EP1632980A3

Scanning particle beam instrument

Abstract

A scanning particle beam instrument (10) is provided, the instrument including a scanner (30,32), a radiation detector (34) and a DC amplifier (36), the DC amplifier being operable to amplify a signal generated by the radiation detector (34) to produce a video signal, the instrument further including a controller (38) operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.

EP1632980A3, drawing sheet 1 — Sheet 1 of 1

Term

Term ended

Projected expiry passed 31 August 2025, 1.1 years ago.

1 sheet

Sheet 1

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
EP0811999A2	Cites	European Patent Office (EPO)	Y	Search report	7
JP2000260382A	Cites	Japan	A	Search report	9
DE2418747A1	Cites	Germany	Y	Search report	13,14,21
US3753034A	Cites	United States of America	Y	Search report	9
US3886305A	Cites	United States of America	XY	Search report	1-4,15-17,20
US4099054A	Cites	United States of America	X	Search report	1-4,15-17,20
JPS5443458A	Cites	Japan	A	Search report	1,16
JPS59224038A	Cites	Japan	Y	Search report	11
JPS63284746A	Cites	Japan	XAY	Search report	1,5,6,8,10,12,15,16,18-20

8 members in 4 offices

This recordMember, by publication datePriority claim

Priority claims5

Priority claims
Document	Office	Kind	Date
0419571	United Kingdom	A	2004-09-03
0419571	United Kingdom	A	2004-09-03
0419571	United Kingdom	–	2004-09-03
0419571	–	–	–
GB20040019571	–	–	–

Members8

Family members, oldest first
Document	Office	Kind
EP1632980A2	European Patent Office (EPO)	A2	2006-03-08
GB2418061A	United Kingdom	A	2006-03-15
JP2006073525A	Japan	A	2006-03-16
US2006060783A1	United States of America	A1	2006-03-23
GB2418061B	United Kingdom	B	2006-10-18
US7348557B2	United States of America	B2	2008-03-25
EP1632980A3This record	European Patent Office (EPO)	A3	2008-07-23
EP1632980B1	European Patent Office (EPO)	B1	2012-01-18

36 legal events, as 3 offices reported them to INPADOC

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Events

Legal events, newest first
	Event	Code	Office
2016-07-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2016-06-30	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2016-05-04	Lapsed because of non-payment of the annual feeLapsedMM	MM	NL
2016-04-29	Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25	PG25	EP
2016-03-01	Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal feeWithdrawnR119	R119	DE
2014-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2014-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2014-10-31	Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP	PGFP	EP
2013-06-06	Change of applicant/patenteeR081	R081	DE
2013-06-06	Change of applicant/patenteeR081	R081	DE
2013-06-06	Change of representativeR082	R082	DE
2013-04-17	Change of representativeR082	R082	DE
2013-02-21	No opposition filed against granted patent, or epo opposition proceedings concluded without decisionGrantedR097	R097	DE
2012-12-26	No opposition filedOpposition26N	26N	EP
2012-11-23	No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE	PLBE	EP
2012-11-23	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA	STAA	EP
2012-03-15	Dpma publication of mentioned ep patent grantGrantedR096	R096	DE
2012-03-14	Translation files for an european patent granted for nl, confirming art. 52 par. 1 or 6 of the patents act 1995GrantedT3	T3	NL
2012-01-18	Designated contracting statesAK	AK	EP
2011-12-16	(expected) grantORIGINAL CODE: 0009210GRAA	GRAA	EP
2011-12-13	Grant fee paidORIGINAL CODE: EPIDOSNIGR3GRAS	GRAS	EP
2011-11-30	Party data changed (applicant data changed or rights of an application transferred)RAP1	RAP1	EP
2011-07-25	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP	EP
2009-04-01	First examination report despatched17Q	17Q	EP
2009-04-01	Designation fees paidAKX	AKX	EP
2009-03-11	Request for examination filed17P	17P	EP
2008-07-23	Designated contracting statesAK	AK	EP
2008-07-23	Request for extension of the european patentAX	AX	EP
2008-06-20	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL	EP
2008-05-21	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2008-05-21	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2008-05-21	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2008-05-21	Information provided on ipc code assigned before grantRIC1	RIC1	EP
2006-03-08	Designated contracting statesAK	AK	EP
2006-03-08	Request for extension of the european patentAX	AX	EP
2006-01-20	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI	EP

Scanning particle beam instrument

Abstract

Term

Priority claims5

Members8

Over the term

Events

Numbers

Titles3

Classification

Designated states36