Group III nitride based light emitting diode with a superlattice structure

<u style="single">Cross-Reference to Provisional Application</u>

0001This application claims the benefit of, and priority from, Provisional Application Serial No. <patcit id="pcit0001" dnum="US60294445B"><text>60/294,445, fled May 30, 2001</text></patcit> entitled <i>MULTI-QUANTUM WELL LIGHT EMITTING DIODE STRUCTURE,</i> Provisional Application Serial No. <patcit id="pcit0002" dnum="US60294308B"><text>60/294,308, filed May 30, 2001</text></patcit> entitled <i>LIGHT EMITTING DIODE STRUCTURE WITH SUPERLATTICE STRUCTURE</i> and Provisional Application Serial No. <patcit id="pcit0003" dnum="US60294378B"><text>60/294,378, filed May 30, 2001</text></patcit> entitled <i>LIGHT EMITTING DIODE STRUCTURE WITH MULTI-QUANTUM WELL AND SUPERLATTICE STRUCTURE,</i> the disclosures of which are hereby incorporated herein by reference in their entirety as if set forth fully herein.

<u style="single">Field of the Invention</u>

0002This invention relates to microelectronic devices and fabrication methods therefor, and more particularly to structures which may be utilized in Group III nitride semiconductor devices, such as light emitting diodes (LF-Ds).

<u style="single">Background of the Invention</u>

0003Light emitting diodes are widely used in consumer and commercial applications. As is well known to those having skill in the art, a light emitting diode generally includes a diode region on a microelectronic substrate. The microelectronic substrate may comprise, for example, gallium arsenide, gallium phosphide, alloys thereof, silicon carbide and/or sapphire. Continued developments in LEDs have resulted in highly efficient and mechanically robust light sources that can cover the visible spectrum and beyond. These attributes, coupled with the potentially long service life of solid state devices, may enable a variety of new display applications, and may place LEDs in a position to compete with the well entrenched incandescent lamp.

0004One difficulty in fabricating Group III nitride based LEDs, such as gallium nitride based LEDs, has been with the fabrication of high quality gallium nitride. Typically, gallium nitride LEDs have been fabricated on sapphire or silicon carbide substrates. Such substrates may result in mismatches between the crystal lattice of the substrate and the gallium nitride. Various techniques have been employed to overcome potential problems with the growth of gallium nitride on sapphire and/or silicon carbide. For example, aluminum nitride (AlN) may be utilized as a buffer between a silicon carbide substrate and a Group III active layer, particularly a gallium nitride active layer. Typically, however, aluminum nitride is insulating rather than conductive. Thus, structures with aluminum nitride buffer layers typically require shorting contacts that bypass the aluminum nitride buffer to electrically link the conductive silicon carbide substrate to the Group III nitride active layer.

0005Alternatively, conductive buffer layer materials such as gallium nitride (GaN), aluminum gallium nitride (AlGaN), or combinations of gallium nitride and aluminum gallium nitride may allow for elimination of the shorting contacts typically utilized with AIN buffer layers. Typically, eliminating the shorting contact reduces the epitaxial layer thickness, decreases the number of fabrication steps required to produce devices, reduces the overall chip size, and/or increases the device efficiency. Accordingly, Group III nitride devices may be produced at lower cost with a higher performance. Nevertheless, although these conductive buffer materials offer these advantages, their crystal lattice match with silicon carbide is less satisfactory than is that of aluminum nitride.

0006The above described difficulties in providing high quality gallium nitride may result in reduced efficiency the device. Attempts to improve the output of Group III nitride based devices have included differing configurations of the active regions of the devices. Such attempts have, for example, included the use of single and/or double heterostructure active regions. Similarly, quantum well devices with one or more Group III nitride quantum wells have also been described. While such attempts have improved the efficiency of Group III based devices, further improvements may still be achieved.

<u style="single">Summary of the Invention</u>

0007Embodiments of the present invention provide a light emitting diode having a Group III nitride based superlattice and a Group III nitride based active region on the superlattice. The active region has at least one quantum well structure. The quantum well structure includes a first Group III nitride based barrier layer, a Group III nitride based quantum well layer on the first barrier layer and a second Group III nitride based barrier layer on the quantum well layer.

0008In further embodiments of the present invention, the light emitting diode includes from about 2 to about 10 repetitions of the at least one quantum well structure.

