Projection optical system and exposure apparatus with the same

BACKGROUND OF THE INVENTION

Field of the Invention

0001The present invention relates to a projection optical system for projecting an image of a pattern on a first object onto a substrate or the like as a second object. More particularly, the invention concerns a projection optical system suitably applicable for projection-exposing a pattern for semiconductor or for liquid crystal formed on a reticle (or mask) as a first object onto a substrate (silicon wafer, glass plate, or the like) as a second object.

Related Background Art

0002As patterns of integrated circuits become finer and finer, higher performance is being demanded for the projection optical system used for printing onto the wafer. Under such circumstances, resolving power of projection optical system can be conceivably improved by using shorter exposure wavelength λ or increasing the numerical aperture (NA) of projection optical system.

0003In order to meet the demands to make transfer patterns finer, a light source for exposure is changing recently from one for emitting light of exposure wavelength of the g-line (436 nm) to one for emitting light of exposure wavelength of the i-line (365 nm), which is mainly used these years. Further, light sources for emitting light of further shorter wavelengths, for example excimer lasers (248 nm, 193 nm), are being used as a light source for exposure.

0004There are proposed projection optical systems for projection-printing patterns on the reticle onto the wafer with light of the above various exposure wavelengths.

0005The projection optical systems are demanded to decrease image distortion as well as to improve the resolving power. Here, the image distortion is caused by distortion due to the projection optical system, warpage of the wafer to be printed on the image side of projection optical system, warpage of the reticle with circuit patterns or the like. written thereon on the object side of projection optical system, or the like.

0006Recent further progress in micronizing the transfer patterns is making stronger the demand to decrease the image distortion.

0007In order to decrease influence of the wafer warpage on the image distortion, a so-called image-side telecentric optical system has been used heretofore, which locates the image-side exit pupil of projection optical system far away from the image plane (on the wafer).

0008On the other hand, in order to decrease the image distortion due to the reticle warpage, it is considered to use a so-called object-side telecentric optical system, which locates the entrance-pupil of projection optical system far away from the object plane (on the reticle). The prior art for locating the entrance pupil of projection optical system relatively far away from the object plane is disclosed, for example, in Japanese Laid-open Patent Applications No. 63-118115, No. 4-157412, and No. 5-173065.

SUMMARY OF THE INVENTION

0009Among the above-mentioned optical systems, so-called both-side telecentric projection optical systems, in which both object side (reticle side) and image side (substrate side) are telecentric, are disclosed. However, having studied these conventional both-side telecentric projection optical systems, the inventors have found that the properties of the optical systems are insufficient for satisfying the above-mentioned demand for finer integrated circuits and the like in terms of their numerical aperture (N.A.) size contributing to resolution and function for correcting various kinds of aberration such as distortion in particular.

0010Accordingly, the object of the present invention is to provide a high-performance both-side telecentric projection optical system which has a compact structure while securing a broad exposure area and a large numerical aperture as well as an exposure apparatus equipped with such a projection optical system. Here, this projection optical system has a structure which can quite favorably correct various kinds of aberration such as distortion in particular. Also, as an exposure apparatus to which this projection optical system is applicable, a one-shot exposure type exposure apparatus or a scanning type exposure apparatus, in which a mask and a substrate are relatively movable with respect to the projection optical system, has been known in general.

0011In order to achieve the above-mentioned object, the exposure apparatus according to the present invention comprises, at least, a first stage allowing a mask (first object) having a predetermined pattern such as an integrated circuit to be held on a main surface thereof; a second stage capable of holding, on its main surface, a photosensitive substrate (second object) upon which the pattern of the mask is to be printed; an illumination optical system for illuminating the mask with exposure light having a predetermined wavelength; and a projection optical system provided between the first and second stages and used for projecting the predetermined pattern on the mask onto the substrate. In this specification, "photosensitive substrate" refers to a substrate such as silicon wafer or glass plate whose surface is coated with a material such as resist having a photosensitivity with respect to the exposure light.

0012In particular, as shown in Fig. 1, the exposure apparatus according to the present invention comprises a first lens group G₁ with a positive refracting power provided between the above-mentioned first object R and second object W, a second lens group G₂ with a negative refracting power provided between the first lens group G₁ and the second object W, a third lens group G₃ with a positing refracting power provided between the second lens group G₂ and the second object W, a fourth lens group G₄ with a negative refracting power provided between the third lens group G₃ and the second object W, a fifth lens group G₅ with a positive refracting power provided between the fourth lens group G₄ and the second object W, and a sixth lens group G₆ with a positive refracting power provided between the fifth lens group G₅ and the second object W.

0013The first lens group G₁ having a positive refracting power mainly contributes to correction of distortion while maintaining telecentricity. Specifically, the first lens group G₁ generates positive distortion so as to correct, in a well-balanced manner, negative distortion generated by a plurality of the lens groups placed between the first lens group G₁ and the second object W. The second lens group G₂ having a negative refracting power and the fourth lens group G₄ having a negative refracting power mainly contribute to correction of Petzval sum in order to flatten the image surface. The second lens group G₂ having a negative refracting power and the third lens group G₃ having a positive refracting power constitute an inverted telescopic system. This inverted telescopic system partakes in securing backfocus of the projection optical system (distance from the optical surface such as a lens surface which is closest to the second object in the projection optical system to the second object W). The fifth lens group G₅ having a positive refracting power and the sixth lens group G₆ similarly having a positive refracting power partake in suppressing generation of distortion. In particular, these lens groups G₅ and G₆ function to minimize generation of spherical aberration in order to sufficiently respond to a higher N.A. on the second object side.

0014Further, the above-mentioned second lens group G₂ comprises a front lens L_2F with a negative refracting power located as closest to the first object R and shaped with a concave surface to the second object W, a rear lens L_2R with a negative refracting power located as closest to the second object W and shaped with a concave surface to the first object R, and an intermediate lens group G_2M placed between the front lens L_2F and the rear lens L_2R.

0015According to the configuration mentioned above, the front lens L_2F with a negative refracting power, which is located as closest to the first object R and shaped with a concave surface to the second object W, contributes to correction of curvature of field and coma, while the rear lens L_2R with a negative refracting power, which is located as closest to the second object W and shaped with a concave surface to the first object R, mainly contributes to correction of coma. Here, the rear lens L_2R also contributes to correction of curvature of field.

0016Further, the above-described intermediate lens group G_2M comprises a first intermediate lens L_M1 with a positive refracting power placed between the front lens L_2F and the rear lens L_2R, a second intermediate lens L_M2 with a negative refracting power placed between the first intermediate lens L_M1 and the rear lens L_2R, and a third intermediate lens L_M3 with a negative refracting power placed between the second intermediate lens L_M2 and the rear lens L_2R. In the intermediate lens group G_2M, the first intermediate lens L_M1 having a positive refracting power partakes in correction of negative distortion generated by the second and third intermediate lenses L_M2 and L_M3 which greatly contribute to correction of curvature of field.

