Scanning exposure apparatus and device manufacturing method

FIELD OF THE INVENTION

0001The present invention relates to scanning exposure apparatus and method, and device manufacturing method.

BACKGROUND OF THE INVENTION

0002An exposure apparatus to transfer a reticle fine pattern onto a wafer coated with photosensitive material is employed in a photolithography process in semiconductor device manufacturing or the like. In this sort of exposure apparatus, a step-and-repeat method is mainly used for sequentially moving wafers into an exposure field of the exposure projection optical system and sequentially exposing the wafers to a reticle pattern.

0003In this step-and-repeat type projection exposure apparatus, to bring the exposure field on the wafer into correspondence with an image formation surface of the projection optical system, a focus/leveling sensor and a focus/leveling driving mechanism are provided. The focus driving is driving of a micromotion stage so as to bring a wafer surface position in an optical axis direction (z-axis direction) into correspondence with a focus position. Further, the leveling driving is detecting the inclination angle of the wafer surface and driving the micromotion stage to set the wafer surface in a horizontal position. The focus/leveling sensor measures a focus/leveling shift of the wafer, then the focus/leveling driving mechanism performs correction by the measured shift amount, and exposure is performed. In the case of step-and-repeat method, as exposure is performed after the stoppage of wafer, the amount of the focus/leveling driving does not influence the exposure accuracy.

0004On the other hand, there is an increasing need for expansion of field of exposure area in accordance with upsizing of semiconductor device in recent years. For this reason, a step-and-scan method meeting the requirement is increasingly employed. In the step-and-scan method, slit or circular-arc illumination light is emitted on a predetermined area of a reticle, then exposure is performed at a reduction ratio of projection optical system in a slit lengthwise direction, while the reticle and the wafer are scanned in synchronization at the reduction ratio of projection optical system in a widthwise direction of the slit.

0005In the step-and-scan method, focus/leveling sensor and focus/leveling driving mechanism are provided to bring the exposure field on the wafer into correspondence with the image formation surface of the projection optical system as in the case of the aforementioned step-and-repeat method. However, in the step-and-scan method, the slit (or circular-arc) exposure area on the wafer must be sequentially brought into correspondence with the image formation surface during scanning. For this purpose, in this method, a so-called look-ahead method is employed. The look-ahead method is measuring a focus/leveling shift by the focus/leveling sensor on the front side of the slit exposure area, i.e., on the front side in the scanning direction, and performing the focus/leveling driving based on the result of measurement, thereby bringing the wafer surface in the measured point into the image formation surface of the projection optical system before the measured point comes to the slit exposure area (Japanese Patent Application Laid-Open No. <patcit id="pcit0001" dnum="JP10097987A"><text>10-097987</text></patcit>).

0006In the look-ahead method, the amount of focus/leveling driving is calculated based on a discretely obtained measurement value. However, as a wafer has its own local distortion, a step portion due to suction by a wafer chuck to hold the wafer, a step portion caused by a foreign particle or the like in addition to a step portion caused by a formed pattern (process step), the driving amount calculated by the look-ahead operation is a large value in some cases. In such case where steps different from the process step are to be followed, the following accuracy of focus/leveling is degraded, and further, the synchronization accuracy between reticle and wafer is degraded. That is, in the step-and-scan method, different from the step-and-repeat method, as measurement and driving for focus/leveling are repeated during scanning, the amount of focus/leveling driving influences the exposure accuracy.

0007In the conventional art, a unique upper limit value is provided for the discretely obtained focus/leveling driving amount for improvement in the focus/leveling following accuracy and the synchronization accuracy. However, the focus/leveling following accuracy and the synchronization accuracy to the focus/leveling driving amount are low when the scanning speed or scan acceleration of wafer stage is high, while the focus/leveling following accuracy and the synchronization accuracy are high when the scanning speed or scan acceleration of wafer stage is low. In the above conventional art, the upper limit value to the focus/leveling driving amount is a unique value, and the upper limit value is adapted to a worst case where the scanning speed or scan acceleration is high. Accordingly, when the scanning speed or scan acceleration is low, the limit value is an excessive control value to the driving amount. For example, at a low scanning speed or scan acceleration, if the upper limit value of the focus/leveling driving amount is high, the following is possible and sufficient focus accuracy can be maintained regarding a wafer with large process steps. However, the above-described excessive control may hinder the focus/leveling following. As a result, the focus/leveling following accuracy may be degraded.

