EP1632991A4

Exposure method, exposure device, and device manufacturing method

Abstract

This record has no abstract on file.

EP1632991A4, drawing sheet 1 — Sheet 1 of 8

Term

Term ended

Projected expiry passed 24 May 2024, 2.3 years ago.

8 sheets

Sheet 1
Sheet 2
Sheet 3
Sheet 4
Sheet 5
Sheet 6
Sheet 7
Sheet 8

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP0060729A2	Cites	European Patent Office (EPO)	XA	Search report	1,2,4,5,12-14,18-21,23-25,49
US4346164A	Cites	United States of America	–	Search report	–
JPH04305915A	Cites	Japan	XAY	Search report	1-4,7,12-14,18-21,23-25,49
JP4305915A	Cites	Japan	–	–	–
EP0060729A	Cites	European Patent Office (EPO)	–	–	–
See also references of WO 2004105106A1	Non-patent	–	–	Search report	–

101 members in 7 offices; this record represents the family

This recordMember, by publication datePriority claim

Priority claims3

Priority claims
Document	Office	Kind	Date
2003146424	Japan	–	2003-05-23
2003146424	Japan	A	2003-05-23
2004007415	Japan	W	2004-05-24

Members101

Family members, oldest first
Document	Office	Kind
WO2004105106A1	World Intellectual Property Organization (WIPO)	A1	2004-12-02
TW200501229A	Taiwan Province of China	A	2005-01-01
JP2005012194A	Japan	A	2005-01-13
JP2005012195A	Japan	A	2005-01-13
KR20060009949A	Republic of Korea	A	2006-02-01
EP1632991A1	European Patent Office (EPO)	A1	2006-03-08
US2006098177A1	United States of America	A1	2006-05-11
US2007121089A1	United States of America	A1	2007-05-31
EP1632991A4This record	European Patent Office (EPO)	A4	2008-01-30
US7399979B2	United States of America	B2	2008-07-15
US2008297746A1	United States of America	A1	2008-12-04
US2009009745A1	United States of America	A1	2009-01-08
US7495744B2	United States of America	B2	2009-02-24
JP2010183110A	Japan	A	2010-08-19
JP2010187019A	Japan	A	2010-08-26
JP4720106B2	Japan	B2	2011-07-13
JP4770129B2	Japan	B2	2011-09-14
KR20110101216A	Republic of Korea	A	2011-09-15
KR101102286B1	Republic of Korea	B1	2012-01-03
TW201203318A	Taiwan Province of China	A	2012-01-16
KR20120049953A	Republic of Korea	A	2012-05-17
JP2013021355A	Japan	A	2013-01-31
KR20130042028A	Republic of Korea	A	2013-04-25
US8472001B2	United States of America	B2	2013-06-25
US8488108B2	United States of America	B2	2013-07-16
KR20130086256A	Republic of Korea	A	2013-07-31
JP2013153214A	Japan	A	2013-08-08
KR101311564B1	Republic of Korea	B1	2013-09-26
US2013250258A1	United States of America	A1	2013-09-26
US2013250259A1	United States of America	A1	2013-09-26
TW201346988A	Taiwan Province of China	A	2013-11-16
TW201346989A	Taiwan Province of China	A	2013-11-16
JP5353810B2	Japan	B2	2013-11-27
JP5353811B2	Japan	B2	2013-11-27
KR20130133086A	Republic of Korea	A	2013-12-05
KR20130138856A	Republic of Korea	A	2013-12-19
TWI421906B	Taiwan Province of China	B	2014-01-01
TWI421911B	Taiwan Province of China	B	2014-01-01
TW201403670A	Taiwan Province of China	A	2014-01-16
KR101376017B1	Republic of Korea	B1	2014-03-19
JP5454645B2	Japan	B2	2014-03-26
TW201415536A	Taiwan Province of China	A	2014-04-16
JP2014078728A	Japan	A	2014-05-01
JP5516791B2	Japan	B2	2014-06-11
KR101411799B1	Republic of Korea	B1	2014-06-24
KR20140099922A	Republic of Korea	A	2014-08-13
JP2014199947A	Japan	A	2014-10-23
KR101464098B1	Republic of Korea	B1	2014-11-21
TWI463533B	Taiwan Province of China	B	2014-12-01
KR101472249B1	Republic of Korea	B1	2014-12-11
EP2816411A1	European Patent Office (EPO)	A1	2014-12-24
EP2818929A1	European Patent Office (EPO)	A1	2014-12-31
TWI470671B	Taiwan Province of China	B	2015-01-21
KR101498439B1	Republic of Korea	B1	2015-03-05
TW201515064A	Taiwan Province of China	A	2015-04-16
KR20150054010A	Republic of Korea	A	2015-05-19
JP2015097285A	Japan	A	2015-05-21
JP5751316B2	Japan	B2	2015-07-22
TW201530616A	Taiwan Province of China	A	2015-08-01
TW201530617A	Taiwan Province of China	A	2015-08-01
KR101544655B1	Republic of Korea	B1	2015-08-17
JP2015163996A	Japan	A	2015-09-10
JP5787008B2	Japan	B2	2015-09-30
HK1204092A	Hong Kong, China	A	2015-11-06
HK1204092A1	Hong Kong, China	A1	2015-11-06
TWI511181B	Taiwan Province of China	B	2015-12-01
JP5831652B2	Japan	B2	2015-12-09
HK1205282A	Hong Kong, China	A	2015-12-11
HK1205282A1	Hong Kong, China	A1	2015-12-11
KR20160009710A	Republic of Korea	A	2016-01-26
US9285684B2	United States of America	B2	2016-03-15
EP2816411B1	European Patent Office (EPO)	B1	2016-04-27
KR101619724B1	Republic of Korea	B1	2016-05-10
JP2016085470A	Japan	A	2016-05-19
US9354525B2	United States of America	B2	2016-05-31
EP3048487A1	European Patent Office (EPO)	A1	2016-07-27
US2016238949A1	United States of America	A1	2016-08-18
US2016246181A1	United States of America	A1	2016-08-25
JP6008056B2	Japan	B2	2016-10-19
JP6065943B2	Japan	B2	2017-01-25
JP2017037345A	Japan	A	2017-02-16
KR101711352B1	Republic of Korea	B1	2017-02-28
KR20170021924A	Republic of Korea	A	2017-02-28
EP3048487B1	European Patent Office (EPO)	B1	2017-03-29
HK1224385A	Hong Kong, China	A	2017-08-18
HK1224385A1	Hong Kong, China	A1	2017-08-18
JP6195005B2	Japan	B2	2017-09-13
TWI612557B	Taiwan Province of China	B	2018-01-21
EP3279740A1	European Patent Office (EPO)	A1	2018-02-07
TWI614794B	Taiwan Province of China	B	2018-02-11
US9933708B2	United States of America	B2	2018-04-03
EP1632991B1	European Patent Office (EPO)	B1	2018-05-16
US9977336B2	United States of America	B2	2018-05-22
KR20180058855A	Republic of Korea	A	2018-06-01
KR101864557B1	Republic of Korea	B1	2018-06-04
US2018173107A1	United States of America	A1	2018-06-21
EP3364250A1	European Patent Office (EPO)	A1	2018-08-22
HK1245902A	Hong Kong, China	A	2018-08-31
HK1245902A1	Hong Kong, China	A1	2018-08-31
HK1253949A	Hong Kong, China	A	2019-07-05