0017Preferably, when the focal length of the first lens group G₁ is f₁, the focal length of the second lens group G₂ is f₂, the focal length of the third lens group G₃ is f₃, the focal length of the fourth lens group G₄ is f₄, the focal length of the fifth lens group G₅ is f₅, the focal length of the sixth lens group G₆ is f₆, the distance from the first object R to the second object W is L, the radius of curvature of the surface of the front lens L_2F on the first object side is r_2Ff, the radius of curvature of the surface of the front lens L_2F on the second object side is r_2Fr, the radius of curvature of the surface of the rear lens L_2R on the first object side is r_2Rf, and the radius of curvature of the surface of the rear lens L_2R on the second object side is r_2Rr, the projection optical system of the present invention satisfies the following conditions (1) to (8): <ul id="ul0001" list-style="none" compact="compact"><li>(1) f₁/L&lt;0.8</li><li>(2) -0.10&lt;f₂/L</li><li>(3) 0.01&lt;f₃/L&lt;1.0</li><li>(4) f₄/L&lt;-0.005</li><li>(5) 0.01&lt;f₅/L&lt;0.9</li><li>(6) 0.02&lt;f₆/L&lt;1.6</li><li>(7) 1.00≤(r_2Ff-r_2Fr)/(r_2Ff+r_2Fr)&lt;5.0</li><li>(8) -10.0&lt;(r_2Rf-r_2Rr)/(r_2Rf+r_2Rr)≤-1.00. The condition (1) defines an optimal ratio of the focal length f₁ of the first lens group G₁ having a positive refracting power to the distance (object-to-image distance) L from the first object R (reticle or the like) to the second object W (wafer or the like). This is a condition for mainly correcting distortion in a well-balanced manner. Above the upper limit of the ratio defined by the condition (1), negative distortion is generated too much. Preferably, in order to attain a compact size while securing a reducing magnification and a broad exposure area and to further effectively correct distortion, the upper limit of the ratio in the condition (1) is set to 0.14 so as to define a condition of f₁/L&lt;0.14. Here, in order to suppress generation of spherical aberration at pupils, the lower limit of the ratio in the condition (1) is set to 0.02 so as to define a condition of 0.02&lt;f₁/L. The condition (2) defines an optimal ratio of the focal length f₂ of the second lens group G₂ having a negative refracting power to the distance (object-to-image distance) L from the first object R (reticle or the like) to the second object W (wafer or the like). This is a condition for attaining a compact size while securing a broad exposure area and effectively correcting Petzval sum. Here, below the lower limit of the ratio defined by the condition (2), it becomes difficult to attain a compact size while securing a broad exposure area. Also, under this circumstance, positive Petzval sum may be unfortunately generated. Preferably, in order to attain a further compact size or in order to further effectively correct Petzval sum, the lower limit of the ratio in the condition (2) is set to -0.032 so as to define a condition of -0.032&lt;f₂/L. On the other hand, preferably, in order to suppress generation of negative distortion, the upper limit of the ratio in the condition (2) is set to -0.005 so as to define a condition of f₂/L&lt;-0.005. The condition (3) defines an optimal ratio of the focal length f₃ of the third lens group G₃ having a positive refracting power to the distance (object-to-image distance) L from the first object R (reticle or the like) to the second object W (wafer or the like). Here, below the lower limit of the ratio defined by the condition (3), the refractive power of the second lens group G₂ or fourth lens group G₄ becomes too strong. As a result, negative distortion and coma may occur in the second lens group G₂, while coma may occur in the fourth lens group G₄. Above the upper limit of the ratio defined by the condition (3), on the other hand, the refractive power of the second lens group G₂ or fourth lens group G₄ becomes so weak that Petzval sum may not be effectively corrected. The condition (4) defines an optimal ratio of the focal length f₄ of the fourth lens group G₄ having a negative refracting power to the distance (object-to-image distance) L from the first object R (reticle or the like) to the second object W (wafer or the like). Here, above the upper limit of the ratio defined by the condition (4), coma may be generated unfortunately. Preferably, in order to further suppress the generation of coma, the upper limit of the ratio in the condition (4) is set to -0.047 so as to define a condition of f₄/L&lt;-0.047. Here, preferably, in order to effectively correct spherical aberration, the lower limit of the ratio in the condition (4) is set to -0.098 so as to define a condition of -0.098&lt;f₄/L. The condition (5) defines an optimal ratio of the focal length f₅ of the fifth lens group G₅ having a positive refracting power to the distance (object-to-image distance) L from the first object R (reticle or the like) to the second object W (wafer or the like). This is a condition for correcting spherical aberration, distortion, and Petzval sum in a well-balanced manner while maintaining a large numerical aperture. Below the lower limit of the ratio defined by the condition (5), the refractive power of the fifth lens group G₅ becomes too strong. As a result, not only negative distortion but an enormous amount of negative spherical aberration may be generated in the fifth lens group G₅. Above the upper limit of the ratio defined by the condition (5), the refractive power of the fifth lens group G₅ becomes so weak that the refractive power of the fourth lens group G₄ inevitably decreases. As a result, Petzval sum may not be corrected effectively. The condition (6) defines an optimal ratio of the focal length f₆ of the sixth lens group G₆ having a positive refracting power to the distance (object-to-image distance) L from the first object R (reticle or the like) to the second object W (wafer or the like). This is a condition for suppressing generation of high-order spherical aberration and negative distortion, while maintaining a large numerical aperture. Below the lower limit of the ratio defined by the condition (6), the sixth lens group G₆ itself may generate a large amount of negative distortion. Above the upper limit of the ratio defined by the condition (6), on the other hand, high-order spherical aberration may occur. The condition (7) defines a so-called shape factor to obtain an appropriate shape of the front lens L_2F in the second lens group G₂ when the radius of curvature of the surface of the front lens L_2F on the first object side is r_2Ff and the radius of curvature of the surface of the front lens L_2F on the second object side is r_2Fr. Below the lower limit of the ratio defined by the condition (7), it is undesirable in that spherical aberration at pupils may not be sufficiently corrected. Above the upper limit of the ratio defined by the condition (7), on the other hand, coma may be unfortunately generated. The condition (8) defines a so-called shape factor to obtain an appropriate shape of the rear lens L_2R in the second lens group G₂ when the radius of curvature of the surface of the rear lens L_2R on the first object side is r_2Rf and the radius of curvature of the surface of the rear lens L_2R on the second object side is r_2Rr. Below the lower limit or above the upper limit of the ratio defined by the condition (8), high-order spherical aberration and high-order coma may unfortunately occur while curvature of field is generated. Preferably, in order to correct high-order spherical aberration and high-order coma in a well-balanced manner, the lower limit of the ratio in the condition (8) is set to -5.0 so as to define a condition of -5.0&lt;(r_2Rf-r_2Rr)/(r_2Rf+r_2Rr). Also, in order to correct curvature of field in a well-balanced manner while further effectively correcting high-order spherical aberration and high-order coma, the lower limit of the ratio in the condition (8) is preferably set to -2.0 so as to define a condition of -2.0&lt;(r_2Rf-r_2Rr)/(r_2Rf+r_2Rr). Further, when the axial distance from the first object R to the first-object-side focal point of the entire projection optical system is I and the distance from the first object R to the second object W is L, the projection optical system preferably satisfies the following condition (9): </li><li>(9) 1.0&lt;I/L. The condition (9) defines an optimal ratio of the axial distance I from the first object R to the first-object-side focal point of the entire projection optical system to the distance (object-to-image distance) L from the first object R (reticle or the like) to the second object W (wafer or the like). Here, "first-object-side focal point of the entire projection optical system" refers to an intersecting point of emergent light with an optical axis of the projection optical system when parallel light in the paraxial region with respect to the optical axis of the projection optical system is made incident from the second object side of the projection optical system and the light in the paraxial region is emergent from the projection optical system. Below the lower limit of the ratio defined by the condition (9), telecentricity of the projection optical system on the first object side is lost so much that fluctuation in magnification due to deviation of the first object R in the optical axis direction and fluctuation in distortion may become large. As a result, it becomes difficult to faithfully project an image of the first object R onto the second object W under a desired magnification. Preferably, in order to more sufficiently suppress the fluctuation in magnification due to deviation of the first object R in the optical axis direction and fluctuation in distortion, the lower limit of the ratio in the condition (9) is set to 1.7 so as to define a condition of 1.7&lt;I/L. Further, in order to correct both spherical aberration at pupils and distortion in a well-balanced manner while maintaining a compact size of the projection optical system, the upper limit of the ratio in the condition (9) is preferably set to 6.8 so as to define a condition of I/L&lt;6.8. Also, the above-mentioned fifth lens group G₅ includes at least seven positive lenses. Preferably, in this case, the fifth lens