0008Document <patcit id="pcit0002" dnum="US6008610A"><text>US 6 008 610 A</text></patcit> discloses a position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system. The position control apparatus is configured to control synchronously the movement of fine stages in a high-precision scanning positioning instrument and uses actuators to adjust the fine stages with six degrees of freedom. By adjusting the fine stages, any synchronous errors between the fine stages during scanning may be dynamically corrected. Further, the fine stages may be adjusted during periods of acceleration and deceleration to reduce the settling time and consequently increasing throughput. Encoders directly attached to the actuators produce signals that are used in a velocity feedback loop. The locations of the fine stages are measured by interferometers. The position control apparatus uses a position control circuit to control the actuators to compensate for synchronous error.

0009Document <patcit id="pcit0003" dnum="US5483311A"><text>US 5 483 311 A</text></patcit> discloses a projection exposure apparatus wherein a stage is moved in the direction of an optical axis when a mask formed with a predetermined pattern is projected by a shutter onto a photosensitive substrate placed on the stage through a projection optical system. The operations of control means for the shutter and control means for the stage are interlocked with each other on the basis of the operational characteristic of the shutter and the operational characteristics (particularly the speed characteristic) of the stage so that the distribution of the existence probability with respect to movement of the photosensitive substrate from the opening operation starting point of time till the closing operation completing point of time of the shutter, with respect to the direction of the optic axis, may assume substantially equal maximum values at at least two locations in the direction of the optic axis.

SUMMARY OF THE INVENTION

0010The present invention has been made in consideration of the above problems, and it is an object of the present invention to provide a scanning exposure apparatus and a corresponding scanning exposure method allowing to reduce a disadvantage due to excessive limitation of change amount of focus or leveling drive signal.

0011This object is achieved by a scanning exposure apparatus according to claim 1 and a scanning exposure method according to claim 6. Advantageous further developments are as set forth in the respective dependent claims. Further, a device manufacturing method for manufacturing a device by using the above-described scanning exposure apparatus is provided.

0012Embodiments of the present invention will be described in conjunction with the accompanying drawings, in which like reference characters designate the same name or similar parts throughout the figures thereof.

BRIEF DESCRIPTION OF THE DRAWINGS

0013The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention. <ul id="ul0001" list-style="none" compact="compact"><li><figref idref="f0001">Fig. 1</figref> is a schematic cross-sectional view showing the structure of a scanning projection exposure apparatus according to a first embodiment of the present invention;</li><li><figref idref="f0002">Fig. 2</figref> is a schematic view showing an example of wafer shot layout;</li><li><figref idref="f0003">Fig. 3</figref> is an explanatory view of a look-ahead method in the scanning projection exposure apparatus;</li><li><figref idref="f0004">Figs. 4A to 4C</figref> are explanatory views of a focus driving operation;</li><li><figref idref="f0005">Fig. 5</figref> is a graph showing an example of limit value setting in correspondence with a scanning speed;</li><li><figref idref="f0006">Fig. 6</figref> is a graph showing an example of limit value setting in correspondence with a stage X position;</li><li><figref idref="f0007">Fig. 7</figref> is a block diagram for explaining stage control to realize focus/leveling driving according to the first embodiment; and</li><li><figref idref="f0008">Fig. 8</figref> is a flowchart showing a semiconductor device manufacturing process.</li></ul>

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

0014Preferred embodiments of the present invention will now be described in detail in accordance with the accompanying drawings.

