and/or a conductive polymer. If the conductive die attach material is solder paste, the predefined pattern may be provided by forming a predefined pattern of solder paste by at least one of screen printing, dispensing and/or pin transferring, If the conductive die attach material is solder bumps, the predefined pattern may be provided by forming a predefined pattern of solder bumps by at least one of dispensing a solder paste and reflowing, electroplating and/or dipping. If the conductive die attach material is a B-stage curable die epoxy and/or a conductive polymer, the predefined pattern may be provided by forming a pattern of a B-stage curable-die epoxy and/or a conductive polymer by screen printing, dispensing, dispensing and reflowing, layering and laser scribing, photolithography and/or pin transferring methods.

0014In still further embodiments of the present invention, light emitting device dive suitable for mounting on a submount includes a conducting substrate, such as a silicon carbide substrate, a gallium nitride based active region on the silicon carbide substrate and a first electrode on the gallium nitride based active region opposite the substrate. In some embodiments, the first electrode and the gallium nitride based active region form a mesa having sidewalls. A second electrode is provided on the silicon carbide substrate opposite the gallium nitride active region. A predefined pattern of conductive die attach material is provided on the first electrode opposite the gallium nitride active region that substantially prevents the conductive die attach material from contacting the sidewalls of the mesa and/or the substrate when the light emitting device die is mounted to the submount.

0015The predefined pattern of conductive die attach material may provide a volume of die attach material that is less than a volume defined by an area of the first electrode and a distance between the first electrode and the submount. The predefined pattern may be a single nodule of conductive die attach material on the first electrode. The predefined pattern may also be a plurality of bumps of conductive die attach material on the first electrode. The predefined pattern could be a plurality of lines of conductive die attach material on the first electrode. The predefined pattern could also be a criss-cross pattern of conductive die attach material on the first electrode.

0016The conductive die attach material may be a B-stage curable die epoxy, a solder paste, a pattern of solder bumps, and/or a conductive polymer.

0017A submount may also be provided. In such a case, the first electrode is mounted to the submount by the predefined pattern of conductive die attach material.

0018Additional embodiments of the present invention provide a light emitting device die suitable for mounting on a submount that includes a substrate, such as a silicon carbide substrate, a gallium nitride based active region on the substrate and a first electrode on the nitride based active region opposite the substrate. The first electrode and the gallium nitride based active region may form a mesa having sidewalls. A second electrode may be provided on the substrate opposite the gallium nitride active region. The B-stage conductive epoxy is provided on the first electrode opposite the gallium nitride active region

0019The B-stage conductive epoxy may be provided in a predefined pattern. The predefined pattern of B-stage conductive epoxy may provide a volume of B-stage conductive epoxy that is less than a volume defined by an area of the first electrode and a distance between the first electrode and the submount. The predefined pattern may be a single nodule of B-stage conductive epoxy on the first electrode. The predefined pattern could also be a plurality of bumps of B-stage conductive epoxy on the first electrode. The predefined pattern may further be a plurality of lines of B-stage conductive epoxy on the first electrode. The predefined pattern could also be a criss-cross pattern of B-stage conductive epoxy on the first electrode.

0020A submount may also be provided. In such a case, the first electrode is mounted to the submount by the B-stage conductive epoxy.

0021In further embodiments of the present invention, a light emitting device die includes a gallium nitride based active region having at least one region of a first conductivity type and a first electrode electrically coupled to the gallium nitride based active region. A region of semiconductor material of a second conductivity type is electrically coupled to the gallium nitride based active region. The second conductivity type is opposite to the first conductivity type. A predefined pattern of conductive die attach material is on the first electrode opposite the gallium nitride active region and configured to substantially prevent the conductive die attach material from contacting the region of semiconductor material of a second conductivity type when the light emitting device die is mounted to a submount.

0022A second electrode may also be provided on the region of semiconductor material of a second conductivity type. A substrate may also be provide and the gallium nitride based active region may be on the substrate. The first electrode and the second electrode may be on opposite sides of the substrate or may be on the same side of the substrate. The substrate may be insulating or conductive. In certain embodiments of the present invention, the substrate is a silicon carbide substrate.