group G₅ further includes at least one negative lens. Namely, when the fifth lens group G₅ has at least seven positive lenses, the refractive power carried by the fifth lens group G₅ itself can be distributed to the separate positive lenses in a well-balanced manner. Accordingly, negative spherical aberration which is likely to occur in the fifth lens group G₅ as its numerical aperture (N.A.) increases can be effectively suppressed. Further, when the fifth lens group G₅ has at least seven positive lenses, high resolution of the projection optical system is secured. In this case, in order to sufficiently attain functions to correct negative distortion and Petzval sum, the fifth lens group G₅ preferably has at least one negative lens in addition to at least seven positive lenses. Preferably, when the focal length of the second intermediate lens L_M2 is f₂₂ and the focal length of the third intermediate lens L_M3 is f₂₃, the projection optical system satisfies the following condition (10): </li><li>(10) 0.1&lt;f₂₂/f₂₃&lt;10. Below the lower limit of the ratio defined by the condition (10), the refractive power of the second intermediate lens L_M2 becomes stronger than that of the third intermediate lens L_M3. As a result, a large amount of coma and negative distortion is generated in the second intermediate lens L_M2. Preferably, in order to further correct negative distortion in a well-balanced manner, the lower limit of the ratio in the condition (10) is set to 0.7 so as to define a condition of 0.7&lt;f₂₂/f₂₃. Above the upper limit of the ratio defined by the condition (10), the refractive power of the third intermediate lens L_M3 becomes stronger than that of the second intermediate lens L_M2. Accordingly, a large amount of coma and negative distortion is generated in the third intermediate lens L_M3. In order to further correct negative distortion in a well-balanced manner while effectively correcting coma, the upper limit of the ratio in the condition (10) is preferably set to 1.5 so as to define a condition of f₂₂/f₂₃&lt;1.5. Also, the above-mentioned fifth lens group G₅ has a negative lens L₅₉ located as closest to the second object W and shaped with a concave surface to the second object W. Accordingly, the negative lens L₅₉ located as closest to the second object W in the fifth lens group G₅ can generate positive distortion and negative Petzval sum. This means that the negative distortion and positive Petzval sum generated by the positive lenses in the fifth lens group G₅ can be offset thereby. In this case, in order to suppress negative distortion without generating high-order spherical aberration, a lens L₆₁ positioned as closest to the first object R in the sixth lens group G₆ preferably has such a shape that its lens surface on the first object side is a convex surface facing the first object R. In particular, when the radius of curvature of the above-mentioned negative lens L₅₉ in the fifth lens group G₅ on the second object side is r_5R and the radius of curvature of the above-mentioned lens L₆₁ in the sixth lens group G₆ on the first object side is r_6F, the projection optical system preferably satisfies the following condition (11): </li><li>(11) -0.90&lt;(r_5R-r_6F)/(r_5R+r_6F)&lt;-0.001. The condition (11) defines an optimal form of a gas lens formed between the fifth lens group G₅ and the sixth lens G₆. Below the lower limit of the ratio defined by the condition (11), the curvature of the concave surface on the second object side of the negative lens L₅₉ positioned as closest to the second object W in the fifth lens group G₅ becomes too strong. Under this circumstance, high-order coma may occur. Above the upper limit of the ratio defined by the condition (11), the inherent refractive power of the gas lens formed between the fifth lens group G₅ and the sixth lens G₆ becomes too weak. As a result, the amount of positive distortion generated in this gas lens becomes so small that it becomes difficult to effectively correct negative distortion generated in the positive lenses in the fifth lens group G₅. Here, in order to more sufficiently suppress generation of high-order coma, the lower limit of the ratio in the condition (11) is preferably set to -0.30 so as to define a condition of -0.30&lt;(r_5R-r_6F)/(r_5R+r_6F). Also, when the lens group distance between the fifth lens group G₅ and the sixth lens group G₆ is d₅₆ and the distance from the first object R to the second object W is L, the projection optical system preferably satisfies the following condition (12): </li><li>(12) d₅₆/L&lt;0.017. Above the upper limit of the ratio defined by the condition (12), the lens group distance between the fifth lens group G₅ and the sixth lens group G₆ becomes so large that the amount of positive distortion generated thereby may be too small. As a result, it becomes difficult to correct, in a well-balanced manner, negative distortion generated in the positive lenses in the fifth lens group G₅. Also, when the radius of curvature of the lens surface included in the sixth lens group G₆ and positioned as closest to the first object R is r_6F and the axial distance from this lens surface of the sixth lens group G₆ to the second object W is d₆, the projection optical system preferably satisfies the following condition (13): </li><li>(13) 0.50&lt;d₆/r_6F&lt;1.50. Below the lower limit of the ratio defined by the condition (13), the positive refracting power of the lens surface positioned as closest to the first object R in the sixth lens group G₆ becomes too strong. Consequently, a large amount of negative distortion and coma may occur. Above the upper limit of the ratio defined by the condition (13), the positive refracting power of the lens surface positioned as closest to the first object R in the sixth lens group G₆ becomes too weak. As a result, a large amount of coma may occur. Desirably, in order to further suppress the generation of coma, the lower limit of the ratio in the condition (13) is set to 0.84 so as to define a condition of 0.84&lt;d₆/r_6F. As mentioned above, the above-mentioned fifth lens group G₅ has the negative lens L₅₉ located as closest to the second object W and shaped with a concave surface to the second object W. Preferably, in this case, when the radius of curvature of the negative lens L₅₉ in the fifth lens group G₅ on the first object side is r_5F and the radius of curvature of the negative lens L₅₉ in the fifth lens group G₅ on the second object side is r_5R, the projection optical system further satisfies the following condition (14): </li><li>(14) 0.30&lt;(r_5F-r_5R)/(r_5F+r_5R)&lt;1.28. Below the lower limit of the ratio defined by the condition (14), it becomes difficult to correct both Petzval sum and coma at the same time. Above the upper limit of the ratio defined by the condition (14), on the other hand, a large amount of high-order coma may unfavorably occur. Preferably, in order to prevent higher-order coma from occurring, the upper limit of the ratio in the condition (14) is set to 0.93 so as to define a condition of (r_5F-r_5R)/(r_5F+r_5R)&lt;0.93. Also, when the focal length of the first intermediate lens L_M1 in the intermediate lens group G_2M is f₂₁ and the distance from the first object R to the second object W is L, the projection optical system preferably satisfies the following condition (15): </li><li>(15) 0.230&lt;f₂₁/L&lt;0.40. Below the lower limit of the ratio defined by the condition (15), positive distortion may occur. Above the upper limit of the ratio defined by the condition (14), on the other hand, negative distortion may unfavorably occur. Desirably, in order to further correct negative distortion, the lens surface of the first intermediate lens L_M1 on the second object side has such a lens shape that a convex surface thereof faces the second object W. Also, when the focal length of the front lens L_2F in the second lens group G₂ is f_2F and the focal length of the rear lens L_2R in the second lens group G₂ is f_2R, the projection optical system preferably satisfies the following condition (16): </li><li>(16) 0≤f_2F/f_2R&lt;18. The condition (16) defines an optimal ratio of the focal length f_2F of the front lens L_2F in the second lens group G₂ to the focal length f_2R of the rear lens L_2R in the second lens group G₂. Below the lower limit or above the upper limit of the ratio defined by the condition (16), the refractive power of the first lens group G₁ or third lens group G₃ may lose its balance. As a result, it becomes difficult to effectively correct distortion or effectively correct both Petzval sum and astigmatism at the same time. Here, in order to further effectively correct Petzval sum, the intermediate lens group G_2M in the second lens group G₂ preferably has a negative refracting power. Also, desirably, in order to attain sufficient functions for correcting aberration, the above-mentioned respective lens groups specifically have the following configurations. Namely, in order to suppress generation of high-order distortion and pupil spherical aberration, the first lens group G₁ has at least two positive lenses. In order to prevent spherical aberration and Petzval sum from deteriorating, the third lens group G₃ has at least three positive lenses. In order to suppress generation of coma while correcting Petzval sum, the fourth lens group G₄ has at least three negative lenses. Further, in order to converge light onto the second object W without generating a large amount of spherical aberration, the sixth lens group G₆ has at least one positive lens. Also, in order to attain a compact size, the number of the negative lenses constituting the intermediate lens group G_2M in the second lens group G₂ is desirably limited to two. In order to further suppress generation of negative distortion, the above-mentioned sixth lens group G₆ is preferably constituted by not more than three lenses each having a lens surface which satisfies at least the following condition (17): </li><li>(17) 1/|ΦL|&lt;20. <ul id="ul0002" list-style="none" compact="compact"><li>where Φ : the refractive power of each lens surface, and</li><li>L : the object-to-image distance from the first object R to the second object W.</li></ul></li></ul>