0009In additional embodiments of the present invention, the superlattice includes a gallium nitride based superlattice having at least two periods of alternating layers of In_XGa_1-XN and In_YGa_1-YN, where 0 ≤ X &lt; 1 and 0 ≤ Y &lt; 1 and X is not equal to Y. The first Group III nitride based barrier layer provides a well support layer comprising a Group III nitride and the second Group III nitride based barrier layer provides a cap layer comprising a Group III nitride on the quantum well layer.

0010In such embodiments, the cap layer may have a lower crystal quality than the well support layer.

0011In still further embodiments of the present invention, the well support layer comprises a gallium nitride based layer, the quantum well layer comprises an indium gallium nitride layer and the barrier layer comprises a gallium nitride based layer. In such embodiments, the well support layer and the cap layer may be provided by layers of In_XGa_1-XN where 0≤X&lt;1. Furthermore, the indium composition of the well support layer and the cap layer may be less than the indium composition of the quantum well layer.

0012The well support layer and the cap layer may also be provided by a layer of Al_XIn_YGa_1-X-YN where 0&lt;X&lt;1, 0≤Y&lt;1 and X+Y≤1. Furthermore, the well support layer and the cap layer may be undoped. Alternatively, the well support layer and the cap layer may have an n-type doping level of less than about 5x10¹⁹ cm^-3. The cap layer and the well support layer may also have a higher bandgap than the quantum well layer. The combined thickness of the well support layer and the cap layer may be from about 50 to about 400 Å. The thickness of the well support layer may be greater than a thickness of the cap layer. The quantum well layer may have a thickness of from about 10 to about 50 A. For example, the quantum well layer may have a thickness of about 20 Å. Furthermore, the percentage of indium in the quantum well layer may be from about 15% to about 40%.

0013In additional embodiments of the present invention, a Group III nitride based spacer layer is provided between the well support layer and the superlattice. The spacer layer may be undoped GaN.

0014In other embodiments of the present invention, the bandgap of the quantum well is less than the bandgap of the superlattice.

0015In further embodiments of the present invention, the light emitting diode includes a second well support layer comprising a Group III nitride on the cap layer, a second quantum well layer comprising a Group III nitride on the second well support layer and a second cap layer comprising a Group III nitride on the second quantum well layer.

0016In additional embodiments of the present invention, the gallium nitride based superlattice comprises from about 5 to about 50 periods. The alternating layers of In_XGa_1-XN and In_YGa_1-YN may have a combined thickness of from about 10 to about 140 Å.

0017In particular embodiments of the present invention, X = 0 for layers of In_1-XGa_1-XN of the superlattice. In such embodiments, the InGaN layers may have a thickness of from about 5 to about 40 Å and the GaN layers may have a thickness of from about 5 to about 100 Å.

0018In further embodiments of the present invention, the gallium nitride based superlattice is doped with an n-type impurity to a level of from about 1x10¹⁷ cm^-3 to about 5x10¹⁹ cm^-3. The doping level of the gallium nitride based superlattice may be an actual doping level of layers of the alternating layers. The doping level may also be an average doping level of layers of the alternating layers. Thus, for example, the light emitting diode may include doped Group III nitride layers adjacent the superlattice where the doped Group III nitride layers are doped with an n-type impurity to provide an average doping of the doped Group III nitride layers and the superlattice of from about 1x10¹⁷ cm^-3 to about 5x10¹⁹cm^-3. The bandgap of the superlattice may be from about 2.95 eV to about 3.35 eV and, in certain embodiments, may be about 3.15 eV.

0019In other embodiments of the present invention, a Group III nitride based semiconductor device having an active region comprising at least one quantum well structure is provided. The quantum weli structure includes a well support layer comprising a Group III nitride, a quantum well layer comprising a Group III nitride on the well support layer and a cap layer comprising a Group III nitride on the quantum well layer.

0020The cap layer may have a lower crystal quality than the well support layer. The well support layer may be provided by a gallium nitride based layer, the quantum well layer may be provided by an indium gallium nitride layer and the barrier layer may be provided by a gallium nitride based layer. In such embodiments, the well support layer and the cap layer may be provided by layers of In_XGa_1-XN where 0≤X&lt;1. Furthermore, the indium composition of the well support layer and the cap layer may be less the indium composition of the quantum well layer. Similarly, the well support layer and the cap layer may be provided by layers of AI_XIn_YG_1-X-YN where 0&lt;X&lt;1, 0≤Y&lt;1 and X+Y≤1.

