EP0484746A2

Chemically adsorbed monomolecular lamination film and method of manufacturing the same.

Abstract

The invention to provide a chemically adsorbed monomolecular lamination film comprising a chemically adsorbed monomolecular film formed via a siloxane-based monomolecular or polymer film on a substrate surface. It also seeks to provide a method of forming a chemically adsorbed monomolecular film efficiently and with high density on a substrate surface with few hydroxyl groups, which method comprises a step of contacting a substrate containing hydroxyl groups present on the surface with a non-aqueous solution containing a material with plural chlorosilanol groups in molecule, a step of removing the material remaining on the substrate without reaction by washing the substrate with a non-aqueous organic solution (if this process is omitted, the siloxane-based polymer film is prepared on the substrate), a step of forming a monomolecular film constituted by a compound containing a silanol group in molecule on the substrate by exposing to the air containing moisture or washing with water, after the removal step, and a step of laminating a monomolecular adsorption film by adosorbing a chlorosilane-based surface active agent constituted by a straight hydrocarbon chain having a chlorosilane groups at one end onto the substrate after the monomolecular or polymer film formation step.

EP0484746A2, drawing sheet 1
Sheet 1 of 9

Term

Term ended

Projected expiry passed 23 October 2011, 14.9 years ago.

  1. Priority
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  5. Today

12 claims: 3 independent, 9 dependent

  1. 1
    A chemically adsorbed monomolecular lamination film comprising a siloxane-based film formed on a substrate surface by chemical bonding thereto and a chemically adsorbed monomolecular film formed on said siloxane-based film.
  2. 6
    A method of manufacturing a chemically adsorbed monomolecular lamination film comprising:a step of contacting a substrate having hydroxyl groups on the surface with a non-aqueous solution containing a material having plural chlorosilane groups in molecule;a step of removing said material remaining on the substrate without reaction by washing the substrate using a non-aqueous organic solvent;a step of forming a siloxane-based film constituted with a compound containing a silanol group in molecule on the substrate by reacting the chlorosilane grouped with water after said removing step;and    a step of laminating a adsorbed monomolecular film by adsorbing a chlorosilane-based surface active agent having a straight hydrocarbon chain and a chlorosilane group at one end onto the substrate after said siloxane-based film formation step.
  3. 11
    The method of manufacturing a chemically adsorbed monomolecular lamination film according to one of claims 6 and 10, wherein said chlorosilane-based surface active agent is CF₃-(CF₂) n -(R) m -SiX p Cl 3-p where n represents 0 or an integer, R represents an alkyl group or a substitute group containing a C=C, a C≡C, a silicon atom or an oxygen atom, m represents 0 or 1, X represents a hydrogen atom or a substitute group in a group consisting of an alkyl group, an alkoxy group, a fluorine-containing alkyl group and a fluorine-containing alkoxy group, and p represents 0, 1 or 2.
  4. 12
    A method of manufacturing a chemically adsorbed monomolecular lamination film comprising:a step of contacting a substrate having hydroxyl groups on the surface with a non-aqueous solution containing a material having plural chlorosilane groups in molecule;a step of forming a siloxane-based film constituted with a compound containing a silanol group in molecule on the substrate by reacting the chlorosilane grouped with water after said removing step;and    a step of laminating a adsorbed monomolecular film by adsorbing a chlorosilane-based surface active agent having a straight hydrocarbon chain and a chlorosilane group at one end onto the substrate after said siloxane-based film formation step.