0018Here, the refractive power of a lens surface is given by the following equation:<maths id="math0001" num=""><math display="block"><mrow><msub><mrow><mtext>Φ=(n</mtext></mrow><mrow><mtext>2</mtext></mrow></msub><msub><mrow><mtext>-n</mtext></mrow><mrow><mtext>1</mtext></mrow></msub><mtext>)/r</mtext></mrow></math><img file="EP0803755A2_D0001.tif" /></maths><ul id="ul0003" list-style="none" compact="compact"><li>where r : the radius of curvature of the lens surface,</li><li>n₁ : the refractive index of the medium on the first object side of the lens surface, and</li><li>n₂ : the refractive index of the medium on the second object side of the lens surface.</li></ul>

0019Here, when there are four or more lenses each having at least a lens surface satisfying condition (17), the number of the lens surfaces having a certain degree of curvature disposed near the second object W unfavorably increases, thereby causing distortion to occur.

0020The present invention will become more fully understood from the detailed description given hereinbelow and the accompanying drawings which are given by way of illustration only, and thus are not to be considered as limiting the present invention.

0021Further scope of applicability of the present invention will become apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only, since various changes and modifications within the spirit and scope of the invention will become apparent to those skilled in the art from this detailed description.

BRIEF DESCRIPTION OF THE DRAWINGS

0022<ul id="ul0004" list-style="none" compact="compact"><li>Fig. 1 is a view for explaining each section which is common to lens configurations of the projection optical system according to the present invention;</li><li>Fig. 2 is a view showing a schematic configuration of a scanning type exposure apparatus to which the projection optical system according to the present invention is applicable;</li><li>Fig. 3 is a view showing a cross-sectional configuration of a photosensitive substrate along line A-A of Fig. 2;</li><li>Fig. 4 is a view showing a lens arrangement of the first embodiment of the projection optical system according to the present invention;</li><li>Fig. 5 is a view showing a lens arrangement of the second embodiment of the projection optical system according to the present invention;</li><li>Fig. 6 is a view showing a lens arrangement of the third embodiment of the projection optical system according to the present invention;</li><li>Figs. 7 to 10 are aberration diagrams showing various kinds of aberration in the first embodiment shown in Fig. 4, wherein Figs. 7, 8, 9, and 10 respectively show spherical aberration, astigmatism, distortion (%), and coma in the first embodiment;</li><li>Figs. 11 to 14 are aberration diagrams showing various kinds of aberration in the second embodiment shown in Fig. 5, wherein Figs. 11, 12, 13, and 14 respectively show spherical aberration, astigmatism, distortion (%), and coma in the second embodiment;</li><li>Figs. 15 to 18 are aberration diagrams showing various kinds of aberration in the third embodiment shown in Fig. 6, wherein Figs. 15, 16, 17, and 18 respectively show spherical aberration, astigmatism, distortion (%), and coma in the third embodiment; and</li><li>Fig. 19 is a view showing a schematic configuration of a one-shot exposure type exposure apparatus to which the projection optical system according to the present invention is applicable.</li></ul>

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

0023The projection optical system according to the present invention will be explained referring to Fig. 2 to Fig. 19. Fig. 1 will be made reference to when necessary.

0024Fig. 2 is a drawing to show the schematic setup of a scanning exposure apparatus to which the projection optical system according to the present invention can be applied.

0025Fig. 2 will be explained briefly. In the exposure apparatus shown in Fig. 2, the reticle R (first object) as a photomask on which predetermined circuit patterns are formed is disposed on the object plane P1 of the projection optical system PL, and the wafer W (second object) as a photosensitive substrate is disposed on the image plane P2 of the projection optical system PL. The reticle R is held on a reticle stage RS arranged to move in the X-direction (corresponding to the arrow D1 in Fig. 2) upon exposure, and the wafer W is held on a wafer stage WS arranged to move in the X-direction (corresponding to the arrow D2 in Fig. 2) opposite to movement of the reticle stage RS. As shown in Fig. 2, a slit (rectangular) illumination area IF₁ extending in the Y-direction is formed on the reticle R, and an illumination optical system IS for uniformly illuminating the illumination area IF₁ is disposed above the reticle R. Exposure light is emitted from a light source LS provided in the illumination system.

0026In the above arrangement, the light supplied from the light source LS in the illumination optical system IS illuminates the reticle R in a slit pattern. An image of the light source LS in the illumination optical system IS is formed at the position of the pupil (the position of aperture stop AS) of the projection optical system PL, thus realizing so-called Köhler illumination. Then an image of the pattern of reticle R Köhler-illuminated is projected (or transferred) onto the wafer W through the projection optical system PL.

0027The photosensitive substrate placed on the above wafer stage WS is one obtained by coating the entire surface of exposed object 100 such as a silicon wafer, a glass plate, or the like with a photosensitive material 200 such as a photoresist, as shown in Fig. 3.