0021Furthermore, the well support layer and the cap layer may be undoped. Alternatively, the well support layer and the cap layer may have a doping level of less than about 5x10¹⁹ cm^-3.

0022In further embodiments of the present invention, the cap layer and the well support layer have a higher bandgap than the quantum well layer. The combined thickness of the well support layer and the cap layer may be from about 50 to about 400 Å. For example, the combined thickness of the well support layer and the cap layer may be greater than about 90 Å. Similarly, the combined thickness of the well support layer and the cap layer may be about 225 Å. The thickness of the well support layer may be greater than the thickness of the cap layer.

0023In additional embodiments of the present invention, the quantum well layer has a thickness of from about 10 to about 50 Å. For example, the quantum well layer may have a thickness of about 25 Å. Furthermore, the percentage of indium in the quantum well layer may from about 5% to about 50%.

0024In further embodiments of the Group III nitride based semiconductor device according to the present invention, a superlattice is provided and the well support layer is on the superlattice. The superlattice may have a bandgap of about 3.15 eV. Furthermore, a Group III nitride based spacer layer may be provided between the well support layer and the superlattice. The spacer layer may be undoped GaN. Also, the bandgap of the at least one quantum well may be less than the bandgap of the superlattice.

0025In still further embodiments of the present invention, a second well support layer comprising a Group III nitride is provided on the cap layer. A second quantum well layer comprising a Group III nitride is provided on the second well support layer; and a second cap layer comprising a Group III nitride is provided on the second quantum well layer.

0026In particular embodiments of the present invention, the Group III nitride based semiconductor device includes from about 2 to about 10 repetitions of the at least one quantum well structures.

0027Embodiments of the present invention further provide a Group III nitride based semiconductor device that includes a gallium nitride based superlattice having at least two periods of alternating layers of In_XGa_1-XN and In_YGa_1-YN, where 0 ≤ X &lt; 1 and 0 ≤ Y <b>&lt;</b> 1 and X is not equal to Y.

0028In further embodiments of the present invention, the gallium nitride based superlattice includes from about 5 to about 50 periods. For example, the gallium nitride based superlattice may include 25 periods. Similarly, the gallium nitride based superlattice may include 10 periods.

0029In additional embodiments of the present invention, the gallium nitride based superlattice comprises from about 5 to about 50 periods. The alternating layers of In_XGa_1-XN and In_YGa_1-YN may have a combined thickness of from about 10 to about 140 Å.

0030In particular embodiments of the present invention, X = 0 for layers of In_XGa₁-_XN of the superlattice. In such embodiments, the InGaN layers may have a thickness of from about 5 to about 40 Å and the GaN layers may have a thickness of from about 5 to about 100 Å. In still further embodiments of the present invention, the gallium nitride based superlattice is doped with an n-type impurity to a level of from about 1x10¹⁷ cm^-3 to about 5X10¹⁹cm^-3. The doping level of the gallium nitride based superlattice may be an actual doping level of layers of the alternating layers or may be an average doping level of layers of the alternating layers.

0031In certain embodiments of the present invention, doped Group III nitride layers are provided adjacent the superlattice. The doped Group III nitride layers are doped with an n-type impurity to provide an average doping of the doped Group III nitride layers and the superlattice of from about 1x10¹⁷ cm^-3 to about 5x10¹⁹cm^-3.

0032In additional embodiments ot the present invention, a bandgap of the superlattice is about 3.15 eV.

0033In embodiments of the present invention where the Group III nitride based semiconductor device comprises a light emitting diode, the light emitting diode includes a Group III nitride based active region on the superlattice. Additionally, a Group III nitride based spacer layer may also be provided between the active region and the superlattice. Such a spacer layer may be undoped GaN.

0034In certain embodiments of the present invention, the active region comprises at least one quantum well. In such embodiments, a bandgap of the quantum well may be less than a bandgap of the superlattice.

0035Additional embodiments of the present invention provide a method of fabricating a Group III nitride based semiconductor device having an active region comprising at least one quantum well structure. The quantum well structure is fabricated by forming a well support layer comprising a Group III nitride, forming a quantum well layer comprising a Group III nitride on the quantum well support layer and forming a cap layer comprising a Group III nitride on the quantum well layer.