<First Embodiment>

0015<figref idref="f0001">Fig. 1</figref> is a schematic cross-sectional view showing the structure of a step-and-scan type projection exposure apparatus (also referred to as a "scanning exposure apparatus") according to a first embodiment of the present invention. A reticle 1 having a circuit pattern is irradiated with slit illumination light IL having uniform illumination intensity. The pattern on the reticle 1 is image-formation projected onto a wafer 5 for semiconductor device fabrication, in synchronization between reticle stage 2 and XY stage 7 at a reduction ratio of a projection lens 4 in an X direction (lengthwise direction) of the slit and at a speed of the reduction ratio of the projection lens 4 in an Y direction (widthwise direction). The position of the reticle stage 2 is measured by a laser interferometer for X measurement of reticle stage (not shown), a laser interferometer 3 for Y measurement, and a laser interferometer for ωZ measurement (not shown), and is transmitted to a stage control unit 11.

0016On the other hand, the wafer 5 is placed on a micromotion stage 6 which is subjected to focus (z directional) driving, leveling (X-axial rotationωX and Y-axial rotation ωY) driving, and rotational (Z-axial rotation ωZ) driving. The micromotion stage 6 is provided on the XY stage 7 which two-dimensionally moves in parallel in a horizontal plane (XY coordinate plane), and its position is measured by laser interferometers and transmitted to the stage control unit 11 as in the case of the reticle stage 2. Note that in <figref idref="f0001">Fig. 1</figref>, only a laser interferometer 8 for Y measurement is shown (hereinbelow, the micromotion stage 6 and the XY stage 7 will be referred to as "wafer stages 6 and 7"). Reference numeral 9 denotes a stage platen to which the wafer stages 6 and 7 are fixed.

0017As the respective laser interferometers (3, 8 and the like), the projection lens 4, and a reticle stage platen 12 are fixed to a main body structure 10, the reticle stage 2 and the wafer stages 6 and 7 can be position-controlled with reference to the main body structure 10. That is, the stage control unit 11 performs independent or synchronized control on the reticle stage 2 and the wafer stages 6 and 7 based on the position measured by the interferometers.

0018To bring the image formation surface of the projection lens 4 into correspondence with a slit exposure area surface of the wafer 5, an oblique incidence focus/leveling sensors (13 to 15) is provided. The sensor mainly has a light source (not shown), a projection objective lens 13, a photoreception objective lens 14 to input reflected light from the surface of the wafer 5, and a photoreception member (CCD) 15. The stage control unit 11 calculates a focus shift and/or a leveling shift of the slit exposure area surface of the wafer 5 based on the measurement values from the oblique incidence focus/leveling sensor (hereinbelow, referred to as a "focus/leveling sensor 13-15"), and outputs a command value for focus/leveling driving to the micromotion stage 6. In the present embodiment, the stage control unit 11 generates a command value for focus/leveling shift correction, and further, adjusts the limit of the command value in correspondence with driving status.

0019In the above-described step-and-scan projection exposure apparatus, the slit exposure area on the wafer must be sequentially brought into correspondence with the image formation surface during Y-directional scanning. To realize the correspondence, the look-ahead method is employed. In the look-ahead method, a focus/leveling shift of the wafer is measured by the focus/leveling sensor 13-15 on the front side of the slit exposure area, i.e., on the front side in the scanning direction, and the focus/leveling driving is performed based on the result of measurement, thereby the wafer surface in the measured point is brought into the image formation surface of the projection optical system before the measured point comes to the slit exposure area.

0020Next, the look-ahead method will be described with reference to <figref idref="f0002">Fig. 2</figref> showing an example of wafer shot layout when a wafer area is divided into 30 shots. In <figref idref="f0002">Fig. 2</figref>, numbers in the shots indicate the exposure order in the step-and-scan operation. <figref idref="f0003">Fig. 3</figref> is an explanatory view showing the details of the step-and-scan in the 5th to 7th shots in <figref idref="f0002">Fig. 2</figref>. Actually, the wafer is moved to the slit exposure area by light projection by the projection lens for sequential exposure, however, in <figref idref="f0003">Fig. 3</figref>, for the sake of simplification of explanation, the slit exposure area scan-moves on the wafer.