0028On this occasion, an area EF₁ of the pattern image of reticle R exposed on the wafer W is a slit pattern (rectangular shape) extending in the Y-direction, as shown in Fig. 2. Thus, when the projection magnification factor of the projection optical system PL is 1/M, the reticle stage RS and wafer stage WS are moved in mutually opposite directions (corresponding to the arrows D1 and D2, respectively) along the X-direction in the velocity ratio of M:1, thereby the pattern image of the entire surface of reticle R is transferred onto the wafer W.

0029The art related to various exposure apparatus as described above is disclosed, for example, in United States Patent Applications No. 08/255,927, No. 08/260,398, and No. 08/299,305, and United States Patents No. 4,497,015, No. 4,666,273, No. 5,194,893, No. 5,253,110, No. 5,333,035, and No. 5,379,091. The projection optical system according to the present invention can be applied to any exposure apparatus disclosed in the listed references.

0030The above United States Patent Application No. 08/255,927 describes the illumination optical system (using a laser light source) applicable to the scanning exposure apparatus. The above United States Patent Application No. 08/260,398 describes the illumination optical system (using a lamp light source) applicable to the scanning exposure apparatus. The United States Patent Application No. 08/299,305 discloses an alignment mechanism applicable to the scanning exposure apparatus. The United States Patent No. 4,497,015 describes the illumination optical system (using a lamp light source) applicable to popular exposure apparatus. The United States Patent No. 4,666,273 discloses an example of the step-and-repeat type exposure apparatus. The United States Patent No. 5,194,893 discloses the scanning exposure apparatus, particularly, the illumination optical system, illumination area, mask-side and reticle-side interference systems, automatic focusing mechanism, and alignment optical system. The United States Patent No. 5,253,110 describes the illumination optical system (using a laser light source) applicable to the step-and-repeat type exposure apparatus. However, the illumination optical system disclosed in this reference can also be applied to the scanning exposure apparatus. The United States Patent No. 5,333,035 discloses a modified illumination optical system applicable to popular exposure apparatus. The United States Patent No. 5,379,091 discloses the illumination optical system (using a laser light source) applicable to the scanning exposure apparatus. In addition, United States Patent No. 5,245,384 also shows the illumination optical system using a mercury lamp, applicable to ordinary exposure apparatus (steppers).

0031Now, the following embodiments show examples of the projection optical system to which a high pressure mercury lamp for supplying light having the exposure wavelength λ of i-line (365 nm) is applicable as a light source LS disposed inside the illumination optical system IS. Fig. 4 to Fig. 6 show lens layouts of the first to third embodiments of the projection optical system according to the present invention.

0032As shown in Fig. 4 to Fig. 6, the projection optical system in each lens layout is composed of, in order from the side of reticle R as a first object, the first lens group G₁ having a positive refracting power, the second lens group G₂ having a negative refracting power, the third lens group G₃ having a positive refracting power, the fourth lens group G₄ having a negative refracting power, the fifth lens group G₅ having a positive refracting power, and the sixth lens group G₆ having the positive refracting power. These examples of the projection optical system are approximately telecentric on the object side (on the reticle side) and on the image side (on the wafer side) thereof, and have demagnification factors.

0033In each of the projection optical systems shown in Figs. 4 to 6, object-to-image distance L (distance from an object surface P1 to an image surface P2 or the distance from the reticle R to the wafer W) is 1,000, image-side numerical aperture NA is 0.6, projection magnification B is 1/4, and diameter of the exposure area on the wafer W or diagonal length of the slit-like exposure area on the wafer W of the projection optical system PL is 26.7.

0034In the following, a specific lens arrangement of the first embodiment will be explained with reference to Fig. 4. First, the first lens group G₁ has, in order from the reticle R toward the wafer W, a negative meniscus lens L₁₁ whose concave surface faces the image surface P2, a positive lens (positive lens having a biconvex shape) L₁₂ whose stronger convex surface faces the image surface P2, and two positive lenses (positive lenses each having a biconvex shape) L₁₃ and L₁₄ whose respective stronger convex surfaces face the object surface P1.

0035The second lens group G₂ has a negative lens (biconcave negative lens: front lens) L_2F which is disposed as closest to the object R (reticle) and whose stronger concave surface faces the image surface P2, a negative lens (plano-concave negative lens: rear lens) L_2R which is disposed as closest to the image W (wafer) and whose concave surface faces the object surface P1, and an intermediate lens group G_2M which is disposed between these negative lenses L_2F and L_2R and has a negative refracting power. The intermediate lens group G_2M has, in order from the reticle R toward the wafer W, a positive lens (positive biconvex lens: first lens) L_M1 whose stronger convex surface faces the image surface P2, a negative lens (negative meniscus lens: second lens) L_M2 whose concave surface faces the image surface P2, and a negative lens (negative biconcave lens: third lens) L_M3 whose stronger concave surface faces the object surface P1.

0036The third lens group G₃ has, in order from the reticle R toward the wafer W, two positive lenses (positive meniscus lenses) L₃₁ and L₃₂ whose respective convex surfaces face the image surface P2, a positive lens (positive biconvex lens) L₃₃ whose stronger convex surface similarly faces the image surface P2, and a positive lens (positive biconvex lens) L₃₄ whose stronger convex surface faces the object surface P1, and a positive lens (positive meniscus lens) L₃₅ whose convex surface similarly faces the object surface P1.

0037The fourth lens group G₄ has, in order from the reticle R toward the wafer W, a negative lens (negative meniscus lens) L₄₁ whose concave surface faces the image surface P2, a negative biconcave lens L₄₂, and a negative lens (negative biconcave lens) L₄₃ whose stronger concave surface faces the object surface P1.

0038The fifth lens group G₅ has, in order from the reticle R toward the wafer W, a positive lens (positive biconvex lens) L₅₁ whose stronger convex surface faces the object surface P1, a positive lens (positive meniscus lens) L₅₂ whose convex surface faces the image surface P2, two positive lenses (positive biconvex lenses) L₅₃ and L₅₄ whose respective stronger convex surfaces similarly face the image surface P2, a negative lens (negative meniscus lens) L₅₅ whose concave surface faces the object surface P1, three positive lenses (positive meniscus lenses) L₅₆, L₅₇, and L₅₈ whose respective convex surfaces face the object surface P1, and a negative lens (negative meniscus lens) L₅₉ whose concave surface faces the image surface P2.

0039Finally, the sixth lens group G₆ has, in order from the reticle R toward the wafer W, a positive lens (positive biconvex lens) L₆₁ whose stronger convex surface faces the object surface P1, a negative lens (negative meniscus lens) L₆₂ whose concave surface faces the image surface P2, and a positive lens (positive meniscus lens) L₆₃ whose convex surface faces the object surface P1.

0040Here, in the first lens group G₁ in the first embodiment, since the image-side lens surface of the negative lens (negative meniscus lens) L₁₁, whose concave surface faces the image surface P2, and the object-side lens surface of the positive biconvex lens L₁₂ have similar degrees of curvature and are relatively close to each other, these two lens surfaces correct high-order distortion.

0041In the intermediate lens group G_2M in the first embodiment, the first lens L_M1 has a biconvex shape having not only a convex surface facing the image surface P2 but also a convex surface facing the object surface P1. Accordingly, generation of spherical aberration at pupils can be suppressed.

