EP2201593A2

Method of treating a surface of at least one part by means of individual sources of an electron cyclotron resonance plasma

Abstract

This record has no abstract on file.

Term

2 yearsto projected expiry

Projected expiry 9 October 2028, counted from filing; an application has no term until it is granted.

27 members in 17 offices

This recordMember, by publication datePriority claim7 more offices are in the list below

Priority claims3

Priority claims
Document	Office	Kind	Date
0758368	France	–	2007-10-16
0758368	France	A	2007-10-16
2008051824	France	W	2008-10-09

Members27

Family members, oldest first
Document	Office	Kind
FR2922358A1	France	A1	2009-04-17
CA2700575A1	Canada	A1	2009-04-30
WO2009053614A2	World Intellectual Property Organization (WIPO)	A2	2009-04-30
WO2009053614A3	World Intellectual Property Organization (WIPO)	A3	2009-06-18
TW200935486A	Taiwan Province of China	A	2009-08-16
MX2010003596A	Mexico	A	2010-04-21
KR20100071062A	Republic of Korea	A	2010-06-28
EP2201593A2This record	European Patent Office (EPO)	A2	2010-06-30
US2010219160A1	United States of America	A1	2010-09-02
CN101828246A	China	A	2010-09-08
JP2011504206A	Japan	A	2011-02-03
RU2010119461A	Russian Federation	A	2011-11-27
FR2922358B1	France	B1	2013-02-01
CN101828246B	China	B	2013-07-24
RU2504042C2	Russian Federation	C2	2014-01-10
TWI428953B	Taiwan Province of China	B	2014-03-01
US8728588B2	United States of America	B2	2014-05-20
BRPI0818587A2	Brazil	A2	2015-04-22
JP5721436B2	Japan	B2	2015-05-20
KR20150123321A	Republic of Korea	A	2015-11-03
CA2700575C	Canada	C	2016-06-14
EP2201593B1	European Patent Office (EPO)	B1	2017-02-01
PT2201593T	Portugal	T	2017-03-29
LT2201593T	Lithuania	T	2017-05-25
SI2201593T1	Slovenia	T1	2017-06-30
ES2621164T3	Spain	T3	2017-07-03
PL2201593T3	Poland	T3	2017-07-31

70 legal events, as 16 offices reported them to INPADOC

Over the term

Point at a mark for the event

Events

Legal events, newest first
	Event	Code	Office
2026-01-30	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-27	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-20	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-19	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-19	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-16	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-15	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-14	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-13	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-12	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-09	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2026-01-08	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-11-13	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-11-01	Full renewal or maintenance fee paidST27 STATUS EVENT CODE: U-0-0-U10-U11 (AS PROVIDED BY THE NATIONAL OFFICE)U11	U11	CH
2025-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-29	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-27	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-22	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-16	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-15	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-15	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-15	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-15	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-13	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-10	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-09	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-10-09	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2025-01-28	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2023-07-12	Opt-out of the competence of the unified patent court (upc) registeredP01	P01	EP
2020-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-11-15	Publication of translation of european patent specificationUEP	UEP	AT
2019-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2018-10-27	Fee paymentPLFP	PLFP	FR
2018-09-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2018-01-29	Filing of the translation of the text of european patentsAG4A	AG4A	HU
2018-01-10	No opposition filedOpposition26N	26N	EP
2017-12-08	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2017-12-08	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2017-11-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2017-11-03	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2017-11-02	Ep patent validated in greeceEP	EP	GR
2017-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2017-10-24	Fee paymentPLFP	PLFP	FR
2017-10-03	Translation of european patent specification into slovakT3	T3	SK
2017-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2017-07-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2017-07-03	Definitive protectionFG2A	FG2A	ES
2017-05-29	Entry of ep patent into national phase of norway [publ. of translation]T2	T2	NO
2017-05-16	Translation of granted ep patentGrantedTRGR	TRGR	SE
2017-04-19	Translation for ep filed (entry of ep into country)FP	FP	NL
2017-03-29	Ep patent valid in romaniaEPE	EPE	RO
2017-03-29	Translation is availableAVAILABILITY OF NATIONAL TRANSLATIONSC4A	SC4A	PT
2017-03-16	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2017-02-22	European patents granted designating irelandGrantedLANGUAGE OF EP DOCUMENT: FRENCHFG4D	FG4D	IE
2017-02-15	European patent takes effect as a national patent in ch/liEP	EP	CH
2017-02-15	Reference to at number (ep patent validated in austria)REF	REF	AT
2017-02-01	Designated contracting statesAK	AK	EP
2017-02-01	European patent grantedGrantedNOT ENGLISHFG4D	FG4D	GB
2016-12-30	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2016-12-30	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE PATENT HAS BEEN GRANTEDSTAA	STAA	EP
2016-12-23	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2016-12-23	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: GRANT OF PATENT IS INTENDEDSTAA	STAA	EP
2016-11-09	Intention to grant announcedINTG	INTG	EP
2016-10-11	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2012-11-14	First examination report despatched17Q	17Q	EP
2012-08-15	Request for extension of the european patent (deleted)DAX	DAX	EP
2010-06-30	Request for examination filed17P	17P	EP
2010-06-30	Designated contracting statesAK	AK	EP
2010-06-30	Request for extension of the european patentAX	AX	EP
2010-05-28	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Method of treating a surface of at least one part by means of individual sources of an electron cyclotron resonance plasma

Abstract

Term

Priority claims3

Members27

Over the term

Events

Numbers

Titles3

Classification

Designated states38