EP1069208A3
Method of diffusing gas into a CVD chamber and gas diffusing means
Abstract
In a method of diffusing gas into a CVD chamber, the gas is diffused through a diffusing means formed of grains of a material sintered together and formed such that the gas is allowed to escape through spaces between individual grains sintered together.
Term
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Projected expiry passed 28 December 2010, 15.7 years ago.
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1 sheet
Sheet 1
Every citation, both ways
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| GB2046125A | Cites | United Kingdom | A | Search report | 1 |
| US4167819A | Cites | United States of America | A | Search report | 1,2,4 |
| US4796562A | Cites | United States of America | A | Search report | 1,2,6 |
| DATABASE WPI Week 9045, Derwent World Patents Index; AN 1990-340426, XP002235789, ANONYMOUS: "Controlling distribution of gas injected into vacuum process - using very small conductances, formed from porous materials, at inlets" | Non-patent | – | – | Search report | – |
| DATABASE WPI Week 7444, Derwent World Patents Index; AN 1974-76951v, XP002235790 | Non-patent | – | – | Search report | – |
| PATENT ABSTRACTS OF JAPAN vol. 004, no. 057 (M - 009) 26 April 1980 (1980-04-26) | Non-patent | – | – | Search report | – |
25 members in 5 offices
Priority claims3
| Document | Office | Kind | Date |
|---|---|---|---|
| 461959 | United States of America | – | |
| 46195990 | United States of America | A | |
| 90314410 | European Patent Office (EPO) | A |
Members25
| Document | Office | Kind | |
|---|---|---|---|
| EP0437110A2 | European Patent Office (EPO) | A2 | |
| US5123375A | United States of America | A | |
| JPH04226029A | Japan | A | |
| US5180432A | United States of America | A | |
| US5203956A | United States of America | A | |
| US5211796A | United States of America | A | |
| EP0437110A3 | European Patent Office (EPO) | A3 | |
| US5391394A | United States of America | A | |
| US5681613A | United States of America | A | |
| US5853804A | United States of America | A | |
| KR100187485B1 | Republic of Korea | B1 | |
| US5914001A | United States of America | A | |
| KR100236500B1 | Republic of Korea | B1 | |
| US6113699A | United States of America | A | |
| EP1069207A2 | European Patent Office (EPO) | A2 | |
| EP1069208A2 | European Patent Office (EPO) | A2 | |
| EP1069610A2 | European Patent Office (EPO) | A2 | |
| EP1069611A2 | European Patent Office (EPO) | A2 | |
| JP2001185500A | Japan | A | |
| EP0437110B1 | European Patent Office (EPO) | B1 | |
| JP3194971B2 | Japan | B2 | |
| DE69033760D1 | Germany | D1 | |
| DE69033760T2 | Germany | T2 | |
| EP1069207A3 | European Patent Office (EPO) | A3 | |
| EP1069208A3This record | European Patent Office (EPO) | A3 |
21 legal events, as the office reported them to INPADOC
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Point at a mark for the eventEvents
| Event | Code | |
|---|---|---|
| Application deemed to be withdrawnWithdrawn18D | 18D | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWNSTAA | STAA | |
| Designated contracting statesAK | AK | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Information provided on ipc code assigned before grantRIC1 | RIC1 | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | |
| Divisional application: reference to earlier applicationAC | AC | |
| Designated contracting statesAK | AK | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI |
Numbers
- Publication
- 1069208
- Application
- 2035467
Titles3
- German
- Verfahren zur Gasdiffusion in einem CVD-Reaktionskammer und Gasdiffusionsmitteln
- English
- Method of diffusing gas into a CVD chamber and gas diffusing means
- French
- Procédé de diffusion de gaz dans un réacteur CVD et moyens de diffusion de gaz
Classification
- CPC, 17
- C23C16/45523
- C23C16/04
- C23C16/08
- C23C16/4402
- C23C16/4405
- C23C16/455
- C23C16/45561
- Y10S156/916
- Y10T137/7761
- H10P14/43
- H10P14/432
- H10D64/0112
- H10W20/0526
- H10W20/045
- H10W20/057
- H10W20/033
- H10W20/056
- IPC, 8
- C23C16 04
- C23C16 06
- C23C16 08
- C23C16 44
- C23C16 455
- H01L23 522
- H10P14 24
- B05D5 12
Designated states1
- Contracting states, 1
- Netherlands (Kingdom of the)