Method and apparatus for accurately applying structures to a substrate

A method wherein a substrate is provided, wherein, in a scanning step, structures already applied to the substrate are detected by at least one scanning provision of a processing head, wherein the processing head is provided with at least one lighting provision, which lighting provision locally lights the applied lacquer structure in a lighting step by using the information obtained with the scanning step. Further, an apparatus for carrying out the method is described, which apparatus is provided with a processing head which is which is movable relative to a substrate carrier, wherein the processing head comprises at least one scanning provision and at least one lighting provision.