0021Upon exposure on the shot 5, a slit exposure area 101 scan-moves in a +Y direction. Actually, the reticle stage 2 is scan-moved in the +Y direction while the wafer stages 6 and 7 are scan-moved in a -Y direction. On the other hand, the focus/leveling sensor 13-15, having three sensors 102 to 104 arrayed in the X direction, measures three point positions arrayed in the X direction in the Y-directional + position from the slit exposure area, thereby measures a focus/leveling shift of an area preceding to the slit exposure area. Note that the tree sensors 102 to 104 actually measure a focus directional (Z directional) displacement. Assuming that measurement values from the sensors are Z₁₀₂, Z₁₀₃ and Z₁₀₄, focus (Z) shift ΔFc and leveling (ωY) shift ΔLv are obtained by the following expressions. <maths id="math0001" num="(1)"><math display="block"><mrow><mi mathvariant="normal">ΔFc</mi><mo>=</mo><mfenced separators=""><msub><mrow><mi mathvariant="normal">Z</mi></mrow><mrow><mn mathvariant="normal">102</mn></mrow></msub><mo>+</mo><msub><mrow><mi mathvariant="normal">Z</mi></mrow><mrow><mn mathvariant="normal">103</mn></mrow></msub><mo>+</mo><msub><mrow><mi mathvariant="normal">Z</mi></mrow><mrow><mn mathvariant="normal">104</mn></mrow></msub></mfenced><mo>/</mo><mn mathvariant="normal">3</mn></mrow></math><img file="EP1526409B1_D0001.tif" /></maths><maths id="math0002" num="(2)"><math display="block"><mrow><mi mathvariant="normal">ΔLv</mi><mo>=</mo><mfenced separators=""><msub><mrow><mi mathvariant="normal">Z</mi></mrow><mrow><mn mathvariant="normal">102</mn></mrow></msub><mo>-</mo><msub><mrow><mi mathvariant="normal">Z</mi></mrow><mrow><mn mathvariant="normal">104</mn></mrow></msub></mfenced><mo>/</mo><mi mathvariant="normal">D</mi></mrow></math><img file="EP1526409B1_D0002.tif" /></maths>

0022D: distance between the sensors 102 and 104 on the wafer.

0023In this manner, the focus shift (ΔFc) is obtained from a mean value of the three point measurement values, and the leveling shift (ΔLv) is obtained from a difference value between the two point measurement values (Z₁₀₂ and Z₁₀₄). The focus/leveling shift is measured always before the slit exposure area and transmitted to the stage control unit 11. The calculation of the shift amounts ΔFc and ΔLv is not limited to the expressions (1) and (2). Further, in the case of the shot 6, as the scan is performed in an inverted direction, the slit exposure area scan-moves in the -Y direction. Accordingly, the focus/leveling sensor 13-15 performs look-ahead measurement in an area ahead of the slit exposure area in the -Y direction. Actually, one set of focus/leveling sensor may be provided for each respective scanning direction, and one of the sets of sensor may be selected in accordance with scanning direction.

0024Next, the stage control unit 11 sequentially generates target trajectories to bring the slit exposure area into correspondence with the image formation surface of the projection lens 4 based on the focus/leveling shift measured and transmitted by the look-ahead measurement. The target trajectories generated by using the ΔFc and ΔLv values are Fc(y) and Lv(y). Alphabet "y" indicates a Y coordinate position (scanning direction) of the wafer stages 6 and 7. Further, "y" is a y function. These functions Fc(y) and Lv(y) may be arbitrary functions such as quadratic functions or trigonometric functions.

