Nova Patents
AT438197T

A chucking system to hold a substrate and a lithographic system including the chucking system

Abstract

This record has no abstract on file.

Term

No projected expiry on record.

  1. Priority
  2. Filed
  3. Granted
  4. Today

149 members in 12 offices

This recordMember, by publication datePriority claim2 more offices are in the list below

Priority claims3

Priority claims
DocumentOfficeKindDate
29322402United States of AmericaA
31696302United States of AmericaA
0336012United States of AmericaW

Members149

Family members, oldest first
DocumentOfficeKind
US2004007799A1United States of AmericaA1
US2004008334A1United States of AmericaA1
US2004009673A1United States of AmericaA1
WO2004016406A1World Intellectual Property Organization (WIPO)A1
AU2003253862A1AustraliaA1
TW200405138ATaiwan Province of ChinaA
US2004090611A1United States of AmericaA1
TW200407682ATaiwan Province of ChinaA
WO2004044651A1World Intellectual Property Organization (WIPO)A1
TW200408902ATaiwan Province of ChinaA
AU2003291477A1AustraliaA1
AU2003291477A8AustraliaA8
US2004112861A1United States of AmericaA1
TW200411340ATaiwan Province of ChinaA
US2004124566A1United States of AmericaA1
WO2004044651B1World Intellectual Property Organization (WIPO)B1
US2004223131A1United States of AmericaA1
TW200426496ATaiwan Province of ChinaA
DE20320446U1GermanyU1
KR20050024324ARepublic of KoreaA
WO2005021156A2World Intellectual Property Organization (WIPO)A2
US2005061773A1United States of AmericaA1
US6900881B2United States of AmericaB2
TW200518913ATaiwan Province of ChinaA
US6908861B2United States of AmericaB2
EP1549475A1European Patent Office (EPO)A1
US6932934B2United States of AmericaB2
KR20050086591ARepublic of KoreaA
EP1567913A1European Patent Office (EPO)A1
CN1668437AChinaA
WO2005021156A3World Intellectual Property Organization (WIPO)A3
JP2005533393AJapanA
US6980282B2United States of AmericaB2
US6982783B2United States of AmericaB2
CN1726429AChinaA
TW200604730ATaiwan Province of ChinaA
JP2006506814AJapanA
US2006062867A1United States of AmericaA1
US7019819B2United States of AmericaB2
US2006076717A1United States of AmericaA1
US2006077374A1United States of AmericaA1
EP1656242A2European Patent Office (EPO)A2
US7077992B2United States of AmericaB2
US2006176466A1United States of AmericaA1
CN1839023AChinaA
JP2007502715AJapanA
KR20070048129ARepublic of KoreaA
US2007114686A1United States of AmericaA1
US7224443B2United States of AmericaB2
WO2007067469A2World Intellectual Property Organization (WIPO)A2
TW200732836ATaiwan Province of ChinaA
US2007228589A1United States of AmericaA1
US2007228608A1United States of AmericaA1
TWI289731BTaiwan Province of ChinaB
WO2007136832A2World Intellectual Property Organization (WIPO)A2
MY133312AMalaysiaA
TW200745744ATaiwan Province of ChinaA
EP1656242A4European Patent Office (EPO)A4
TW200804053ATaiwan Province of ChinaA
US7338275B2United States of AmericaB2
TWI295227BTaiwan Province of ChinaB
WO2008060322A2World Intellectual Property Organization (WIPO)A2
US2008174046A1United States of AmericaA1
EP1567913A4European Patent Office (EPO)A4
KR20080075174ARepublic of KoreaA
EP1958025A2European Patent Office (EPO)A2
WO2007136832A3World Intellectual Property Organization (WIPO)A3
TWI302228BTaiwan Province of ChinaB
US7442336B2United States of AmericaB2
WO2008060322A3World Intellectual Property Organization (WIPO)A3
EP1549475A4European Patent Office (EPO)A4
JP2009518207AJapanA
WO2007067469A3World Intellectual Property Organization (WIPO)A3
MY138554AMalaysiaA
EP1567913B1European Patent Office (EPO)B1
AT438197TThis recordAustriaT
ATE438197T1AustriaT1
CN100532055CChinaC
EP2099066A1European Patent Office (EPO)A1
DE60328626D1GermanyD1
US2009256289A1United States of AmericaA1
EP1958025A4European Patent Office (EPO)A4
CN101573659AChinaA
JP4391420B2JapanB2
US7641840B2United States of AmericaB2
TWI319509BTaiwan Province of ChinaB
TWI319746BTaiwan Province of ChinaB
US2010053578A1United States of AmericaA1
US2010072652A1United States of AmericaA1
TWI322754BTaiwan Province of ChinaB
US7691313B2United States of AmericaB2
WO2010047788A2World Intellectual Property Organization (WIPO)A2
US7708926B2United States of AmericaB2
CN101710228AChinaA
US7727453B2United States of AmericaB2
JP2010123985AJapanA
US2010140841A1United States of AmericaA1
US2010143521A1United States of AmericaA1
KR100963510B1Republic of KoreaB1
TW201024076ATaiwan Province of ChinaA
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