<u>Clauses Setting Out Further Aspects And Embodiments</u>

0023<ol id="ol0001" compact="compact"><li>1. A method of mounting a light emitting device having a gallium nitride based light emitting region on a silicon carbide substrate in a flip-chip configuration, the method comprising: mounting an electrode of the gallium nitride based light emitting region to a submount utilizing a B-stage curable die epoxy.</li><li>2. The method of Clause 1, wherein the step of mounting comprises: forming a predefined pattern of the B-stage curable die epoxy on at least one of the electrode and/or the submount; and attaching the electrode of the gallium nitride based light emitting region and the submount to one another utilizing the predefined pattern of the B-stage curable die epoxy.</li><li>3. The method of Clause 2, wherein forming a predefined pattern of B-stage curable die epoxy comprises applying the B-stage curable die epoxy to the electrode by screen printing.</li><li>4. The method of Clause 3, wherein the screen printing provides a resolution of application of the B-stage curable die epoxy of about 4 mils.</li><li>5. The method of Clause 2, wherein forming a predefined pattern of B-stage curable die epoxy comprises dispensing the B-stage epoxy onto desired locations of the electrode.</li><li>6. The method of Clause 2, wherein forming a predefined pattern of B- stage curable die epoxy comprises: coating the electrode with a B-stage epoxy; and selectively removing B-stage epoxy from the electrode to provide the predefined pattern.</li><li>7. The method of Clause 6, wherein the step of selective removing comprises laser scribing the B-stage epoxy to selectively remove epoxy to provide the predefined pattern.</li><li>8. The method of Clause 6, wherein the B-stage epoxy comprises a photosensitive B-stage epoxy and wherein forming a predefined pattern of B-stage curable die epoxy comprises selectively removing epoxy utilizing photolithography to provide the predefined pattern.</li><li>9. The method of Clause 2, wherein forming a predefined pattern of B-stage curable die epoxy comprises pin transferring the B-stage epoxy to locations on the electrode to provide the predefined pattern.</li><li>10. The method of Clause 2, wherein forming a predefined pattern of B-stage curable die epoxy is followed by the step of pre-curing the B-stage epoxy.</li><li>11. The method of Clause 10, wherein pre-curing the B-stage epoxy comprises pre-curing the B-stage epoxy utilizing a temperature of from about 50 to about 150°C.</li><li>12. The method of Clause 10, wherein pre-curing the B-stage epoxy comprises pre-curing the B-stage epoxy utilizing a temperature of about 85 °C.</li><li>13. The method of Clause 2, wherein attaching the electrode of the gallium nitride based light emitting region and the submount to one another utilizing the predefined pattern of the B-stage curable die epoxy comprises: placing the light emitting device on the submount; and heating the B-stage epoxy to a final curing temperature so as to cause the B-stage epoxy to reflow.</li><li>14. The method of Clause 13, wherein the step of heating comprises heating the B-stage epoxy to a temperature of at least about 150 °C.</li><li>15. The method of Clause 2, wherein the predefined pattern comprises a single nodule of B-stage epoxy on the electrode.</li><li>16. The method of Clause 2, wherein the predefined pattern comprises a plurality of bumps of B-stage epoxy on the electrode.</li><li>17. The method of Clause 2, wherein the predefined pattern comprises a plurality of lines of B-stage epoxy on the electrode.</li><li>18. The method of Clause 2, wherein the predefined pattern comprises a criss-cross pattern of B-stage epoxy on the electrode.</li><li>19. A method for attaching a light emitting device die and a submount to one another in a flip-chip configuration, the light emitting device die having a mesa configuration on a substrate and an electrode on the mesa, the method comprising; forming predefined pattern of conductive die attach material on at least one of the electrode and the submount; attaching the light emitting device die and the submount to one another with the conductive die attach material therebetween; and wherein the predefined pattern of conductive die attach material is selected so as to prevent the conductive die attach material from contacting sidewalls of the mesa and/or the substrate during the attaching.</li><li>20. The method of Clause 19, wherein the predefined pattern of conductive die attach material provides a volume of die attach material that is less than a volume defined by an area of the electrode and a distance between the electrode and the submount.</li><li>21. The method of Clause 19, wherein the predefined pattern comprises a single nodule of conductive die attach material on the electrode.</li><li>22. The method of Clause 19, wherein the predefined pattern comprises a plurality of bumps of conductive die attach material on the electrode.</li><li>23. The method of Clause 19, wherein the predefined pattern comprises a plurality of lines of conductive die attach material on the electrode.</li><li>24. The method of Clause 19, wherein the predefined pattern comprises a criss-cross pattern of conductive die attach material on the electrode.</li><li>25. The method of Clause 19, wherein the conductive die attach material comprises at least one of a B-stage curable die epoxy, a solder paste, a pattern of solder bumps, and/or a conductive polymer.</li><li>26. The method of Clause 19, wherein the conductive die attach material comprises solder paste, and wherein forming a predefined pattern comprises forming a predefined pattern of solder paste by at least one of screen printing, dispensing and/or pin transferring.</li><li>27. The method of Clause 19, wherein the conductive die attach material comprises solder bumps and wherein forming a predefined pattern comprises forming a predefined pattern of solder bumps by at least one of dispensing and reflowing, electroplating an/or dipping.</li><li>28. The method of Clause 19, wherein the conductive die attach material comprises at least one of a B-stage curable die epoxy and/or a conductive polymer, and wherein forming a predefined pattern comprises forming a predefined pattern of the at least one of a B-stage curable-die epoxy and/or a conductive polymer by at least one of screen printing, dispensing, layering and laser scribing, photolithography and/or pin transferring.