EP0444935A3
Ion beam control system
Abstract
An ion implantation source (10) used in an ion implantation system. The source produces multiple beam portions which combine to form a large diameter beam of the size of a workpiece. By controlling beam neutralization of the individual beam portions, the ion density as a function of position within the cross section of the beam can be controlled.
Term
Term ended
Projected expiry passed 28 February 2011, 15.6 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
1 sheet
Sheet 1
Every citation, both waysCites: the store holds 4 of 5
| Document | Relation | Office | Category | Cited during |
|---|---|---|---|---|
| EP0106497A2 | Cites | European Patent Office (EPO) | A | Search report |
| EP0167360A2 | Cites | European Patent Office (EPO) | Y | Search report |
| EP0230290A2 | Cites | European Patent Office (EPO) | A | Search report |
| FR2316724A1 | Cites | France | A | Search report |
| PATENT ABSTRACTS OF JAPAN vol. 13, no. 232 (E-765)(3580) 29 May 1989 & JP-A-1 038 959 ( MITSUBISHI ELECTRIC CORPORATION ) 9 February 1989 | Non-patent | – | – | Search report |
19 members in 5 offices
Priority claims4
| Document | Office | Kind | Date |
|---|---|---|---|
| 487158 | United States of America | – | |
| 48715890 | United States of America | A | |
| 48715890 | United States of America | A | |
| US19900487158 | – | – | – |
Members19
| Document | Office | Kind | |
|---|---|---|---|
| US4914305A | United States of America | A | |
| EP0377298A2 | European Patent Office (EPO) | A2 | |
| KR900012339A | Republic of Korea | A | |
| JPH02226645A | Japan | A | |
| EP0377298A3 | European Patent Office (EPO) | A3 | |
| US5023458A | United States of America | A | |
| EP0444935A2 | European Patent Office (EPO) | A2 | |
| EP0444935A3This record | European Patent Office (EPO) | A3 | |
| JPH04230942A | Japan | A | |
| EP0377298B1 | European Patent Office (EPO) | B1 | |
| DE68916776D1 | Germany | D1 | |
| DE68916776T2 | Germany | T2 | |
| KR960003496B1 | Republic of Korea | B1 | |
| EP0444935B1 | European Patent Office (EPO) | B1 | |
| KR960014524B1 | Republic of Korea | B1 | |
| DE69122526D1 | Germany | D1 | |
| DE69122526T2 | Germany | T2 | |
| JP2873704B2 | Japan | B2 | |
| JP2946433B2 | Japan | B2 |
29 legal events, as 3 offices reported them to INPADOC
Over the term
Point at a mark for the eventEvents
| Event | Code | Office | |
|---|---|---|---|
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Notification of lapseLapsedST | ST | FR | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Gb: european patent ceased through non-payment of renewal feeCeasedGBPC | GBPC | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Lapsed in a contracting state [announced via postgrant information from national office to epo]LapsedPG25 | PG25 | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| Annual fee paid to national office [announced via postgrant information from national office to epo]GrantedPGFP | PGFP | EP | |
| European patent in force as of 2002-01-01IF02 | IF02 | GB | |
| Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)732E | 732E | GB | |
| Transmission of propertyTP | TP | FR | |
| No opposition filedOpposition26N | 26N | EP | |
| No opposition filed within time limitOppositionORIGINAL CODE: 0009261PLBE | PLBE | EP | |
| Information on the status of an ep patent application or granted ep patentGrantedSTATUS: NO OPPOSITION FILED WITHIN TIME LIMITSTAA | STAA | EP | |
| It: translation for a ep patent filedITF | ITF | EP | |
| It: translation for a ep patent filedITF | ITF | EP | |
| Fr: translation filedET | ET | EP | |
| Corresponds to:REF | REF | EP | |
| Designated contracting statesAK | AK | EP | |
| (expected) grantORIGINAL CODE: 0009210GRAA | GRAA | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOS IGRAGRAH | GRAH | EP | |
| Despatch of communication of intention to grant a patentORIGINAL CODE: EPIDOS IGRAGRAH | GRAH | EP | |
| First examination report despatched17Q | 17Q | EP | |
| Request for examination filed17P | 17P | EP | |
| Designated contracting statesAK | AK | EP | |
| Search report despatchedORIGINAL CODE: 0009013PUAL | PUAL | EP | |
| Designated contracting statesAK | AK | EP | |
| Public reference made under article 153(3) epc to a published international application that has entered the european phaseORIGINAL CODE: 0009012PUAI | PUAI | EP |
Numbers
- Publication
- 0444935
- Publication, DOCDB
- 0444935
- Publication, EPODOC
- EP0444935
- Application
- 301654
- Application, DOCDB
- 91301654
- Application, EPODOC
- EP19910301654
Titles3
- German
- Ionenstrahl-Steuersystem
- English
- Ion beam control system
- French
- Système de commande d'un faisceau d'ions
Classification
- CPC, 2
- H01J37/08
- H01J37/3172
- IPC, 5
- C23C14 48
- H01J27 02
- H01J37 08
- H01J37 317
- H01L21 265
Designated states1
- Contracting states, 1
- Italy