0025The functions Fc(y) and Lv(y) may locally include great amount of changes due to local distortion of the wafer 5 itself, a suction step portion due to suction by a wafer chuck to hold the wafer 5, a step portion caused by a foreign particle and the like. Accordingly, if the functions Fc(y) and Lv(y) are applied as command values, a driving signal to the micromotion stage 6 includes a large amount of high frequency component. However, an upper limit is set in the following performance (following frequency) of the focus/leveling driving mechanism, driving at a high frequency over the upper limit cannot be followed. In this status, local steps cannot be followed, and further, exposure surface is greatly shifted from the image formation surface in the subsequent exposure area. <figref idref="f0004">Figs. 4A and 4B</figref> show this problem. In these figures, the lateral axis indicates the y position of the wafer stages 6 and 7, and the vertical axis, the z position. A solid line 402 indicates the target trajectory Fc(y). In this example, it has a triangular portion 403 around the middle. If this Fc(y) is applied as a target trajectory to the micromotion stage 6, an actual trajectory of the micromotion stage 6 is as indicated with a dotted line 401. Note that in <figref idref="f0004">Figs. 4A to 4C</figref>, for eye-friendly illustration, the target trajectory (solid line) and the actual trajectory (dotted line) are slightly shifted from each other in the Z direction. It is understood from <figref idref="f0004">Fig. 4A</figref> that the leveling driving of the micromotion stage 6 cannot follow the triangular portion 403 where driving is made at a high frequency, and the influence of the portion continues to the subsequent portion (404).

0026Then, in the conventional art, the stage control unit 11 performs the following processing on the functions Fc(y) and Lv(y). <maths id="math0003" num="(3)"><math display="block"><mrow><mi mathvariant="normal">Fc</mi><mfenced><mi mathvariant="normal">y</mi></mfenced><mo>⁢</mo><mi mathvariant="normal">ʹ</mi><mo>=</mo><mi mathvariant="normal">LIMIT</mi><mfenced separators=""><mi mathvariant="normal">Fc</mi><mfenced><mi mathvariant="normal">y</mi></mfenced></mfenced></mrow></math><img file="EP1526409B1_D0003.tif" /></maths><maths id="math0004" num="(4)"><math display="block"><mrow><mi mathvariant="normal">Lv</mi><mfenced><mi mathvariant="normal">y</mi></mfenced><mo>⁢</mo><mi mathvariant="normal">ʹ</mi><mo>=</mo><mi mathvariant="normal">LIMIT</mi><mfenced separators=""><mi mathvariant="normal">Lv</mi><mfenced><mi mathvariant="normal">y</mi></mfenced></mfenced></mrow></math><img file="EP1526409B1_D0004.tif" /></maths> Note that "LIMIT(meas)" is a function to limit (set an upper limit value in) a measurement value "meas". For example, if the absolute value of the measurement value "meas" is less than "a (positive value)", the function value is the value of the "meas". If the absolute value is equal to or greater than "a", the function value is "a", and if the measurement value "meas" is equal to or less than "-a", the function value is "-a".

0027<figref idref="f0004">Fig. 4B</figref> shows the effect by the above limit. A solid line 405 indicates the limit-processed Fc(y)'. If the Fc(y)' is applied as a target trajectory to the micromotion stage 6, an actual trajectory of the micromotion stage 6 by the leveling driving follows the Fc(y)' (solid line 405) without error, as indicated with a dotted line 406. In this case, the dotted line 406 cannot fully follow the peak of the triangular portion 403 as actual shift, however, the following accuracy in the subsequent area is improved in comparison with the dotted line 404 in <figref idref="f0004">Fig. 4A</figref>. This effect appears in a case where continuous steps exist.

0028Note that in the above example, the description has been made about the focus shift Fc(y), however, similar advantages can be obtained regarding the leveling shift Lv(y), and the synchronization accuracy between the reticle 1 and the wafer 5 can be improved. That is, when leveling driving (ωY) is performed, vibration may occur in the X direction and interfere with the X directional driving, however, as an upper limit value is set in the leveling driving, the X-directional vibration can be reduced and the X-directional synchronization accuracy can be improved.