</li><li>29. A light emitting device die, comprising: a conducting substrate; a gallium nitride based active region on the conducting substrate; a first electrode on the nitride based active region opposite the conducting substrate, the first electrode and the gallium nitride based active region forming a mesa having sidewalls; a second electrode on the conducting substrate opposite the gallium nitride active region; and a predefined pattern of conductive die attach material on the first electrode opposite the gallium nitride active region that substantially prevents the conductive die attach material from contacting at least one of the sidewalls of the mesa and the substrate when the light emitting device die is mounted to a submount.</li><li>30. The die of Clause 29, wherein the conducting substrate comprises a silicon carbide substrate.</li><li>31. The die of Clause 29, wherein the predefined pattern of conductive die attach material provides a volume of die attach material that is less than <i>a</i> volume defined by an area of the first electrode and <i>a</i> distance between the first electrode and the submount,</li><li>32. The die of Clause 29, wherein the predefined pattern comprises a single nodule of conductive die attach material on the first electrode.</li><li>33. The die of Clause 29, wherein the predefined pattern comprises a plurality of bumps of conductive die attach material on the first electrode.</li><li>34. The die of Clause 29, wherein the predefined pattern comprises a plurality of lines of conductive die attach material on the first electrode.</li><li>35. The die of Clause 29, wherein the predefined pattern comprises a crisscross pattern of conductive die attach material on the first electrode.</li><li>36. The die of Clause 29, wherein the conductive die attach material comprises at least one of a B-stage curable die epoxy, a solder paste, a pattern of solder bumps, and/or a conductive polymer.</li><li>37. The die of Clause 29, further comprising a submount, wherein the first electrode is mounted to the submount by the predefined pattern of conductive die attach material.</li><li>38. A light.emitting device die, comprising: a substrate; a gallium nitride based active region on the substrate; a first electrode on the nitride based active region opposite the substrate; a B-stage conductive epoxy on the first electrode opposite the gallium nitride active region.</li><li>39. The die of Clause 38, wherein the first electrode and the gallium nitride based active region form a mesa having sidewalls.</li><li>40. The die of Clause 38, wherein the substrate is a conducting substrate, the die further comprising a second electrode on the conducting substrate opposite the gallium nitride active region.</li><li>41. The die of Clause 38, wherein the substrate is an insulating substrate, the die further comprising a second electrode on the conducting substrate on a same side of the substrate as the gallium nitride active region.</li><li>42. The die of Clause 38, wherein the conducting substrate comprises a silicon carbide substrate.</li><li>43. The die of Clause 38, wherein the B-stage conductive epoxy is on the first electrode in a predefined pattern.</li><li>44. The die of Clause 43, wherein the predefined pattern of conductive die attach material provides a volume of die attach material that is less than a volume defined by an area of the first electrode and a distance between the first electrode and the submount.</li><li>45. The die of Clause 43, wherein the predefined pattern comprises a single nodule of B-stage conductive epoxy on the first electrode.</li><li>46. The die of Clause 43, wherein the predefined pattern comprises a plurality of bumps of B-stage conductive epoxy on the first electrode.</li><li>47. The die of Clause 43, wherein the predefined pattern comprises a plurality of lines of B-stage conductive epoxy on the first electrode.</li><li>48. The die of Clause.43, wherein the predefined pattern comprises a criss-cross pattern of B-stage conductive epoxy on the first electrode.</li><li>49. The die of Clause 38, further comprising a submount, wherein the first electrode is mounted to the submount by the B-stage conductive epoxy.</li><li>50. A light emitting device die for flip-chip mounting, comprising: a gallium nitride based active region having at least one region of a first conductivity type; a first electrode electrically coupled to the gallium nitride based active region; a region of semiconductor material of a second conductivity type electrically coupled to the gallium nitride based active region, the second conductivity type being opposite to the first conductivity type; and a predefined pattern of conductive die attach material on the first electrode opposite the gallium nitride active region, the predefined pattern being configured to substantially prevent the conductive die attach material from contacting the region of semiconductor material of a second conductivity type when the light emitting device die is mounted to a submount.</li><li>51. The die of Clause 50, further comprising a second electrode on the region of semiconductor material of a second conductivity type.</li><li>52. The die of Clause 51, further comprising a substrate, wherein the gallium nitride based active region is on the substrate.</li><li>53. The die of Clause <i>52</i>, wherein the first electrode and the second electrode are on opposite sides of the substrate.</li><li>54. The die of Clause 52, wherein the first electrode and the second electrode are on a same side of the substrate.</li><li>55. The die of Clause 52, wherein the substrate comprises a silicon carbide substrate.</li><li>56. The die of Clause 50, wherein the predefined pattern of conductive die attach material provides a volume of die attach material that is less than a volume defined by an area of the first electrode and a distance between the first electrode and the submount.</li><li>57. The die of Clause 50, wherein the predefined pattern comprises a single nodule of conductive die attach material on the first electrode.</li><li>58. The die of Clause 50, wherein the conductive die attach material comprises solder.</li><li>59. The die of Clause 50, wherein the predefined pattern comprises a plurality of bumps of conductive die attach material on the first electrode.</li><li>60. The die of Clause 50, wherein the predefined pattern comprises a plurality of lines of conductive die attach material on the first electrode.</li><li>61. The die of Clause 50, wherein the predefined pattern comprises a criss-cross pattern of conductive die attach material on the first electrode.</li><li>62. The die of Clause 50, wherein the conductive die attach material comprises at least one of a B-stage curable die epoxy, a solder paste, a pattern of solder bumps, and/or a conductive polymer.</li><li>63. The die of Clause 50, further comprising a submount, wherein the first electrode is mounted to the submount by the predefined pattern of conductive die attach material.</li></ol>

