EP1549475A4
Imprint lithography processes and systems
38 sheets
Sheet 1 Sheet 2 Sheet 3 Sheet 4 Sheet 5 Sheet 6 Sheet 7 Sheet 8 Sheet 9 Sheet 10 Sheet 11 Sheet 12 Sheet 13 Sheet 14 Sheet 15 Sheet 16 Sheet 17 Sheet 18 Sheet 19 Sheet 20 Sheet 21 Sheet 22 Sheet 23 Sheet 24 Sheet 25 Sheet 26 Sheet 27 Sheet 28 Sheet 29 Sheet 30 Sheet 31 Sheet 32 Sheet 33 Sheet 34 Sheet 35 Sheet 36 Sheet 37 Sheet 38
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| WO0133300A2 | Cites | World Intellectual Property Organization (WIPO) | Y | Search report | 1-7,23-25 |
| WO0147003A2 | Cites | World Intellectual Property Organization (WIPO) | Y | Search report | 23-25 |
| WO0206902A2 | Cites | World Intellectual Property Organization (WIPO) | – | Examiner | – |
| US2002042027A1 | Cites | United States of America | Y | Search report | 1-7 |
| US6218316B1 | Cites | United States of America | A | Search report | 7 |
| WO0133300A | Cites | World Intellectual Property Organization (WIPO) | – | – | – |
| WO0147003A | Cites | World Intellectual Property Organization (WIPO) | – | – | – |
| See also references of WO 2004016406A1 | Non-patent | – | – | Examiner | – |
149 members in 12 offices
Priority claims9
| Document | Office | Kind | Date |
|---|---|---|---|
| 194414 | United States of America | – | |
| 194991 | United States of America | – | |
| 194411 | United States of America | – | |
| 194410 | United States of America | – | |
| 19441402 | United States of America | A | |
| 19499102 | United States of America | A | |
| 19441102 | United States of America | A | |
| 19441002 | United States of America | A | |
| 0321556 | United States of America | W |
Members149
| Document | Office | Kind | |
|---|---|---|---|
| US2004007799A1 | United States of America | A1 | |
| US2004008334A1 | United States of America | A1 | |
| US2004009673A1 | United States of America | A1 | |
| WO2004016406A1 | World Intellectual Property Organization (WIPO) | A1 | |
| AU2003253862A1 | Australia | A1 | |
| TW200405138A | Taiwan Province of China | A | |
| US2004090611A1 | United States of America | A1 | |
| TW200407682A | Taiwan Province of China | A | |
| WO2004044651A1 | World Intellectual Property Organization (WIPO) | A1 | |
| TW200408902A | Taiwan Province of China | A | |
| AU2003291477A1 | Australia | A1 | |
| AU2003291477A8 | Australia | A8 | |
| US2004112861A1 | United States of America | A1 | |
| TW200411340A | Taiwan Province of China | A | |
| US2004124566A1 | United States of America | A1 | |
| WO2004044651B1 | World Intellectual Property Organization (WIPO) | B1 | |
| US2004223131A1 | United States of America | A1 | |
| TW200426496A | Taiwan Province of China | A | |
| DE20320446U1 | Germany | U1 | |
| KR20050024324A | Republic of Korea | A | |
| WO2005021156A2 | World Intellectual Property Organization (WIPO) | A2 | |
| US2005061773A1 | United States of America | A1 | |
| US6900881B2 | United States of America | B2 | |
| TW200518913A | Taiwan Province of China | A | |
| US6908861B2 | United States of America | B2 | |
| EP1549475A1 | European Patent Office (EPO) | A1 | |
| US6932934B2 | United States of America | B2 | |
| KR20050086591A | Republic of Korea | A | |
| EP1567913A1 | European Patent Office (EPO) | A1 | |
| CN1668437A | China | A | |
| WO2005021156A3 | World Intellectual Property Organization (WIPO) | A3 | |
| JP2005533393A | Japan | A | |
| US6980282B2 | United States of America | B2 | |
| US6982783B2 | United States of America | B2 | |
| CN1726429A | China | A | |
| TW200604730A | Taiwan Province of China | A | |
| JP2006506814A | Japan | A | |
| US2006062867A1 | United States of America | A1 | |
| US7019819B2 | United States of America | B2 | |
| US2006076717A1 | United States of America | A1 | |
| US2006077374A1 | United States of America | A1 | |
| EP1656242A2 | European Patent Office (EPO) | A2 | |
| US7077992B2 | United States of America | B2 | |
| US2006176466A1 | United States of America | A1 | |
| CN1839023A | China | A | |
| JP2007502715A | Japan | A | |