0042In the fourth lens group G₄ in the first embodiment, the negative meniscus lens L₄₁, whose concave surface faces the image surface P2, is located at the object side of the negative lens (negative biconcave lens) L₄₂, while the negative lens L₄₃, whose stronger concave surface faces the object surface P1, is located at the image side of the negative lens L₄₂. Accordingly, Petzval sum can be corrected while generation of coma is suppressed.

0043Also, the positive lens L₅₄ in the fifth lens group G₅ has a convex surface facing the negative meniscus lens L₅₅, while the surface of the positive lens L₅₄ on the side opposite to the negative meniscus lens L₅₅ is also formed as a convex shape. Due to such a biconvex shape, the positive lens L₅₄ can suppress generation of high-order spherical aberration resulting from higher NA.

0044In the following, a lens arrangement of the second embodiment of the projection optical system according to the present invention will be explained with reference to Fig. 5. The second embodiment shown in Fig. 5 differs from the first embodiment shown in Fig. 4 in the lens arrangements of the first lens group G₁, second lens group G₂, third lens group G₃, and fourth lens group G₄.

0045In the first lens group G₁, while each of two positive lenses (L₁₃ and L₁₄) respectively disposed as the third and fourth lenses from the object (reticle) side is comprised of a positive biconvex lens in the first embodiment, each of these two positive lenses (L₁₃ and L₁₄) is comprised of a positive meniscus lens whose convex surface faces the object surface P1 in the second embodiment.

0046In the intermediate lens group G_2M in the second lens group G₂, while the negative lens L_M2 disposed as the second lens from the object side is composed of a negative meniscus lens in the first embodiment, it is composed of a biconcave lens in the second embodiment. Also, while the rear lens L_2R in the second lens group G₂ is comprised of a negative plano-concave lens in the first embodiment, it is comprised of a biconcave lens in the second embodiment.

0047In the third lens group G₃, while each of the positive lenses (L₃₁ and L₃₅) respectively disposed as the first and fifth lenses from the object side is comprised of a positive meniscus lens in the first embodiment, each of these positive lenses (L₃₁ and L₃₅) is comprised of a biconvex lens in the second embodiment. Also, in the third lens group G₃, while the positive lens L₃₃ disposed as the third lens from the object side is comprised of a biconvex lens in the first embodiment, it is comprised of a positive meniscus lens in the second embodiment.

0048The fourth lens group G₄ in the second embodiment includes one additional negative lens as compared with the first embodiment, thereby comprising four negative lenses. Specifically, it comprises, in order from the reticle R toward the wafer W, two negative lenses (two negative meniscus lenses) L₄₁ and L₄₂ whose respective concave surfaces face the image surface P2, a negative biconcave lens L₄₃, and a negative lens (negative biconcave lens) L₄₄ whose stronger concave surface faces the object surface P1.

0049In the following, a lens arrangement of the third embodiment of the projection optical system according to the present invention will be explained with reference to Fig. 6.

0050The lens arrangement of the third embodiment shown in Fig. 6 differs from that of the first embodiment shown in Fig. 4 in the lens arrangement of each lens group.

0051In the first lens group G₁, while the positive lens L₁₄ disposed as the fourth lens from the object side (reticle side) is comprised of a positive biconvex lens in the first embodiment, it is comprised of a plano-convex lens whose convex surface faces the object surface P1 in the third embodiment.

0052In the second lens group G₂, while the rear lens L_2R is comprised of a negative plano-concave lens in the first embodiment, it is comprised of a biconcave lens in the third embodiment.

0053In the third group G₃, while the positive lens L₃₁ disposed as the first lens from the object side is comprised of a positive meniscus lens in the first embodiment, it is comprised of a biconvex lens in the third embodiment. Also, in the third group G₃, while the positive lens L₃₃ disposed as the third lens from the object side is comprised of a biconvex lens in the first embodiment, it is comprised of a positive meniscus lens whose convex surface faces the image surface P2 in the third embodiment.

0054The fourth lens group G₄ in the third embodiment includes one additional negative lens as compared with the first embodiment, thereby comprising four negative lenses. Specifically, it comprises, successively from the reticle R toward the wafer W, two negative lenses (two negative meniscus lenses) L₄₁ and L₄₂ whose respective concave surfaces face the image surface P2, a negative biconcave lens L₄₃, and a negative lens (negative biconcave lens) L₄₄ whose stronger concave surface faces the object surface P1.

0055In the fifth lens group G₅, while the positive lens L₅₆ disposed as the sixth lens from the object side is comprised of a positive meniscus lens in the first embodiment, it is comprised of a biconvex lens in the third embodiment.

0056In the sixth lens group G₆, while the positive lens L₆₁ disposed as the first lens from the object side is comprised of a positive meniscus lens in the first embodiment, it is comprised of a biconvex lens in the third embodiment.

0057Here, in each of the above-mentioned embodiments, the aperture stop AS is disposed between the positive first lens L₅₁ and the positive second lens L₅₂ in the fifth lens group G₅.

0058While this aperture stop AS is disposed between two positive lenses (L₅₁ and L₅₂) which are positioned at the object side of the fifth lens group G₅ in these embodiments, without being restricted to such an arrangement, it may be disposed in any manner basically as long as it is disposed between the positive lens L₅₁, which is positioned as closest to the object R (reticle) in the fifth lens group G₅, and the image W (wafer). According to such an arrangement of the aperture stop AS, high-order spherical aberration which is likely to occur in the fifth lens group G₅ as NA increases can be suppressed.

0059The following Tables 1-1, 1-2, 2-1, 2-2, 3-1, and 3-2 show values of items and values corresponding to conditions in the lens arrangements of the first to third embodiments.