<u>Brief Description of the Drawings</u>

0024<ul id="ul0001" list-style="none" compact="compact"><li><figref idref="f0001">Figure 1</figref> is a schematic illustration of a conventional LED;</li><li><figref idref="f0002">Figure 2</figref> is a schematic illustration of a flip-chip mounted LED utilizing conventional techniques;</li><li><figref idref="f0003">Figures 3A, 3B</figref>, <figref idref="f0004">3C and 3D</figref> are illustrations of patterns of die attach material according to various embodiments of the present invention;</li><li><figref idref="f0005">Figure 4</figref> is a flowchart illustrating operations according to embodiments of the present invention;</li><li><figref idref="f0006">Figure 5</figref> is an illustration of an LED attached to a submount according to embodiments of the present invention;</li><li><figref idref="f0007">Figure 6</figref> is a planar view of an LED with a p-type electrode having die attach material bumps in a pattern according to embodiments of the present invention;</li><li><figref idref="f0007">Figure 7</figref> is a side view of the LED of <figref idref="f0007">Figure 6</figref>; and</li><li><figref idref="f0008">Figure 8</figref> is a side view of the LED of <figref idref="f0007">Figures 6 and 7</figref> after mounting to the submount.</li></ul>

<u>Detailed Description of the Preferred Embodiments</u>

0025The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. Like numbers refer to like elements throughout. Furthermore, the various layers and regions illustrated in the figures are illustrated schematically. As will also be appreciated by those of skill in the art, references herein to a layer formed "on" a substrate or other layer may refer to the layer formed directly on the substrate or other layer or on an intervening layer or layers formed on the substrate or other layer. Accordingly, the present invention is not limited to the relative size and spacing illustrated in the accompanying figures.

0026Embodiments of the present invention provide for connecting a light emitting device having a light emitting element, such as an LED die, to a submount or package in a flip-chip configuration using a die attach material that can be applied to an electrode of the light emitting device, such as the p-electrode, and/or the submount or package prior to packaging the light emitting device. The die attach material can be used to form a conductive attachment between the light emitting device and the submount without forming a parasitic diode that shunts the p-n diode of the device. In some embodiments, the shunt diode may be avoided by preventing the conductive adhesive from substantially flowing during curing. In other embodiments, the shunt diode may be avoided by preventing the conductive adhesive from contacting a region of the device of opposite conductivity type to that of the region to which the conductive adhesive provides a contact. Thus, for example, if the conductive adhesive provides a contact to the p-type contact of the device, the shunt diode may be avoided by preventing the conductive adhesive from contacting an n-type region of the device. If the conductive adhesive provides a contact to the n-type contact of the device, the shunt diode may be avoided by preventing the conductive adhesive from contacting a p-type region of the device.

