EP0803755A3
Projection optical system and exposure apparatus with the same
Abstract
The present invention relates to a both-side telecentric projection optical system and an exposure apparatus equipped with this projection optical system. In particular, the projection optical system has a structure for quite favorably correcting various kinds of aberration such as distortion in particular, while securing a relatively broad exposure area and a large numerical aperture.
Term
Term ended
Projected expiry passed 31 May 2016, 10.3 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
1 sheet
Sheet 1
Every citation, both waysCites: the store holds 1 of 2
| Document | Relation | Office | Category | Cited during | Relevant claims |
|---|---|---|---|---|---|
| US5260832A | Cites | United States of America | A | Search report | 1,8,24 |
10 members in 5 offices
Priority claims4
| Document | Office | Kind | Date |
|---|---|---|---|
| 10570796 | Japan | A | |
| 10570796 | Japan | – | |
| 10570796 | – | – | – |
| JP19960105707 | – | – | – |
Members10
| Document | Office | Kind | |
|---|---|---|---|
| EP0803755A2 | European Patent Office (EPO) | A2 | |
| KR970071147A | Republic of Korea | A | |
| JPH09292568A | Japan | A | |
| US5781278A | United States of America | A | |
| EP0803755A3This record | European Patent Office (EPO) | A3 | |
| EP0803755B1 | European Patent Office (EPO) | B1 | |
| DE69629277D1 | Germany | D1 | |
| DE69629277T2 | Germany | T2 | |
| KR100446130B1 | Republic of Korea | B1 | |
| JP3750123B2 | Japan | B2 |
36 legal events, as 2 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| Nl: decision of oppositionOppositionNLR2 | NLR2 | EP | |
| Patent revokedRevoked27W | 27W | EP | |
| Gb: patent revoked under art. 102 of the ep convention designating the uk as contracting stateRevoked20070216GBPR | GBPR | EP | |
| Patent revokedRevokedORIGINAL CODE: 0009271RDAG | RDAG | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: PATENT REVOKEDSTAA | STAA | EP | |
| Communication despatched that patent is revokedRevokedORIGINAL CODE: EPIDOSNREV1RDAF | RDAF | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Reply to examination report in opposition receivedOppositionORIGINAL CODE: EPIDOSNORE3PLBC | PLBC | EP | |
| Examination report in opposition despatched + time limitOppositionORIGINAL CODE: EPIDOSNORE2PLAY | PLAY | EP | |
| Opposition data, opponent's data or that of the opponent's representative modifiedOppositionORIGINAL CODE: 0009299OPPOPLAB | PLAB | EP | |
| Opposition withdrawnWithdrawnORIGINAL CODE: 0009264PLBP | PLBP | EP | |
| Examination of admissibility of opposition: information related to despatch of communication + time limit deletedOppositionORIGINAL CODE: EPIDOSDOPE2PLAQ | PLAQ | EP | |
| Examination of admissibility of opposition: information related to receipt of reply deletedOppositionORIGINAL CODE: EPIDOSDOPE4PLAR | PLAR | EP | |
| Unpublished change to opponent dataORIGINAL CODE: EPIDOS OPPOPLBQ | PLBQ | EP | |
| Reply of patent proprietor to notice(s) of opposition receivedOppositionORIGINAL CODE: EPIDOSNOBS3PLBB | PLBB | EP | |
| Notice of opposition and request to file observation + time limit sentOppositionORIGINAL CODE: EPIDOSNOBS2PLAX | PLAX | EP | |
| Nl: opposition has been filed with the epoOppositionNLR1 | NLR1 | EP | |
| Opposition filedOpposition26 | 26 | EP | |
| Notice of opposition and request to file observation + time limit sentOppositionORIGINAL CODE: EPIDOSNOBS2PLAX | PLAX | EP | |
| Fr: translation filedET | ET | EP | |
| Opposition filedOppositionORIGINAL CODE: 0009260PLBI | PLBI | EP | |
| Unpublished change to opponent dataORIGINAL CODE: EPIDOS OPPOPLBQ | PLBQ | EP | |
| Corresponds to:REF | REF | EP | |
| Designated contracting statesAK | AK | EP | |
| European patent grantedGrantedFG4D | FG4D | GB | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOS IGRAGRAH | GRAH | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOS IGRAGRAH | GRAH | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | EP | |
| Designated contracting statesAK | AK | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 0803755
- Publication, DOCDB
- 0803755
- Publication, EPODOC
- EP0803755
- Application
- 96108775
- Application, DOCDB
- 96108775
- Application, EPODOC
- EP19960108775
Titles3
- German
- Optisches Projektionssystem und damit ausgerüstetes Belichtungsgerät
- English
- Projection optical system and exposure apparatus with the same
- French
- Système optique de projection et appareil d'exposition équipé dudit système
Classification
- CPC, 2
- G03F7/70216
- G02B13/22
- IPC, 3
- G02B13 24
- G02B13 22
- G03F7 20
Designated states4
- Contracting states, 4
- Germany
- France
- United Kingdom
- Netherlands (Kingdom of the)