0036In particular embodiments of the present invention, forming a well support layer comprising a Group III nitride is provided by forming the well support layer at a first temperature. Forming a quantum well layer is provided by forming the quantum well layer at a second temperature which is less than the first temperature. Forming a cap layer is provided by forming the cap layer at a third temperature which is less than the first temperature. In certain embodiments of the present invention, the third temperature is substantially the same as the second temperature.

0037In further embodiments of the present invention, the well support layer comprises a gallium nitride based layer, the quantum well layer comprises an indium gallium nitride layer and the cap layer comprises a gallium nitride based layer. In such embodiments, the first temperature may be from about 700 to about 900 °C. Furthermore, the second temperature may be from about 0 to about 200 °C less than the first temperature. The indium gallium nitride layer may be formed in a nitrogen atmosphere or other atmosphere.

0038Preferably, forming a well support layer and forming a cap layer are provided by forming a cap layer of I_XGa_1-XN, where 0≤X&lt;1 and forming a well support layer of In_XGa_1-XN, where 0≤X&lt;1. Also, the indium composition of the well support layer and the cap layer may be less an indium composition of the quantum well layer.

0039In additional embodiments of the present invention, forming a well support layer and forming a cap layer are provided by forming a cap layer of Al_XIn_YGah_1-X-YN, where 0&lt;X&lt;1, 0≤&lt;Y&lt;1 and X+Y≤1 and forming a well support layer of Al_XIn_YGa_1-X-yN, where 0&lt;X&lt;1, 0≤Y&lt;1 and X+Y≤1.

0040Further embodiments of the present invention include forming a superlattice, where the well support layer is on the superlattice. Additional embodiments of the present invention include, forming a Group III nitride based spacer layer between the well support layer and the superlattice. The spacer layer may be undoped GaN. Additional embodiments of the present invention include forming a second well support layer comprising a Group III nitride on the cap layer, forming a second quantum well layer comprising a Group III nitride on the second well support layer and forming a second cap layer comprising a Group III nitride on the second quantum well layer. In such embodiments, the second well support layer may be formed at substantially the first temperature, the second quantum well layer may be formed at substantially the second temperature which is less than the first temperature and the second cap layer formed at substantially the third temperature which is less than the first temperature.

<u style="single">Brief Description of the Drawings</u>

0041Other features of the present invention will be more readily understood from the following detailed description of specific embodiments thereof when read in conjunction with the accompanying drawings, in which: <ul id="ul0001" list-style="none" compact="compact"><li><figref idref="f0001"><b>Figure 1</b></figref> is a schematic illustration of a Group III nitride light emitting diode incorporating embodiments of the present invention;</li><li><figref idref="f0002"><b>Figure 2</b></figref> is a schematic illustration of a Group III nitride light emitting diode incorporating further embodiments of the present invention; and</li><li><figref idref="f0003"><b>Figure 3</b></figref> is a schematic illustration of a quantum well structure and a multi-quantum well structure according to additional embodiments of the present invention.</li></ul>

<u style="single">Detailed Description of Preferred Embodiments</u>

0042The present invention now will be described more fully hereinafter with reference to the accompanying drawings, in which preferred embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the thickness of layers and regions are exaggerated for clarity. Like numbers refer to like elements throughout. It will be understood that when an element such as a layer, region or substrate is referred to as being "on" or extending "onto" another element, it can be directly on or extend directly onto the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or extending "directly onto" another element, there are no intervening elements present Moreover, each embodiment described and illustrated herein includes its complementary conductivity type embodiment as well.

0043Embodiments of the present invention will be described with reference to <figref idref="f0001"><b>Figure 1</b></figref> that illustrates a light emitting diode (LED) structure <b>40.</b> The LED structure <b>40</b> of <figref idref="f0001"><b>Figure 1</b></figref> includes a substrate <b>10,</b> which is preferably 4H or 6H n-type silicon carbide. Substrate <b>10</b> may also comprise sapphire, bulk gallium nitride or another suitable substrate. Also included in the LED structure <b>40</b> of <figref idref="f0001"><b>Figure 1</b></figref> is a layered semiconductor structure comprising gallium nitride-based semiconductor layers on substrate <b>10.</b> Namely, the LED structure <b>40</b> illustrated includes the following layers: <ul id="ul0002" list-style="none" compact="compact"><li>a conductive buffer layer <b>11,</b> a first silicon-doped GaN layer <b>12,</b> a second silicon doped GaN layer <b>14,</b> a superlattice structure <b>16</b> comprising alternating layers of silicon-doped GaN and/or InGaN, an active region <b>18,</b> which may be provided by a multi-quantum well structure, an undoped GaN and/or AlGaN layer <b>22,</b> an AlGaN layer <b>30</b> doped with a p-type impurity, and a GaN contact layer <b>32,</b> also doped with a p-type impurity. The structure further includes an n-type ohmic contact <b>23</b> on the substrate <b>10</b> and a p-type ohmic contact <b>24</b> on the contact layer <b>32.</b></li></ul>