0027In further embodiments of the present invention where the conductive adhesive is solder, the conductive adhesive may facilitate heat extraction from the device when the device is mounted in a flip-chip configuration. Such heat extraction may be beneficial for high power devices, such as devices that may be suitable for use in white light applications. Furthermore, while the present invention is described herein primarily with reference to devices.having contacts on opposite sides of the device, embodiments of the present invention may also be beneficial for devices having both contacts on the same side of the device. In such a case, the conductive adhesive may provided in a manner where the conductive adhesive of the contact do not form a shunt diode by contacting a regions of the device of opposite conductivity type of that to which the conductive adhesive makes contact. Furthermore, the conductive adhesive of the two contacts should not contact each other.

0028Embodiments of the present invention are described herein with reference to a GaN based LED on an n-type SiC substrate <b>10</b> and having a n-type layer <b>14,</b> a p-type layer <b>16</b> and a p-electrode <b>18</b> electrically coupled to the p-type layer. However, the present invention should not be construed as limited to such structures. Thus, references herein to the conductive die attach material shorting to the n-type regions <b>10</b> and <b>14</b> are provided for illustrative purposes only. Thus, references to shorting to the n-type regions <b>10</b> and <b>14</b> may be considered as references to other layers in other device structures (for example to quantum well and/or barrier layers in a multi-quantum well device) where unintentional contact with the die attach material would result in impaired performance, reliability or other characteristics of the device.

0029Light emitting devices for use in embodiments of the present invention may be gallium nitride based LEDs or lasers fabricated on a silicon carbide substrate such as those devices manufactured and sold by Cree, Inc. of Durham, North Carolina. For example, the present invention may be suitable for use with LEDs and/or lasers as described in United States Patent Nos.<patcit id="pcit0002" dnum="US6201262B"><text> 6,201,262</text></patcit>, <patcit id="pcit0003" dnum="US6187606B"><text>6,187,606</text></patcit>, <patcit id="pcit0004" dnum="US6120600A"><text>6,120,600</text></patcit>, <patcit id="pcit0005" dnum="US5912477A"><text>5,912,477</text></patcit>, <patcit id="pcit0006" dnum="US5739554A"><text>5,739,554</text></patcit>, <patcit id="pcit0007" dnum="US5631190A"><text>5,631,190</text></patcit>,<patcit id="pcit0008" dnum="US5604135A"><text> 5,604,135</text></patcit>, <patcit id="pcit0009" dnum="US5523589A"><text>5,523,589</text></patcit>, <patcit id="pcit0010" dnum="US5416342A"><text>5,416,342</text></patcit>,<patcit id="pcit0011" dnum="US5393993A"><text> 5,393,993</text></patcit>,<patcit id="pcit0012" dnum="US5338944A"><text> 5,338,944</text></patcit>, <patcit id="pcit0013" dnum="US5210051A"><text>5,210,051</text></patcit>, <patcit id="pcit0014" dnum="US5027168A"><text>5,027,168</text></patcit>, <patcit id="pcit0015" dnum="US5027168A"><text>5,027,168</text></patcit>, <patcit id="pcit0016" dnum="US4966862A"><text>4,966,862</text></patcit> and/or <patcit id="pcit0017" dnum="US4918497A"><text>4,918,497</text></patcit>, the disclosures of which are incorporated herein by reference as if set forth fully herein. Other suitable LEDs and/or lasers are described in United States Provisional Patent Application Serial No. <patcit id="pcit0018" dnum="US60294378B"><text>60,294,378</text></patcit>, entitled "LIGHT EMITTING DIDODE STRUCTURE WITH MULTI-QUANTUM WELL AND SUPERLATTICE STRUCTURE", United States Provisional Patent Application Serial No. <patcit id="pcit0019" dnum="US60294445B"><text>60/294,445</text></patcit>, entitled "MULTI-QUANTUM LIGHT EMITTING DIODE STRUCTURE" and United States Provisional Patent Application Serial No. <patcit id="pcit0020" dnum="US60294308B"><text>60,294,308</text></patcit>, entitled "LIGHT EMITTING DIDODE STRUCTURE WITH SUPERLATTICE STRUCTURE", each filed May 30,2001, United States Patent Application Serial No. <patcit id="pcit0021" dnum="US10140796B"><text>10/140,796</text></patcit>, entitled "GROUP III NITRIDE BASED LIGHT EMITTING DIODE STRUCTURES WITH A QUANTUM WELL AND SUPERLATTICE, GROUP III NITRIDE BASED QUANTUM WELL STRUCTURES AND GROUP III NITRIDE BASED SUPERLATTICE STRUCTURES", filed May 7,2002, as well as United States Provisional Patent Application Serial No. <patcit id="pcit0022" dnum="US1005782A"><text>10/057,82</text></patcit>, entitled "LIGHT EMITTING DIODES INCLUDING SUBSTRATE MODIFICATIONS FOR LIGHT EXTRACTION AND MANUFACTURING METHODS THEREFOR" filed July 23, 2001 and United States Patent Application Serial No. <patcit id="pcit0023" dnum="US1005782A"><text>10/057,82, filed January 25, 2002</text></patcit> entitled "LIGHT EMITTING DIODES INCLUDING SUBSTRATE MODIFICATIONS FOR LIGHT EXTRACTION AND MANUFACTURING METHODS THEREFOR." the disclosures of which are incorporated herein as if set forth fully.

