Nova Patents
EP1548146A1

Method of coating a cutting tool

Abstract

The present invention relates to a method of depositing using reactive magnetron sputtering a nitride based wear resistant layer on a cutting tool for machining by chip removal. According to the method the deposition rate, td, is higher than 2 nm/sa positive bias voltage, Vs between +1 V and +60 V is applied to the substrate, in respect to ground potentialthe substrate current density, Is/As, is larger than 10 mA/cm2the target surface area, At, is larger than 0,7 times the substrate surface area, As, i.e. R= At/As>0,7 andthe distance between the target surface and the substrate surface, dt, is < (At)0.5

EP1548146A1, drawing sheet 1
Sheet 1 of 5

Term

Term ended

Projected expiry passed 21 December 2024, 1.8 years ago.

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7 claims: 5 independent, 2 dependent

  1. 1
    A method of depositing using reactive magnetron sputtering a nitride based wear resistant layer on a cutting tool for machining by chip removal characterised in:- a deposition rate, td, higher than 2 nm/s- a positive bias voltage, Vs between +1 V and +60 V applied to the substrate, in respect to ground potential- a substrate current density, Is/As, larger than 10 mA/cm2- a target surface area, At, larger than 0,7 times the substrate surface area, As, i.e. R=At/As>0,7 and- a distance between the target surface and the substrate surface, dt, < (At)0.5
  2. 4
    A method according to any of preceding claims, characterised in that the substrate current density, Is/As is larger than 30 mA/cm2
  3. 5
    A method according to any of preceding claims, characterised in that the deposition rate, td, is higher than 3 nm/s.
  4. 6
    A method according to any of preceding claims, characterised in that the nitride layer is MeN and/or Me2N, where Me is one or more of the elements Sc, Y, Ti, Zr, Hf, V, Nb, Ta, Cr, Si, Al and B.
  5. 7
    A method according to any of preceding claims, characterised in that the nitride layer contains a total amount of Al and/or Si and/or Cr and/or B of at least 40 at% however with a maximum of 10 at% B.