EP1535314A4
High rate deposition at low pressures in a small batch reactor
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 4 August 2023, 3.1 years ago.
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29 sheets
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Every citation, both ways
| Document | Relation | Office | Cited during |
|---|---|---|---|
| JP2001244261A | Cites | Japan | Search report |
| US2002014483A1 | Cites | United States of America | Search report |
| US4745088A | Cites | United States of America | Search report |
| US6306764B1 | Cites | United States of America | Search report |
| US6344387B1 | Cites | United States of America | Search report |
52 members in 9 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 216079 | United States of America | – | |
| 21607902 | United States of America | A | |
| 0324253 | United States of America | W |
Members52
| Document | Office | Kind | |
|---|---|---|---|
| WO9907915A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO9936586A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO9936587A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO9936588A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO0015868A1 | World Intellectual Property Organization (WIPO) | A1 | |
| WO0016387A1 | World Intellectual Property Organization (WIPO) | A1 | |
| EP1027473A1 | European Patent Office (EPO) | A1 | |
| US6167837B1 | United States of America | B1 | |
| KR20010022823A | Republic of Korea | A | |
| US6235652B1 | United States of America | B1 | |
| EP1123423A1 | European Patent Office (EPO) | A1 | |
| JP2001512789A | Japan | A | |
| US6287635B1 | United States of America | B1 | |
| US2001029892A1 | United States of America | A1 | |
| US2001041218A1 | United States of America | A1 | |
| US6321680B2 | United States of America | B2 | |
| US2001047764A1 | United States of America | A1 | |
| US6352593B1 | United States of America | B1 | |
| US6352594B2 | United States of America | B2 | |
| US2002028290A1 | United States of America | A1 | |
| JP2002525841A | Japan | A | |
| US6506691B2 | United States of America | B2 | |
| US2003049372A1 | United States of America | A1 | |
| US2003134038A1 | United States of America | A1 | |
| WO2004015742A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2003263971A1 | Australia | A1 | |
| AU2003263971A8 | Australia | A8 | |
| WO2004062341A2 | World Intellectual Property Organization (WIPO) | A2 | |
| US6780464B2 | United States of America | B2 | |
| WO2004015742A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1027473A4 | European Patent Office (EPO) | A4 | |
| WO2004062341A3 | World Intellectual Property Organization (WIPO) | A3 | |
| US2005013937A1 | United States of America | A1 | |
| EP1123423A4 | European Patent Office (EPO) | A4 | |
| EP1535314A2 | European Patent Office (EPO) | A2 | |
| US2005188923A1 | United States of America | A1 | |
| KR20050100610A | Republic of Korea | A | |
| EP1590497A2 | European Patent Office (EPO) | A2 | |
| CN1735709A | China | A | |
| WO2006044021A1 | World Intellectual Property Organization (WIPO) | A1 | |
| JP2006516304A | Japan | A | |
| KR100625890B1 | Republic of Korea | B1 | |
| KR20070073898A | Republic of Korea | A | |
| EP1810318A1 | European Patent Office (EPO) | A1 | |
| EP1123423B1 | European Patent Office (EPO) | B1 | |
| AT368756T | Austria | T | |
| ATE368756T1 | Austria | T1 | |
| DE69936727D1 | Germany | D1 | |
| CN101048852A | China | A | |
| JP2008517461A | Japan | A | |
| EP1535314A4This record | European Patent Office (EPO) | A4 | |
| US7393561B2 | United States of America | B2 |
10 legal events, as the office reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| Supplementary search report drawn up and despatchedA4 | A4 | |
| Request for extension of the european patent (deleted)DAX | DAX | |
| Designated contracting states (corrected)RBV | RBV | |
| Party data changed (applicant data changed or rights of an application transferred)RAP1 | RAP1 | |
| Request for examination filed17P | 17P | |
| Designated contracting statesAK | AK | |
| Request for extension of the european patentAX | AX | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1535314
- Application
- 37848843
Titles3
- German
- SCHNELLE ABLAGERUNG BEI NIEDRIGEN DR CKEN IN EINEM KLEINEN BATCH-REAKTOR
- English
- HIGH RATE DEPOSITION AT LOW PRESSURES IN A SMALL BATCH REACTOR
- French
- DEPOT A VITESSE ELEVEE A BASSES PRESSIONS DANS UN PETIT REACTEUR A FONCTIONNEMENT DISCONTINU
Classification
- CPC, 24
- C23C16/4412
- C23C16/24
- C23C16/345
- C23C16/4405
- C23C16/45502
- C23C16/4557
- C23C16/45572
- C23C16/45574
- C23C16/4584
- C23C16/46
- C23C16/481
- H01J37/32082
- H01J37/32733
- H01J2237/2001
- H10P14/69433
- H10P14/2905
- H10P14/3602
- H10P14/24
- H10P14/3411
- H10P72/0402
- H10P72/0421
- H10P72/0436
- H10P72/3311
- H10P72/3312
- IPC, 15
- H01L21 00
- C23C16 24
- C23C16 34
- C23C16 44
- C23C16 455
- C23C16 458
- C23C16 46
- C23C16 48
- C23C16 509
- C23C16 54
- H01J37 32
- H10P14 24
- H10P14 694
- H10P72 30
- H10P95 00
Designated states1
- Contracting states, 1
- Netherlands (Kingdom of the)