EP1168431A3

Process for the manufacture of a wiring for contact holes

Abstract

The invention relates to a method for producing a wiring for contact holes, wherein for forming an Al-GeCu-containing second wiring layer (5) on the surface of an insulating layer (2) a low-temperature PVD method for filling contact holes (3) is used. Due to the relatively small grain sizes and precipitates formed in this case, this layer can be structured directly in a subsequent structuring step, which results in extremely reliable wiring in a cost-effective manner with simple integration into existing process sequences.

EP1168431A3, drawing sheet 1 — Sheet 1 of 1

Term

Term ended

Projected expiry passed 22 June 2021, 5.3 years ago.

1 sheet

Sheet 1

Every citation, both ways

Citations
Document	Relation	Office	Category	Cited during	Relevant claims
US5776827A	Cites	United States of America	Y	Search report	1-3,6,7,9
US5789317A	Cites	United States of America	A	Search report	1-13
US5856026A	Cites	United States of America	A	Search report	1-13
US6110829A	Cites	United States of America	PA	Search report	1-4,9,11
KIKUTA K ET AL: "ALUMINUM-GERMANIUM-COPPER MULTILEVEL DAMASCENE PROCESS USING LOW-TEMPERATURE REFLOW SPUTTERING AND CHEMICAL MECHANICAL POLISHING", IEEE TRANSACTIONS ON ELECTRON DEVICES, IEEE INC. NEW YORK, US, VOL. 43, NR. 5, PAGE(S) 739-744, ISSN: 0018-9383, XP000596269	Non-patent	–	–	Search report	–

6 members in 4 offices; this record represents the family

This recordMember, by publication datePriority claim

Priority claims2

Priority claims
Document	Office	Kind	Date
10032792	Germany	–	2000-06-28
10032792	Germany	A	2000-06-28

Members6

Family members, oldest first
Document	Office	Kind
EP1168431A2	European Patent Office (EPO)	A2	2002-01-02
DE10032792A1	Germany	A1	2002-01-17
US2002006720A1	United States of America	A1	2002-01-17
TW515043B	Taiwan Province of China	B	2002-12-21
EP1168431A3This record	European Patent Office (EPO)	A3	2003-05-07
US6602788B2	United States of America	B2	2003-08-05

12 legal events, as the office reported them to INPADOC

Over the term

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Events

Legal events, newest first
	Event	Code
2010-04-14	Application deemed to be withdrawnWithdrawn18D	18D
2010-03-12	Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA	STAA
2009-05-11	Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOSNIGR1GRAP	GRAP
2004-01-28	Designation fees paidAKX	AKX
2003-11-05	First examination report despatched17Q	17Q
2003-05-07	Designated contracting statesAK	AK
2003-05-07	Request for extension of the european patentAX	AX
2003-03-21	Search report despatchedORIGINAL CODE: 0009013PUAL	PUAL
2002-01-02	Request for examination filed17P	17P
2002-01-02	Designated contracting statesAK	AK
2002-01-02	Request for extension of the european patentAL;LT;LV;MK;RO;SIAX	AX
2001-11-16	Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI	PUAI