0060In these tables, the number at the left end indicates that counted from the object (reticle) side, r is the radius of curvature of the lens surface, d is the lens surface distance, n is the refractive index of the glass material at an exposure wavelength λ of 365 nm, d₀ is the distance from the first object (reticle R) to the lens surface (first lens surface) closest to the object R (reticle) in the first lens group G₁ along the optical axis, β is the projection magnification of the projection optical system, Bf is the distance from the lens surface closest to the second object (wafer W) in the sixth lens group G₆ to the image surface P2 along the optical axis, NA is the numerical aperture of the projection optical system on the image side (wafer side), and L is the object-to-image distance from the object surface P1 to the image surface P2. Also, in the tables, f₁ is the focal length of the first lens group G₁, f₂ is the focal length of the second lens group G₂, f₃ is the focal length of the third lens group G₃, f₄ is the focal length of the fourth lens group G₄, f₅ is the focal length of the fifth lens group G₅, f₆ is the focal length of the sixth lens group G₆, L is the distance (object-to-image distance) from the object surface P1 to the image surface P2, I is the axial distance from the first object (reticle R) to the first-object-side focal point of the projection optical system as a whole (wherein "first-object-side focal point of the entire projection optical system" means an intersecting point of emergent light with the optical axis of the projection optical system when parallel light (corresponding to the collimated light beams in Fig. 2) in the paraxial region with respect to the optical axis of the projection optical system is made incident from the second object side of the projection optical system and the light in the paraxial region is emergent from the projection optical system), r_2Ff is the radius of curvature of the lens surface of the front lens L_2F in the second lens group G₂ on the first object side, r_2Fr is the radius of curvature of the lens surface of the front lens L_2F in the second lens group G₂ on the second object side, r_2Rf is the radius of curvature of the lens surface of the rear lens L_2R in the second lens group G₂ on the first object side, r_2Rr is the radius of curvature of the lens surface of the rear lens L_2R in the second lens group G₂ on the second object side, f₂₂ is the focal length of the second intermediate lens L_M2 having a negative refracting power in the second lens group G₂, f₂₃ is the focal length of the third intermediate lens L_M3 having a negative refracting power in the second lens group G₂, r_5R is the radius of curvature of the negative lens L₅₉ disposed closest to the second object in the fifth lens group G₅ on the second object side, r_6F is the radius of curvature of the lens L₆₁ disposed as closest to the first object in the sixth lens group G₆ on the first object side, d₅₆ is the lens group distance between the fifth lens group G₅ and the sixth lens group G₆, d₆ is the axial distance from the lens surface closest to the first object in the sixth lens group G₆ to the second object, r_5F is the radius of curvature of the negative lens L₅₉ disposed as closest to the second object in the fifth lens group G₅ on the first object side, f₂₁ is the focal length of the first intermediate lens L_M1 having a positive refracting power in the intermediate lens group G_M2 in the second lens group G₂, f_2F is the focal length of the front lens L_2F which has a negative refracting power and is disposed as closest to the first object in the second lens group G₂ with a concave surface thereof facing the second object, and f_2R is the focal length of the rear lens L_2R which has a negative refracting power and is disposed as closest to the second object in the second lens group G₂ with a concave surface thereof facing the first object. <tables id="tabl0001" num="0001"><img file="EP0803755A2_D0002.tif" /></tables><tables id="tabl0002" num="0002"><img file="EP0803755A2_D0003.tif" /></tables><tables id="tabl0003" num="0003"><img file="EP0803755A2_D0004.tif" /></tables><tables id="tabl0004" num="0004"><table frame="none"><title>Table 1-2</title><tgroup cols="1" colsep="1" rowsep="0"><colspec colnum="1" colname="col1" colwidth="157.50mm" /><thead valign="top"><row rowsep="1"><entry namest="col1" nameend="col1" align="center">Values corresponding to the Conditions in the First Embodiment</entry></row></thead><tbody valign="top"><row><entry namest="col1" nameend="col1" align="left">(1) f₁ /L= 0.113</entry></row><row><entry namest="col1" nameend="col1" align="left">(2) f₂ /L= -0.0290</entry></row><row><entry namest="col1" nameend="col1" align="left">(3) f₃ /L= 0.0956</entry></row><row><entry namest="col1" nameend="col1" align="left">(4) f₄ /L= -0.0644</entry></row><row><entry namest="col1" nameend="col1" align="left">(5) f₅ /L= 0.0991</entry></row><row><entry namest="col1" nameend="col1" align="left">(6) f₆ /L= 0.142</entry></row><row><entry namest="col1" nameend="col1" align="left">(7) (r2Ff - r2Fr ) / (r2Ff + r2Fr ) = 1.27</entry></row><row><entry namest="col1" nameend="col1" align="left">(8) (r2Rf - r2Rr ) / (r2Rf + r2Rr ) = -1.00</entry></row><row><entry namest="col1" nameend="col1" align="left">(9) I/L= 3.21</entry></row><row><entry namest="col1" nameend="col1" align="left">(10) f₂₂/f₂₃= 1.30</entry></row><row><entry namest="col1" nameend="col1" align="left">(11) (r5R-r6F) / (r5R+r6F) = -0.0618</entry></row><row><entry namest="col1" nameend="col1" align="left">(12) d₅₆/L= 0.00492</entry></row><row><entry namest="col1" nameend="col1" align="left">(13) d₆ /r6F= 1.17</entry></row><row><entry namest="col1" nameend="col1" align="left">(14) (r5F-r5R) / (r5F+ r5R) = 0.816</entry></row><row><entry namest="col1" nameend="col1" align="left">(15) f₂₁/L= 0.307</entry></row><row rowsep="0"><entry namest="col1" nameend="col1" align="left">(16) f2F/f2R= 1.04</entry></row></tbody></tgroup></table></tables><tables id="tabl0005" num="0005"><img file="EP0803755A2_D0005.tif" /></tables><tables id="tabl0006" num="0006"><img file="EP0803755A2_D0006.tif" /></tables><tables id="tabl0007" num="0007"><img file="EP0803755A2_D0007.tif" /></tables><tables id="tabl0008" num="0008"><img file="EP0803755A2_D0008.tif" /></tables><tables id="tabl0009" num="0009"><table frame="none"><title>Table 2-2</title><tgroup cols="1" colsep="1" rowsep="0"><colspec colnum="1" colname="col1" colwidth="157.50mm" /><thead valign="top"><row rowsep="1"><entry namest="col1" nameend="col1" align="center">Values corresponding to the Conditions in the Second Embodiment</entry></row></thead><tbody valign="top"><row><entry namest="col1" nameend="col1" align="left">(1) f₁ /L= 0.108</entry></row><row><entry namest="col1" nameend="col1" align="left">(2) f₂ /L= -0.0277</entry></row><row><entry namest="col1" nameend="col1" align="left">(3) f₃ /L= 0.0929</entry></row><row><entry namest="col1" nameend="col1" align="left">(4) f₄ /L= -0.0595</entry></row><row><entry namest="col1" nameend="col1" align="left">(5) f₅ /L= 0.0953</entry></row><row><entry namest="col1" nameend="col1" align="left">(6) f₆ /L= 0.150</entry></row><row><entry namest="col1" nameend="col1" align="left">(7) (r2Ff - r2Fr ) / (r2Ff + r2Fr ) = 1.02</entry></row><row><entry namest="col1" nameend="col1" align="left">(8) (r2Rf - r2Rr ) / (r2Rf + r2Rr ) =-1.15</entry></row><row><entry namest="col1" nameend="col1" align="left">(9) I/L= 3.22</entry></row><row><entry namest="col1" nameend="col1" align="left">(10) f₂₂/f₂₃= 1.12</entry></row><row><entry namest="col1" nameend="col1" align="left">(11) (r5R- r6F) / (r5R+ r6F) = -0.0773</entry></row><row><entry namest="col1" nameend="col1" align="left">(12) d₅₆/L= 0.00558</entry></row><row><entry namest="col1" nameend="col1" align="left">(13) d₆ /r6F= 1.10</entry></row><row><entry namest="col1" nameend="col1" align="left">(14) (r5F- r5R) / (r5F+ r5R) = 0.798</entry></row><row><entry namest="col1" nameend="col1" align="left">(15) f₂₁/L= 0.233</entry></row><row rowsep="0"><entry namest="col1" nameend="col1" align="left">(16) f2F/f2R= 0.988</entry></row></tbody></tgroup></table></tables><tables id="tabl0010" num="0010"><img file="EP0803755A2_D0009.tif" /></tables><tables id="tabl0011" num="0011"><img file="EP0803755A2_D0010.tif" /></tables><tables id="tabl0012" num="0012"><img file="EP0803755A2_D0011.tif" /></tables><tables id="tabl0013" num="0013"><table frame="none"><title>Table 3-2</title><tgroup cols="1" colsep="1" rowsep="0"><colspec colnum="1" colname="col1" colwidth="157.50mm" /><thead valign="top"><row rowsep="1"><entry namest="col1" nameend="col1" align="center">Values corresponding to the Conditions in the Third Embodiment</entry></row></thead><tbody valign="top"><row><entry namest="col1" nameend="col1" align="left">(1) f₁ /L= 0.108</entry></row><row><entry namest="col1" nameend="col1" align="left">(2) f₂ /L= -0.0266</entry></row><row><entry namest="col1" nameend="col1" align="left">(3) f₃ /L= 0.0878</entry></row><row><entry namest="col1" nameend="col1" align="left">(4) f₄ /L= -0.0637</entry></row><row><entry namest="col1" nameend="col1" align="left">(5) f₅ /L= 0.0941</entry></row><row><entry namest="col1" nameend="col1" align="left">(6) f₆ /L= 0.161</entry></row><row><entry namest="col1" nameend="col1" align="left">(7) (r2Ff - r2Fr ) / (r2Ff + r2Fr ) = 1.14</entry></row><row><entry namest="col1" nameend="col1" align="left">(8) (r2Rf - r2Rr ) / (r2Rf + r2Rr ) =-1.12</entry></row><row><entry namest="col1" nameend="col1" align="left">(9) I/L= 3.36</entry></row><row><entry namest="col1" nameend="col1" align="left">(10) f₂₂/f₂₃= 1.11</entry></row><row><entry namest="col1" nameend="col1" align="left">(11) (r5R-r6F) / (r5R+r6F) = -0.0651</entry></row><row><entry namest="col1" nameend="col1" align="left">(12) d₅₆/L= 0.00477</entry></row><row><entry namest="col1" nameend="col1" align="left">(13) d₆ /r6F= 1.00</entry></row><row><entry namest="col1" nameend="col1" align="left">(14) (r5F- r5R) / (r5F+ r5R) = 0.883</entry></row><row><entry namest="col1" nameend="col1" align="left">(15) f₂₁/L= 0.254</entry></row><row rowsep="0"><entry namest="col1" nameend="col1" align="left">(16) f2F/f2R= 0.967</entry></row></tbody></tgroup></table></tables>