0044Buffer layer <b>11</b> is preferably n-type AlGaN. Examples of buffer layers between silicon carbide and group III-nitride materials are provided in <patcit id="pcit0004" dnum="US5393993A"><text>U.S. Patents 5,393,993</text></patcit> and <patcit id="pcit0005" dnum="US5523589A"><text>5,523,589</text></patcit>, and <patcit id="pcit0006" dnum="US154363A"><text>U.S. Application Serial No. 09/154,363</text></patcit> entitled "Vertical Geometry InGaN Light Emitting Diode" assigned to the assignee of the present invention, the disclosures of which are incorporated by reference as if fully set forth herein. Similarly, embodiments of the present invention may also include structures such as those described in United States Patent No. <patcit id="pcit0007" dnum="US6201262B"><text>6,201,262</text></patcit> entitled "Group III Nitride Photonic Devices on Silicon Carbide Substrates With Conductive Buffer Interlay Structure," the disclosure of which is incorporated herein by reference as if set forth fully herein.

0045GaN layer <b>12</b> is preferably between about 500 and 4000 nm thick inclusive and is most preferably about 1500 nm thick. GaN layer <b>12</b> may be doped with silicon at a level of about 5x10¹⁷ to 5x10¹⁸ cm^-3. GaN layer <b>14</b> is preferably between about 10 and 500. Å thick inclusive, and is most preferably about 80 Å thick. GaN layer <b>14</b> may be doped with silicon at a level of less than about 5x10¹⁹ cm^-3.

0046As illustrated in <figref idref="f0001"><b>Figure 1</b></figref><b>,</b> a superlattice structure 16 according to embodiments of the present invention includes alternating layers of In_XGa_1-xN and In_YGa_1-YN, wherein X is between 0 and 1 inclusive and X is not equal to Y. Preferably, X=0 and the thickness of each of the alternating layers of InGaN is about 540 Å thick inclusive, and the thickness of each of the alternating layers of GaN is about 5-100 Å thick inclusive. In certain embodiments, the GaN layers are about 30 Å thick and the InGaN layers are about 15 Å thick. The superlattice structure <b>16</b> may include from about 5 to about 50 periods (where one period equals one repetition each of the In_XGa_1-XN and In_YGa_1-YN layers that comprise the superlattice). In one embodiment, the superlattice structure <b>16</b> comprises 25 periods. In another embodiment, the superlattice structure <b>16</b> comprises 10 periods. The number of periods, however, may be decreased by, for example, increasing the thickness of the respective layers. Thus, for example, doubling the thickness of the layers may be utilized with half the number of periods. Alternatively, the number and thickness of the periods may be independent of one another.

0047Preferably, the superlattice <b>16</b> is doped with an n-type impurity such as silicon at a level of from about 1x10¹⁷ cm^-3 to about 5x10¹⁹ cm^-3. Such a doping level may be actual doping or average doping of the layers of the superlattice <b>16.</b> If such doping level is an average doping level, then it may be beneficial to provide doped layers adjacent the superlattice structure <b>16</b> that provide the desired average doping which the doping of the adjacent layers is averaged over the adjacent layers and the superlattice structure <b>16.</b> By providing the superlattice <b>16</b> between substrate <b>10</b> and active region <b>18,</b> a better surface may be provided on which to grow InGaN-based active region <b>18.</b> While not wishing to be bound by any theory of operation, the inventors believe that strain effects in the superlattice structure <b>16</b> provide a growth surface that is conducive to the growth of a high-quality InGaN-containing active region. Further, the superlattice is known to influence the operating voltage of the device. Appropriate choice of superlattice thickness and composition parameters can reduce operating voltage and increase optical efficiency.

0048The superlattice structure <b>16</b> may be grown in an atmosphere of nitrogen or other gas, which enables growth of higher-quality InGaN layers in the structure. By growing a silicon-doped InGaN/GaN superlattice on a silicon-doped GaN layer in a nitrogen atmosphere, a structure having improved crystallinity and conductivity with optimized strain may be realized.