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Events

Legal events, newest first
	Event	Code	Office
2021-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2021-02-26	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2021-01-06	Lapsed because of non-payment of the annual feeLapsedMM	MM	NL
2020-12-01	Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal feeWithdrawnR119	R119	DE
2020-06-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-05-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-05-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2020-03-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-07-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2019-06-28	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2019-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-05-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-04-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-04-24	No opposition filedOpposition26N	26N	EP
2019-04-24	Gb: european patent ceased through non-payment of renewal feeCeasedGBPC	GBPC	EP
2019-03-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-03-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-03-22	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2019-03-22	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2019-02-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-02-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-02-28	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-02-20	Patent lapsedLapsedMM4A	MM4A	IE
2019-02-19	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2019-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-01-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2019-01-30	Lapsed because of non-payment of the annual feeLapsedMM	MM	BE
2018-12-15	Deletion acc. to par. 5 (withdrawal of the translation of the ep patent)MK05	MK05	AT
2018-12-14	Patent ceasedCeasedPL	PL	CH
2018-11-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2018-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2018-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2018-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2018-10-31	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2018-08-15	Translation for ep filed (entry of ep into country)FP	FP	NL
2018-06-15	Reference to at number (ep patent enters austrian national phase)REF	REF	AT
2018-06-13	European patents granted designating irelandGrantedFG4D	FG4D	IE
2018-06-07	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2018-05-31	European patent takes effect as a national patent in ch/liEP	EP	CH
2018-05-16	Designated contracting statesAK	AK	EP
2018-05-16	European patent grantedGrantedFG4D	FG4D	GB
2018-04-13	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2018-04-06	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2018-01-24	Intention to grant announcedINTG	INTG	EP
2018-01-04	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2015-09-02	Party data changed (applicant data changed or rights of an application transferred)RAP1	RAP1	EP
2010-07-28	Party data changed (applicant data changed or rights of an application transferred)RAP1	RAP1	EP
2009-01-07	First examination report despatched17Q	17Q	EP
2008-01-30	Supplementary search report drawn up and despatchedA4	A4	EP
2008-01-30	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2006-08-30	Request for extension of the european patent (deleted)DAX	DAX	EP
2006-03-08	Request for examination filed17P	17P	EP
2006-03-08	Designated contracting statesAK	AK	EP
2006-01-20	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Exposure method, exposure device, and device manufacturing method

Abstract

Term

Priority claims3

Members101

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Titles3

Classification

Designated states1