0029In the conventional art shown in <figref idref="f0004">Figs. 4A to 4C</figref>, as the micromotion stage cannot follow the step portion 403, advantages by the expressions (3) and (4) are obtained. However, when the scanning speed is low, as the driving frequency of the micromotion stage 6 to the step portion 403 is lower, the stage can follow a high frequency target trajectory as indicated with the dotted line 407 in <figref idref="f0004">Fig. 4C</figref>. In a case where a step is caused not by foreign particle but by wafer's local distortion or the like, it is preferable that the stage can follow the step. However, in the above-described conventional art, the limit value is a constant value and adapted to a worst case where the scanning speed or scan acceleration is high. Accordingly, even in a case where the scanning speed is low and the stage can follow a target trajectory as shown in <figref idref="f0004">Fig. 4C</figref>, a target trajectory as shown in <figref idref="f0004">Fig. 4B</figref> (405) is provided. This excessive limitation further degrades the following accuracy of focus/leveling driving.

0030To solve the conventional problems, in the first embodiment, the stage control unit 11 performs the following processing on the functions Fc(y) and Lv(y). <maths id="math0005" num="(5)"><math display="block"><mrow><mi mathvariant="normal">Fc</mi><mfenced><mi mathvariant="normal">y</mi></mfenced><mo>⁢</mo><mi mathvariant="normal">ʹʹ</mi><mo>=</mo><mi mathvariant="normal">LIMIT</mi><mfenced separators=""><mi mathvariant="normal">Fc</mi><mfenced><mi mathvariant="normal">y</mi></mfenced><mo>,</mo><mrow><mspace width="1em" /><mi>Vscan</mi></mrow></mfenced></mrow></math><img file="EP1526409B1_D0005.tif" /></maths><maths id="math0006" num="(6)"><math display="block"><mrow><mi mathvariant="normal">Lv</mi><mfenced><mi mathvariant="normal">y</mi></mfenced><mo>⁢</mo><mi mathvariant="normal">ʹʹ</mi><mo>=</mo><mi mathvariant="normal">LIMIT</mi><mfenced separators=""><mi mathvariant="normal">Lv</mi><mfenced><mi mathvariant="normal">y</mi></mfenced><mo>,</mo><mrow><mspace width="1em" /><mi>Vscan</mi></mrow></mfenced></mrow></math><img file="EP1526409B1_D0006.tif" /></maths>

0031LIMIT (meas, Vscan): to limit measurement value meas in correspondence with scanning speed Vscan

0032<figref idref="f0005">Fig. 5</figref> is a graph showing an example of limit value setting in correspondence with scanning speed. In the figure, the lateral axis indicates the scanning speed, and the vertical axis, the limit value. Regarding "LIMIT(meas, Vscan)" in the expressions (5) and (6), smaller one of the limit value and the measurement value meas corresponding to the scanning speed Vscan is adopted as a value of the function shown in <figref idref="f0005">Fig. 5</figref>. Accordingly, when the scanning speed (Vscan) is higher, the limit value is smaller, and if the scanning speed is lower, the limit value is larger. This enables focus/leveling driving appropriate to the following performance of the micromotion stage 6, and the following performance of the focus/leveling driving can be improved.

0033Further, in a case where the limit value setting is performed in consideration of X-directional following performance (synchronization accuracy), the synchronization accuracy can be maintained without degradation. Regarding the synchronization accuracy, when the scanning speed is low, there is allowance (followable), but when the scanning speed is high, the accuracy is degraded (unfollowable). Accordingly, the setting is on-the-downside slope similarly to that in <figref idref="f0005">Fig. 5</figref>.

