EP0876584A1

System for measuring surface flatness using shadow moire technology

Abstract

This record has no abstract on file.

Term

Term ended

Projected expiry passed 2 January 2017, 9.7 years ago.

  1. Priority
  2. Filed
  3. Published
  4. Projected expiry
  5. Today

28 claims: 4 independent, 24 dependent

  1. 1
    Claims of equivalent WO 9725590 A1 CLAIMS We claim:1. A method for quantifying surface flatness of an object, comprising the steps of: conveying an object under a grating;creating an image of a shadow moire fringe pattem that provides an indication of the flamess of a surface of the object, comprising the steps of illuminating the object through the grating to create the shadow moire fringe pattem, and viewing the shadow moire fringe pattem with a detector;and determining a quantity relating to the number of moire fringes defined in at least a region of the image of the shadow moire fringe pattem, whereby the quantity provides an indication of the flamess of the surface of the object.
  2. 11
    A method for quantifying surface flamess of an object, comprising the steps of:disposing an object under a grating;creating an image of a shadow moire fringe pattem that provides an indication of the flatness of a surface of the object, comprising the steps of illuminating the object through the grating to create the shadow moire fringe pattem, and viewing the shadow moire fringe pattem with a detector;and determining a quantity relating to the number of moire fringes defined in at least a region of the image of the shadow moire fringe pattem, whereby the quantity provides an indication of the flamess of the surface of the object;comparing the quantity to a threshold to determine if the object is unacceptably warped;and generating a signal in response to the step of comparing.
  3. 13
    A method for creating an image of a shadow moire fringe pattem, comprising the steps of:capturing a first image comprising a shadow moire fringe pattem that provides an indication of the flamess of a surface;capturing a second image associated with the surface;and arithmetically combining the first image and the second image to create a third image that comprises the shadow moire fringe pattem, wherein the combining step enhances the third image so that the shadow moire fringe pattem is more discernible in the third image than in the first image.
  4. 20
    A system for measuring the surface flamess of an object, comprising:a conveyer for moving the object along a path;a grating suspended above the path;an illuminating device suspended above the grating for at least partially illuminating a surface of the object through the grating while the object is on the conveyer to create a shadow moire fringe pattem that is associated with the surface;and a detector for capturing an image of the shadow moire fringe pattem.