0061Here, when L is the distance (object-image distance) from the object surface (reticle surface) P1 to the image surface (wafer surface) P2 and Φ is the refractive power of a lens surface in the sixth lens group G₆, in the above-mentioned first embodiment, 1/|Φ/ L|=0.196 at the object-side lens surface of the positive lens L₆₁, 1/|Φ/L|=0.239 at the object-side lens surface of the negative lens L₆₂, and 1/|Φ/L|=0.139 at the object-side lens surface of the positive lens L₆₃. Thus, in the first embodiment, each lens surface satisfies the above-mentioned condition (17). In the second embodiment, 1/|Φ/L|=0.193 at the object-side lens surface of the positive lens L₆₁, 1/|Φ/L|=0.402 at the object-side lens surface of the negative lens L₆₂, and 1/|Φ/L|=0.150 at the object-side lens surface of the positive lens L₆₃. Thus, in the second embodiment, each lens surface satisfies the above-mentioned condition (17). In the third embodiment, 1/|Φ/L|=0.179 at the object-side lens surface of the positive lens L₆₁, 1/|Φ/L|=0.849 at the object-side lens surface of the negative lens L₆₂, and 1/|Φ/L|=0.129 at the object-side lens surface of the positive lens L₆₃. Thus, in the third embodiment, each lens surface satisfies the condition (17).

0062As mentioned above, the sixth lens group G₆ in each embodiment is comprised of three or less lenses each having at least a lens surface satisfying the condition (17).

0063It is understood from the above values of items in each embodiment that each embodiment realizes preferable telecentricity on object side (reticle side) and image side (wafer side) while securing a large numerical aperture and a broad exposure area.

0064Next, Figs. 7 to 10 are drawings to show various aberrations of the first embodiment of the projection optical system according to the present invention, having the lens arrangement shown in Fig. 4. Particularly, Fig. 7 is a drawing to show spherical aberration of the first embodiment, Fig. 8 a diagram to show astigmatism of the first embodiment, Fig. 9 a diagram to show distortion of the first embodiment, and Fig. 10 a diagram to show coma of the first embodiment. In these aberration diagrams of Fig. 7 to Fig. 10, NA represents the numerical aperture of the projection optical system and Y the image height. In Fig. 8 to show astigmatism, the dotted line indicates the meridional image surface and the solid line the sagittal image surface.

0065Similarly, Figs. 11 to 14 are drawings to show various aberrations of the second embodiment of the projection optical system according to the present invention, having the lens arrangement shown in Fig. 5. Particularly, Fig. 11 is a diagram to show spherical aberration of the second embodiment, Fig. 12 a diagram to show astigmatism of the second embodiment, Fig. 13 a diagram to show distortion of the second embodiment, and Fig. 14 a diagram to show coma of the second embodiment. Figs. 15 to 18 are drawings to show various aberrations of the third embodiment of the projection optical system according to the present invention, having the lens arrangement shown in Fig. 6. Particularly, Fig. 15 is a diagram to show spherical aberration of the third embodiment, Fig. 16 a diagram to show astigmatism of the third embodiment, Fig. 17 a diagram to show distortion of the third embodiment, and Fig. 18 a diagram to show coma of the third embodiment. Also in these aberration diagrams of Figs. 11 to 18, NA represents the numerical aperture of the projection optical system and Y the image height. Further, also in the aberration diagrams shown in Figs. 12 and 16, the dotted line indicates the meridional image surface and the solid line the sagittal image surface.

0066As can be understood when the aberration diagrams are compared with each other, while having a large numerical aperture and a large exposure area (image height), various kinds of aberration are corrected in a well-balanced manner in each embodiment. In particular, distortion is effectively corrected so as to approximate zero in the whole image, thereby a projection optical system having a high resolution in a wide exposure area is attained.

0067Here, each of the above-described embodiments show examples in which a mercury lamp supplying exposure light at i-line (365 nm) is used as a light source. Examples of the light source applicable to each embodiment further include a mercury lamp supplying exposure light at g-line (435 nm) and extreme ultraviolet ray light sources such as excimer lasers supplying light of 193 nm and 248 nm.

0068Also, in the foregoing embodiments, since lenses constituting the projection optical system are not bonded to each other, a problem that the bonding surfaces change over time can be avoided. While the lenses constituting the projection optical system are respectively constituted by a plurality of kinds of optical materials, they may be made of a single glass material such as quartz (SiO₂) when the wavelength region of the light source is not of a wide band.

0069Further, the projection optical systems of the first to third embodiments are used in the scanning type exposure apparatus shown in Fig. 2. However, the projection optical system of the present invention is also applicable to a collective exposure type exposure apparatus in which patterns of a reticle R are collectively projected onto a wafer W (see Fig. 19). In Fig. 19, IF₂ and EF₂ indicate the illumination area on the reticle R and the exposure area on the wafer W, respectively.

0070As explained in the foregoing, according to the present invention, various kinds of aberration are corrected in a well-balanced manner and, in particular, distortion is quite effectively corrected, while a relatively large exposure area is secured and a both-side telecentric optical system is attained. Further, since high-order spherical aberration and high-order coma are sufficiently corrected while a large numerical aperture is rendered to the projection optical system, there can be attained the projection optical system having a quite favorable resolution.

0071From the invention thus described, it will be obvious that the invention may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the invention, and all such modifications as would be obvious to one skilled in the art are intended to be included within the scope of the following claims.

0072The basic Japanese Application No.105707/1996 filed on April 25, 1996 is hereby incorporated by reference.