0034<figref idref="f0007">Fig. 7</figref> is a block diagram for explaining stage control to realize the above-described focus/leveling driving according to the first embodiment. The stage control unit 11 has an XY stage control unit 111 to drive-control an XY stage 7, a stage driving profile 112 in which driving conditions for the XY stage 7 are stored, and a micromotion stage control unit 113 to control driving of the micromotion stage 6. Note that the XY stage control unit 111 performs drive control by using a signal from a position detection system (e.g., the Y measurement laser interferometer 8) of the micromotion stage 6, however, the position detection system is omitted in <figref idref="f0007">Fig. 7</figref>.

0035In the micromotion stage control unit 113, a target trajectory setting unit 71 generates a target trajectory of the micromotion stage based on a stage position from the XY stage control unit 111 and signals from the focus/leveling sensor 13-15. For example, a target trajectory as indicated with the solid line 402 in <figref idref="f0004">Fig. 4A</figref> is generated. On the other hand, a driving amount limit value setting unit 72 obtains the speed of exposure scanning by the XY stage 7 from the stage driving profile 112, and obtains a limit value based on the obtained speed (e.g., the relation as shown in <figref idref="f0005">Fig. 5</figref>). A target trajectory correction unit 73 applies the limit value set by the driving amount limit value setting unit 72 to the target trajectory value set by the target trajectory setting unit 71, so as to cut a portion exceeding the limit value as shown in <figref idref="f0004">Fig. 4B</figref>, to generate a target trajectory to actually drive the micromotion stage 6.

0036A micromotion stage driving signal generation unit 74 performs focus/leveling driving on the micromotion stage 6 in accordance with the target trajectory finally obtained from the target trajectory generation unit 73.

0037In the first embodiment, the scanning speed is used as a parameter to determine the limit value, however, a stage driving profile such as scanning acceleration or jerk (acceleration change rate) may be used as a parameter. Note that in a case where the scanning speed, scanning acceleration or jerk changes in correspondence with stage position, the driving amount limit value setting unit 72 obtains a stage driving status (speed, acceleration or the like) in a focus/leveling measurement position based on information from the stage driving profile 112 and a stage position obtained from the XY stage 111, and sets the limit value based on the obtained stage driving status.

0038Further, the calculation (processing) using the expressions (5) and (6), performed by the stage control unit 11, may be performed in a measurement unit (not shown) to output the results of measurement by the focus/leveling sensor 13-15.

0039Further, in the first embodiment, the leveling driving has been described with regard to the ωY driving, however, the driving may be similarly applied to the ωX driving.

<Second Embodiment>

0040In the first embodiment, the stage driving profile (speed, acceleration, jerk or the like) is used as a parameter for determination of limit value. In the second embodiment, as a parameter as a reference for determination of limit value, the position of the XY stage 7 is used.

0041The micromotion stage 6 is subjected to leveling driving with a wafer center as a center of gravity. Accordingly, the interference by the ωY driving in the X directional and Z directional positions increases as an exposed shot becomes away from the wafer center in the X direction, and the interference by the ωX driving in the Y direction and Z direction increases as the exposed shot becomes away from the wafer center in the Y direction. That is, the synchronization accuracy and the focus accuracy are degraded in the wafer peripheral positions. In the second embodiment, the stage control unit 11 performs the following processing on the leveling driving amount Lv(y). <maths id="math0007" num="(7)"><math display="block"><mrow><mi mathvariant="normal">Lv</mi><mfenced><mi mathvariant="normal">y</mi></mfenced><mo>⁢</mo><mi mathvariant="normal">ʹʹʹ</mi><mo>=</mo><mi mathvariant="normal">LIMIT</mi><mfenced separators=""><mi mathvariant="normal">Lv</mi><mfenced><mi mathvariant="normal">y</mi></mfenced><mo>,</mo><mrow><mspace width="1em" /><mi>Wx</mi></mrow><mo>,</mo><mrow><mspace width="1em" /><mi>Wy</mi></mrow></mfenced></mrow></math><img file="EP1526409B1_D0007.tif" /></maths>

0042That is, the limit value of the leveling driving amount is set in correspondence with the X position and Y position of the wafer (XY stage 7). <figref idref="f0006">Fig. 6</figref> shows an example of limit value setting in correspondence with X position as a parameter. In the figure, the lateral axis indicates the X position, and the vertical axis, the limit value. The limit value is reduced as the position is around the wafer. By this arrangement, the synchronization accuracy and focus accuracy in the wafer peripheral positions can be improved. Regarding the Y position, similar limit value setting may be performed, and the synchronization accuracy and focus accuracy around the wafer can be improved.