0030In particular embodiments of the present invention, the light emitting devices may include a p-electrode that provides a reflecting layer to reflect light generated in the active region back through the device. Reflective p-electrodes and related structures are described in <patcit id="pcit0024" dnum="US0578202A"><text>U.S. Patent Application Serial No. 10/057,82</text></patcit> entitled "LIGHT EMITTING DIODES INCLUDING SUBSTRATE MODIFICATIONS FOR LIGHT EXTRACTION AND MANUFACTURING METHODS THEREFOR" filed January 25, 2002, which is hereby incorporated by reference as if set forth fully herein.

0031The LEDs and/or lasers may be configured to operate in a "flip-chip" configuration such that light emission occurs through the substrate. In such embodiments, the substrate may be patterned so as to enhance light output of the devices as is described, for example, in United States Provisional Patent Application Ser. No. <patcit id="pcit0025" dnum="US60307235B"><text>60/307,235 filed July 23, 2001</text></patcit> entitled "LIGHT EMITTING DIODES INCLUDING SUBSTRATE MODIFICATIONS FOR LIGHT EXTRACTION AND MANUFACTURING METHODS THEREFOR" and United States patent Application Serial No. <patcit id="pcit0026" dnum="US1005782A"><text>10/057,82 filed January 25, 2002</text></patcit> entitled entitled "LIGHT EMITTING DIODES INCLUDING SUBSTRATE MODIFICATIONS FOR LIGHT EXTRACTION AND MANUFACTURING METHODS THEREFOR."

0032In particular embodiments of the present invention, the die attach material may be provided in a pattern on the p-electrode of a gallium nitride based light emitting device formed on a silicon carbide substrate. As used herein, the term pattern means that the die attach material covers some, but not all, of the surface on which it is placed. In such embodiments, the pattern may be selected so as to substantially prevent the conductive die attach material from flowing to the sidewalls of the gallium nitride device so as to short the active region of the device. In other embodiments, the pattern may be selected to prevent the conductive adhesive from substantially flowing during curing/bonding. Examples of suitable patterns of conducive die attach material are shown in <figref idref="f0003 f0004"><b>Figures 3A-3D</b></figref><b>.</b> As seen in <figref idref="f0003"><b>Figure 3A</b></figref><b>,</b> a single nodule of die attach material <b>30</b> is provided on a p-electrode <b>18</b> of a light emitting device on the substrate <b>10.</b><figref idref="f0003"><b>Figure 3B</b></figref> shows die attach material <b>30</b> formed in an array of nodules on the p-electrode <b>18.</b><figref idref="f0004"><b>Figure 3C</b></figref> shows die attach material <b>30</b> formed in an array of lines on the p-electrode <b>18.</b><figref idref="f0004"><b>Figure 3D</b></figref> shows die attach material <b>30</b> formed in a criss-cross or "X" pattern on the p-electrode <b>18.</b> Other patterns may be employed without departing from the invention. In some embodiments, the pattern of conductive die attach material provides a volume of die attach material which is less than a volume defined by the area of the p-electrode of the light emitting device and the distance between the light emitting device and the submount.

0033The particular technique for providing a pattern of conductive die attach material may depend on the conductive die attach material. Suitable die attach materials include a B-stage curable die epoxy (or a "B-stage epoxy"), a solder paste, a pattern of solder bumps, and/or a conductive polymer. Embodiments of the invention include methods of applying a die attach material to an LED die or wafer and further include an LED die having deposited thereon a die attach material. Additional embodiments include methods of patterning a die attach material on an LED die or applying a patterned die attach material to an LED die or wafer, and further include the resulting LED die.

0034As discussed above, the die attach material may comprise a standard B-stage epoxy. Such epoxies are available commercially from, for example, Emerson Cumming, Ablestik, Dexter, Diemat and Epotek. In particular, Ablestik's RP333-3 epoxy, Dexter's BMI-519 epoxy and Emerson and Cumming's LA-9843-28 epoxy are suitable B-stage epoxies. In some embodiments of the present invention, the epoxy has the following characteristics: <ul id="ul0002" list-style="bullet" compact="compact"><li>B stage curable;</li><li>Electrically conductive;</li><li>Able to withstand water (during subsequent wafer sawing operations); and</li><li>Sufficient physical strength to withstand subsequent processing operations (<i>e.g</i>. mounting and demounting from a tape).</li></ul>

0035In other embodiments, the B-stage epoxy need not be electrically conductive, and a separate electrically conductive path may be provided. The die attach material may comprise a conductive polymer such as CB028 manufactured by DuPont.