| KR20070048129A | Republic of Korea | A | |
| US2007114686A1 | United States of America | A1 | |
| US7224443B2 | United States of America | B2 | |
| WO2007067469A2 | World Intellectual Property Organization (WIPO) | A2 | |
| TW200732836A | Taiwan Province of China | A | |
| US2007228589A1 | United States of America | A1 | |
| US2007228608A1 | United States of America | A1 | |
| TWI289731B | Taiwan Province of China | B | |
| WO2007136832A2 | World Intellectual Property Organization (WIPO) | A2 | |
| MY133312A | Malaysia | A | |
| TW200745744A | Taiwan Province of China | A | |
| EP1656242A4 | European Patent Office (EPO) | A4 | |
| TW200804053A | Taiwan Province of China | A | |
| US7338275B2 | United States of America | B2 | |
| TWI295227B | Taiwan Province of China | B | |
| WO2008060322A2 | World Intellectual Property Organization (WIPO) | A2 | |
| US2008174046A1 | United States of America | A1 | |
| EP1567913A4 | European Patent Office (EPO) | A4 | |
| KR20080075174A | Republic of Korea | A | |
| EP1958025A2 | European Patent Office (EPO) | A2 | |
| WO2007136832A3 | World Intellectual Property Organization (WIPO) | A3 | |
| TWI302228B | Taiwan Province of China | B | |
| US7442336B2 | United States of America | B2 | |
| WO2008060322A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1549475A4This record | European Patent Office (EPO) | A4 | |
| JP2009518207A | Japan | A | |
| WO2007067469A3 | World Intellectual Property Organization (WIPO) | A3 | |
| MY138554A | Malaysia | A | |
| EP1567913B1 | European Patent Office (EPO) | B1 | |
| AT438197T | Austria | T | |
| ATE438197T1 | Austria | T1 | |
| CN100532055C | China | C | |
| EP2099066A1 | European Patent Office (EPO) | A1 | |
| DE60328626D1 | Germany | D1 | |
| US2009256289A1 | United States of America | A1 | |
| EP1958025A4 | European Patent Office (EPO) | A4 | |
| CN101573659A | China | A | |
| JP4391420B2 | Japan | B2 | |
| US7641840B2 | United States of America | B2 | |
| TWI319509B | Taiwan Province of China | B | |
| TWI319746B | Taiwan Province of China | B | |
| US2010053578A1 | United States of America | A1 | |
| US2010072652A1 | United States of America | A1 | |
| TWI322754B | Taiwan Province of China | B | |
| US7691313B2 | United States of America | B2 | |
| WO2010047788A2 | World Intellectual Property Organization (WIPO) | A2 | |
| US7708926B2 | United States of America | B2 | |
| CN101710228A | China | A | |
| US7727453B2 | United States of America | B2 | |
| JP2010123985A | Japan | A | |
| US2010140841A1 | United States of America | A1 | |
| US2010143521A1 | United States of America | A1 | |
| KR100963510B1 | Republic of Korea | B1 | |
| TW201024076A | Taiwan Province of China | A |
Showing 100 of 149
19 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| Title (correction)IMPRINT LITHOGRAPHY PROCESSESRTI1 | RTI1 | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP | GRAP | |
| First examination report despatched17Q | 17Q | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Information on inventor provided before grant (corrected)RIN1 | RIN1 | |
| Request for extension of the european patent (deleted)DAX | DAX | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1549475
- Application
- 37882420
Titles3
- German
- PRÄGEFORMLITHOGRAPHIEVERFAHREN UND -SYSTEME
- English
- IMPRINT LITHOGRAPHY PROCESSES AND SYSTEMS
- French
- PROCEDES ET SYSTEMES DE LITHOGRAPHIE D'EMPREINTE
Classification
- CPC, 9
- B81C1/0046
- B29C33/42
- B82Y10/00
- B82Y40/00
- G03F7/0002
- A61P31/04
- B29C33/60
- B29C59/16
- B29C35/08
- IPC, 11
- B29C35 08
- B29L31 34
- B81C1 00
- G03F7 00
- H01L21 027
- B29C33 42
- B29C33 60
- B29C35 12
- B29C41 02
- B29C59 02
- B29C59 16
Designated states27
- Contracting states, 27
- Austria
- Belgium
- Bulgaria
- Switzerland
- Cyprus
- Czechia
- Germany
- Denmark
- Estonia
- Spain
- Finland
- France
- United Kingdom
- Greece
- Hungary
- Ireland
- Italy
- Liechtenstein
- Luxembourg
- Monaco
- Netherlands (Kingdom of the)
- Portugal
- Romania
- Sweden
and 3 moreShow fewer
- Slovenia
- Slovakia
- Türkiye