0043Note that in the second embodiment, the limit value is set in correspondence with XY positions of the XY stage 7, however, the limit value may be set by each shot as shown in <figref idref="f0002">Fig. 2</figref>.

0044Further, the limit value may be set based on more parameters. Further, a table (array) storing limit values corresponding to respective parameter values may be used. Further, the limit value may be obtained by weighting and combining (adding or the like) limit values obtained from tables prepared for respective parameters.

0045Further, in the above-described first and second embodiments, a prepared limit value is employed, however, learning control may be realized based on the result of synchronization accuracy or focus/leveling accuracy. For example, it may be arranged such that a first measuring function of measuring focus/leveling accuracy based on a driving signal profile to the stage and actual stage driving trajectory, or a second measuring function of measuring synchronization accuracy between the reticle stage and the wafer stage, is additionally provided in the scanning exposure apparatus, and the limit value is learned based on the result of measurement by the first or second measuring function. Note that as an algorithm for the learning, a well-known algorithm such as a neural network may be utilized.

0046Further, in the first and second embodiments, the focus/leveling driving on the wafer stage side has been described, however, the present invention is applicable to a case where the focus/leveling sensor is provided on the reticle stage side and the focus/leveling driving is performed on the reticle stage.

0047Next, a process of manufacturing a semiconductor device as an example of microdevice by utilizing the above-described exposure apparatus will be described. <figref idref="f0008">Fig. 8</figref> is a flowchart showing the flow of entire semiconductor device fabrication process. At step 1 (circuit designing), a semiconductor device circuit pattern is designed. At step 2 (mask fabrication), a mask is fabricated based on the designed pattern.

0048On the other hand, at step 3 (wafer fabrication), a wafer is fabricated by using material such as silicon. At step 4 (wafer process), called a preprocess, an actual circuit is formed on the wafer by a lithography technique using the above mask and wafer. At the next step 5 (assembly), called a post process, a semiconductor chip is fabricated by using the wafer carrying the circuit formed at step 4. Step 5 includes an assembly process (dicing and bonding), a packaging process (chip encapsulation) and the like. At step 6 (inspection), inspections such as an operation check, a durability test and the like are performed on the semiconductor device formed at step 5. The semiconductor device is completed through these processes, and is shipped (step 7).

0049The wafer process at the above step S4 has an oxidation step of oxidizing the surface of the wafer, a CVD step of forming an insulating film on the surface of the wafer, an electrode formation step of forming electrodes by vapor deposition on the wafer, an ion implantation step of injecting ions in the wafer, a resist processing step of coating the wafer with photo resist, an exposure step of transferring the circuit pattern onto the wafer by the above-described exposure apparatus, a development step of developing the exposed wafer, an etching step of removing other portions than the developed resist, and a resist stripping step of removing the resist which is unnecessary after the completion of etching. These steps are repeated, to form a multiple layers of circuit patterns on the wafer.

0050As described above, according to the embodiments, as a limit value of driving amount of focus driving and leveling driving is controlled in correspondence with a predetermined condition, the following accuracy and the synchronization accuracy of the focus/leveling driving can be improved.

0051According to the above construction, the disadvantages due to excessive control of driving amount of the focus/leveling driving can be reduced.

0052As many apparently widely different embodiments of the present invention can be made without departing from the scope of the appended claims it is to be understood that the invention is not limited to the specific embodiments thereof.