0036Operations for fabricating light emitting device dies according to embodiments of the present invention will now be described with reference to the flowchart of <figref idref="f0005"><b>Figure 4</b></figref><b>.</b> As seen in <figref idref="f0005">Figure 4</figref>, a GaN based light emitting device, such as those described above, is fabricated on a SiC substrate (block 100). In such fabrication, after deposition of the desired epitaxial layers on a SiC wafer but prior to dicing, ohmic contacts are formed on opposite sides of the wafer. The wafer is patterned into LEDs, for example, by etching to form a plurality of mesas. In some embodiments, a passivation layer is formed to protect the epitaxial layers such as described in United States Provisional Patent Application Serial No. <patcit id="pcit0027" dnum="US60352941B"><text>60/352,941, filed January 30,2002</text></patcit> and entitled "LED DIE ATTACH METHODS AND RESULTING STRUCTURES", the disclosure of which is incorporated herein by reference as if set forth fully herein. However, even in such embodiments, using conventional methods the possibility may exist that the die attach material may contact the substrate, for example, at a portion where the substrate has been sawn or broken and, thereby form a shunt diode. Similarly, if the passivation layer is somehow damaged, for example at a region where the substrate is broken, a contact could unintentionally be made in such areas.

0037After fabrication of the light emitting devices, the die attach material is formed in a predefined pattern on the p-electrode of the LEDs (block <b>105).</b> If a B-stage epoxy or conductive polymer is used, it may be deposited using any of the following techniques (or a combination of techniques, if desired): <ul id="ul0003" list-style="bullet" compact="compact"><li><u>Screen printing</u>. In these embodiments, the B-stage epoxy or polymer is applied to the p-electrodes by screen printing using automated vision control. Screen printing and machine vision systems are well known in the art and, therefore, will not be described further herein. A suitable screen printing machine for this application is the SPM screen printer manufactured by MPM corporation. If screen printing is used, the epoxy should be capable of being screen printed at appropriate dimensions. In some embodiments, the epoxy may be screen printable with a minimum feature size of about 4 mils.</li></ul><ul id="ul0004" list-style="bullet" compact="compact"><li><u>Dispensing</u>. In these embodiments, the B-stage epoxy is dispensed directly from a source onto the desired locations on the wafer or submount. These embodiments may be used depending on the type of epoxy used and may include pin transfer, pneumatic dispensing and/or positive displacement dispensing via an auger or piston action.</li><li><u>Layering and laser scribing</u>. In these embodiments, the p-electrode side of the wafer is coated entirely with a B-stage epoxy, and laser scribing is used to selectively remove unwanted epoxy.</li><li><u>Photolithography</u>. In these embodiments, a photo-sensitive B-stage epoxy is applied to the p-electrode side of the wafer and photolithographic techniques are used to selectively remove unwanted epoxy.</li></ul>

0038Other techniques for selectively providing a pattern of B-stage epoxy may also be utilized.

0039Once the B-stage epoxy has been deposited, it is pre-cured to cause it to solidify. Typical heat ranges for pre-curing are 50-150 °C. Preferably, the pre-curing occurs at temperatures below 85 °C to avoid damaging other materials used in the manufacturing process such as a mounting tape.

0040As mentioned above, other conductive die attach materials may also be utilized in certain embodiments of the present invention. For example, solder paste may be used as the die attach material. Solder paste generally includes a solder metal or alloy such as Au/Ge, Pb/Sn, Au/Sn or In mixed together with solvents and/or binders to form a paste. Solder paste may be applied by screen printing, dispensing or pin transferring as described above in connection with epoxies. In particular embodiments of the present invention where solder is used as the die attach material, pin transferring techniques may be used to provide a solder dot as the pattern of the die attach material. For example, a solder dot of about 0.2 mm formed by pin transfer techniques may be used to attach the device to the submount.

0041Similarly, the die attach material may comprise solder bumps formed on the p-electrode. Solder bumps generally includes solder metal without binders or solvents, and may be deposited by, for example, dispensing a solder paste and subsequent reflow, electroplating and/or dipping.