0049In certain embodiments of the present invention, the active region 18 may comprise a single or multi-quantum well structure as well as single or double heterojunction active regions. In particular embodiments of the present invention, the active region <b>18</b> comprises a multi-quantum well structure that includes multiple InGaN quantum well layers separated by barrier layers (not shown in <figref idref="f0001">Figure 1</figref>).

0050Layer <b>22</b> is provided on active region <b>18</b> and is preferably undoped GaN or AlGaN between about 0 and 120 Å thick inclusive. As used herein, undoped refers to a not intentionally doped. Layer 22 is preferably about 35 Å thick. If layer <b>22</b> comprises AlGaN, the aluminum percentage in such layer is preferably about 10-30% and most preferably about 24%. The level of aluminum in layer <b>22</b> may also be graded in a stepwise or continuously decreasing fashion. Layer <b>22</b> may be grown at a higher temperature than the growth temperatures in quantum well region <b>25</b> in order to improve the crystal quality of layer <b>22.</b> Additional layers of undoped GaN or AlGaN may be included in the vicinity of layer <b>22.</b> For example, LED <b>1</b> may include an additional layer of undoped AlGaN about 6-9Å thick between the active region <b>18</b> and the layer <b>22.</b>

0051An AlGaN layer <b>30</b> doped with a p-type impurity such as magnesium is provided on layer <b>22.</b> The AlGaN layer <b>30</b> may be between about 0 and 300 Å thick inclusive and is preferably about 130 Å thick. A contact layer <b>32</b> of p-type GaN is provided on the layer <b>30</b> and is preferably about 1800 Å thick. Ohmic contacts <b>24</b> and 25 are provided on the p-GaN contact layer <b>32</b> and the substrate <b>10,</b> respectively.

0052<figref idref="f0002"><b>Figure 2</b></figref> illustrates further embodiments of the present invention incorporating a multi-quantum well active region. The embodiments of the present invention illustrated in <figref idref="f0002"><b>Figure 2</b></figref> include a layered semiconductor structure <b>100</b> comprising gallium nitnde-based semiconductor layers grown on a substrate <b>10.</b> As described above, the substrate <b>10</b> may be SiC, sapphire or bulk gallium nitride. As is illustrated in <figref idref="f0002"><b>Figure 2</b></figref><b>,</b> LEDs according to particular embodiments of the present invention may include a conductive buffer layer <b>11,</b> a first silicon-doped GaN layer <b>12,</b> a second silicon doped GaN layer <b>14,</b> a superlattice structure <b>16</b> comprising alternating layers of silicon-doped GaN andor InGaN, an active region <b>125</b> comprising a multi-quantum well structure, an undoped GaN or AlGaN layer <b>22,</b> an AlGaN layer <b>30</b> doped with, a p-type impurity, and a GaN contact layer <b>32,</b> also doped with a p-type impurity. The LEDs may further include an n-type ohmic contact <b>23</b> on the substrate <b>10</b> and a p-type ohmic contact <b>24</b> on the contact layer <b>32.</b> In embodiments of the present invention where the substrate <b>10</b> is sapphire, the n-type ohmic contact 23 would be provided on n-type GaN layer <b>12</b> and/or n-type GaN layer <b>14.</b>

0053As described above with reference to <figref idref="f0001"><b>Figure 1</b></figref><b>,</b> buffer layer <b>11</b> is preferably n-type AlGaN. Similarly, GaN layer 12 is preferably between about 500 and 4000 nm thick inclusive and is most preferably about 1500 nm thick. GaN layer <b>12</b> may be doped with silicon at a level of about 5x10¹⁷ to 5x10¹⁸ cm^-3. GaN layer <b>14</b> is preferably between about <b>10</b> and 500 Å thick inclusive, and is most preferably about 80, Å thick. GaN layer <b>14</b> may be doped with silicon at a level of less than about 5x10¹⁹ cm^-3. The superlattice structure <b>16</b> may also be provided as described above with reference to <figref idref="f0001"><b>Figure 1</b></figref><b>.</b>

0054The active region <b>125</b> comprises a multi-quantum well structure that includes multiple InGaN quantum well layers <b>120</b> separated by barrier layers <b>118.</b> The barrier layers <b>118</b> comprise In_XGa_1-XN where 0≤X&lt;1. Preferably the indium composition of the barrier layers <b>118</b> is less than that of the quantum well layers <b>120,</b> so that the barrier layers <b>118</b> have a higher bandgap than quantum well layers <b>120.</b> The barrier layers <b>118</b> and quantum well layers <b>120</b> may be undoped (<i>i</i>.<i>e</i>. not intentionally doped with an impurity atom such as silicon or magnesium). However, it may be desirable to dope the barrier layers <b>118</b> with Si at a level of less than 5x10¹⁹ cm^-3, particularly if ultraviolet emission is desired.