0042In any event, after the conductive die attach material pattern is provided on the p-electrodes of the devices on the wafer, the wafer is swan and/or sawn and broken using conventional techniques to separate the individual dies (block <b>110</b>). Since the sawing may be done under a flow of de-ionized (DI) water, in some embodiments the conductive die attach material, such as the B-stage epoxy, is able to withstand water as well as the mechanical stress imparted from sawing and breaking. The individual die may then be secured onto adhesive tape rolls to facilitate automated packaging. Additionally, unitized groups of dies may be provided as described in United States Patent Application Serial No. <patcit id="pcit0028" dnum="US10058369B"><text>10/058,369 filed January 28, 2002</text></patcit>, entitled "CLUSTER PACKAGING OF LIGHT EMITTING DIODES," the disclosure of which is incorporated herein by reference as if set forth fully herein.

0043Individual dies may then be attached to a submount utilizing the conductive die attach material on the p-electrode (block <b>115).</b> For example, when the final packaging is performed for a die (<i>i</i>.<i>e</i>. the die is mounted onto the submount or package) utilizing a B-stage epoxy as the conductive die attach material, the die may be set in place on the submount and heated to a final curing temperature (typically in excess of 150 °C). This causes the epoxy to re-flow and create a permanent connection between the LED chip and the submount. However, because of the conductive die attach material utilized, the pattern of the material on the p-electrode and/or the pressure used during bonding, the conductive material does not flow onto the sidewalls of the mesa and/or the substrate of the device thereby creating a shunt diode in parallel with the active region of the device. A wirebond connection is then made to the n-electrode.

0044While <figref idref="f0005"><b>Figure 4</b></figref> illustrates embodiments of the present invention where the die attach material is provided on the p-electrode of the device, alternatively, the die attach material may be applied directly to the package or submount in a desired pattern or to both the submount and the p-electrode. In such embodiments, the submount is heated to the final curing temperature and the LED chip is pressed onto the submount. Since a B-stage epoxy is used instead of the less viscous conventional epoxies, there is less likelihood of contacting the n-type layers of the active region of the device with the epoxy.

0045<figref idref="f0006"><b>Figure 5</b></figref> illustrates an LED mounted in accordance with embodiments of the present invention. As shown in <figref idref="f0006"><b>Figure 5</b></figref><b>,</b> the die attach material epoxy <b>30</b> is disposed between the p-electrode <b>18</b> and the submount <b>24</b> but does not contact the n-type layer <b>14</b> or the substrate <b>10</b> of the device. Thus, the volume of the die attach material <b>30</b> is less than the volume defined by the area of the p-electrode <b>18</b> and the distance between the p-electrode <b>18</b> and the submount <b>24.</b>

0046<figref idref="f0007"><b>Figure 6</b></figref> illustrates a substrate <b>10</b> and a p-electrode <b>18</b> of a light emitting device on which an array of bumps of conductive die attach material <b>30</b> have been formed, such as through deposition, patterning, plating and/or other techniques. <figref idref="f0007"><b>Figure 7</b></figref> illustrates the light emitting device of <figref idref="f0007"><b>Figure 6</b></figref> in elevation. After deposition of the bumps <b>30</b> the LED is placed on a submount and the device is heated at a temperature sufficient to reflow the bumps <b>30.</b> In some embodiments, flux may also applied as part of the reflow process. The reflow temperature depends on the particular metal or alloy used. For example, alloys containing a high percentage of Sn may have a meting point below 200 °C, while alloys having a low percentage of Sn may have a melting point above 350 °C. In some embodiments, while the bumps are at an increased temperature, surface tension keeps the bumps from outflowing and wetting the n-type layer <b>14</b> or the substrate <b>10</b> of the LED. In other embodiments, non-wettable patterns and/or solder dams may be used to control outflow.

0047After the bumps have been melted the device is cooled, thereby bonding the LED to the submount <b>24.</b><figref idref="f0008"><b>Figure 8</b></figref> illustrates an LED mounted in accordance with these embodiments of the present invention. As seen in <figref idref="f0008"><b>Figure 8</b></figref><b>,</b> the bumps of die attach material epoxy <b>30</b> are disposed between the p-electrode <b>18</b> and the submount <b>24</b> but do not contact the n-type layer <b>14</b> or the substrate <b>10</b> of the device. Thus, the volume of the die attach material <b>30</b> (<i>e.g</i>. the solder bumps) is less than the volume defined by the area of the p-electrode <b>18</b> and the distance between the p-electrode <b>18</b> and the submount <b>24.</b> Therefore, no Schottky diode connection is made between the solder bumps and the n-type portions of the LED.

0048In the drawings and specification, there have been disclosed typical preferred embodiments of the invention and, although specific terms are employed, they are used in a generic and descriptive sense only and not for purposes of limitation, the scope of the invention being set forth in the following claims.