0055In further embodiments of the present invention, the barrier layers <b>118</b> comprise Al_XIn_YGa_1-X-YN where 0&lt;X&lt;1, 0≤Y&lt;1 and X+Y&lt;1. By including aluminum in the crystal of the barrier layers <b>118,</b> the barrier layers <b>118</b> may be lattice-matched to the quantum well layers <b>120,</b> thereby providing improved crystalline quality in the quantum well layers <b>120,</b> which increases the luminescent efficiency of the device.

0056Referring to <figref idref="f0003"><b>Figure 3</b></figref><b>,</b> embodiments of the present invention that provide a multi-quantum well structure of a gallium nitride based device are illustrated. The multi-quantum well structure illustrated in <figref idref="f0003"><b>Figure 3</b></figref> may provide the active region of the LEDs illustrated in <figref idref="f0001"><b>Figure 1</b></figref> and/or <figref idref="f0002"><b>Figure 2</b></figref><b>.</b> As seen in <figref idref="f0003"><b>Figure 3</b></figref><b>,</b> an active region <b>225</b> comprises a periodically repeating structure <b>221</b> comprising a well support layer <b>218a</b> having high crystal quality, a quantum well layer <b>220</b> and a cap layer <b>218b</b> that serves as a protective cap layer for the quantum well layer <b>220.</b> When the structure <b>221</b> is grown, the cap layer <b>218b</b> and the well support layer <b>218a</b> together form the barrier layer between adjacent quantum wells <b>220.</b> Preferably, the high quality well support layer <b>218a</b> is grown at a higher temperature than that used to grow the InGaN quantum well layer <b>220.</b> In some embodiments of the present invention, the Well support layer <b>218a</b> is grown at a slower growth rate than the cap layer <b>218b.</b> In other embodiments, lower growth rates may be used during the lower temperature growth process and higher growth rates utilized during the higher temperature growth process. For example, in order to achieve a high quality surface for growing the InGaN quantum well layer <b>220,</b> the well support layer <b>218a</b> may be grown at a growth temperature of between about 700 and 900 °C. Then, the temperature of the growth chamber is lowered by from about 0 to about 200 °C to permit growth of the high-quality InGaN quantum well layer <b>220.</b> Then, while the temperature is kept at the lower InGaN growth temperature, the cap layer <b>218b</b> is grown. In that manner, a multi-quantum well region comprising high quality InGaN layers may be fabricated.

0057The active regions <b>125</b> and <b>225</b> of <figref idref="f0002"><b>Figures 2</b></figref> and <figref idref="f0003"><b>3</b></figref> are preferably grown in a nitrogen atmosphere, which may provide increased InGaN crystal quality. The barrier layers <b>118,</b> the well support layers 218a and/or the cap layers <b>218b</b> may be between about 50 - 400 Å thick inclusive. The combined thickness of corresponding ones of the well support layers <b>218a</b> and the cap layers <b>218b</b> may be from about 50-400 Å thick inclusive. Preferably, the barrier layers <b>118</b> the well support layers <b>218a</b> and/or the cap layers <b>218b</b> are greater than about 90 Å thick and most preferably are about 225 Å thick. Also, it is preferred that the well support layers <b>218a</b> be thicker than the cap layers <b>218b.</b> Thus, the cap layers <b>218b</b> are preferably as thin as possible while still reducing the desorption of Indium from or the degradation of the quantum well layers <b>220.</b> The quantum well layers <b>120</b> and <b>220</b> may be between about 10 - 50 Å thick inclusive. Preferably, the quantum well layers <b>120</b> and <b>220</b> are greater than 20 Å thick and most preferably are about 25 Å thick. The thickness and percentage of indium in the quantum well layers <b>120</b> and <b>220</b> may be varied to produce light having a desired wavelength. Typically, the percentage of indium in quantum well layers <b>120</b> and <b>220</b> is about 25-30%, however, depending on the desired wavelength, the percentage of indium has been varied from about 5% to about 50%.

0058In preferred embodiments of the present invention, the bandgap of the superlattice structure <b>16</b> exceeds the bandgap of the quantum well layers <b>120.</b> This may be achieved by by adjusting the average percentage of indium in the superlattice <b>16.</b> The thickness (or period) of the superlattice layers and the average Indium percentage of the layers should be chosen such that the bandgap of the superlattice structure <b>16</b> is greater than the bandgap of the quantum wells <b>120.</b> By keeping the bandgap of the superlattice <b>16</b> higher than the bandgap of the quantum wells <b>120,</b> unwanted absorption in the device may be minimized and luminescent emission may be maximized. The bandgap of the superlattice structure <b>16</b> may be from about 2.95 eV to about 3.35 eV. In a preferred embodiment, the bandgap of the superlattice structure <b>16</b> is about 3.15 eV.

0059In additional embodiments of the present invention, the LED structure illustrated in <figref idref="f0002"><b>Figure 2</b></figref> includes a spacer layer <b>17</b> disposed between the superlattice <b>16</b> and the active region <b>125.</b> The spacer layer <b>17</b> preferably comprises undoped GaN. The presence of the optional spacer layer <b>17</b> between the doped superlattice <b>16</b> and active region <b>125</b> may deter silicon impurities from becoming incorporated into the active region <b>125.</b> This, in turn, may improve the material quality of the active region <b>125</b> that provides more consistent device performance and better uniformity. Similarly, a spacer layer may also be provided in the LED structure illustrated in <figref idref="f0001"><b>Figure 1</b></figref> between the superlattice <b>16</b> and the active region <b>18.</b>

0060Returning to <figref idref="f0002"><b>Figure 2</b></figref><b>,</b> the layer <b>22</b> may be provided on the active region <b>125</b> and is preferably undoped GaN or AlGaN between about 0 and 120 Å thick inclusive. The layer <b>22</b> is preferably about 35 Å thick. If the layer <b>22</b> comprises AlGaN, the aluminum percentage in such layer is preferably about 10-30% and most preferably about 24%. The level of aluminum in the layer <b>22</b> may also be graded in a stepwise or continuously decreasing fashion. The layer <b>22</b> may be grown at a higher temperature than the growth temperatures in the active region <b>125</b> in order to improve the crystal quality of the layer <b>22.</b> Additional layers of undoped GaN or AlGaN may be included in the vicinity of layer <b>22.</b> For example, the LED illustrated in <figref idref="f0002"><b>Figure 2</b></figref> may include an additional layer of undoped AlGaN about 6-9Å thick between the active regions <b>125</b> and the layer <b>22.</b>

0061An AlGaN layer <b>30</b> doped with a p-type impurity such as magnesium is provided on layer <b>22.</b> The AlGaN layer <b>30</b> may be between about <b>0</b> and 300 Å thick inclusive and is preferably about 130 Å thick. A contact layer <b>32</b> of p-type GaN is provided on the layer <b>30</b> and is preferably about 1800 Å thick. Ohmic contacts <b>24</b> and <b>25</b> are provided on the p-GaN contact layer <b>32</b> and the substrate <b>10,</b> respectively. Ohmic contacts <b>24</b> and <b>25</b> are provided on the p-GaN contact layer <b>32</b> and the substrate <b>10</b>, respectively.

0062While embodiments of the present invention have been described with multiple quantum wells, the benefits from the teachings of the present invention may also be achieved in single quantum well structures. Thus, for example, a light emitting diode may be provided with a single occurrence of the structure <b>221</b> of <figref idref="f0003"><b>Figure 3</b></figref> as the active region of the device. Thus, while different numbers of quantum wells may be utilized according to embodiments of the present invention, the number of quantum wells will typically range from 1 to 10 quantum wells.

0063While embodiments of the present invention have been described with reference to gallium nitride based devices, the teachings and benefits of the present invention may also be provided in other Group III nitrides. Thus, embodiments of the present invention provide Group III nitride based superlattice structures, quantum well structures and/or Group III nitride based light emitting diodes having superlattices and/or quantum wells.

0064In the drawings and specification, there have been disclosed typical preferred embodiments of the invention and, although specific terms are employed, they are used in a generic and descriptive sense only and not for purposes of limitation, the scope of the invention being set forth in the following claims.