EP0249799A2

Apparatus for inspecting components of transparent material as to surface defects and inclusions.

Abstract

In a device for inspecting components made of transparent material for surface defects and inclusions, the component (1) by means of a moved light beam (7) is scanned so that a light-section of the component is produced. This light-section is observed by means of a device (8) which is arranged inclined to the direction of incidence of the illumination beam. This means includes an imaging optical system (9), in whose image plane (10) a replaceable mask (11) for separating the image of a plane of the test specimen (1) is arranged. The light beams pass through this mask apply a receiver (17), the arrangement (18) is connected to the evaluation of the receiver signals. By means of such a device can be identified surface defects of the test component, separately for front and back of this component. To be able to also anisotropically scattering surface defects, for example, wiper show a third receiving system is provided which is formed as an integral optics. This consists of a plurality of receivers which are arranged in a half-shell, which spanned the component to be tested.

EP0249799A2, drawing sheet 1
Sheet 1 of 5

Term

Term ended

Projected expiry passed 3 June 2007, 19.3 years ago.

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7 claims: 1 independent, 6 dependent

  1. c-de-0001
    1. Apparatus for testing of parts made of transparent material for surface defects and inclusions, in which the component by means of a moved light beam is scanned point-like and detects the influence of errors of the component light and is used for generating signals that are characteristic of this error, characterized in that the component to be tested (1) is scanned about its axis in rotation of a linearly moved in the diameter direction of light beam (7), that at least one under a preselectable angle inclined to the impingement direction of the illumination beam (7) arranged means (8) provided is composed of an imaging optical system (9), in whose image plane (10) a replaceable mask (11) for separating the image of a plane of the test specimen (1) is arranged such that this means (8) comprises a from the mask (11) passing light rays impinged receiver (17), and that said receiver (17) having an array (18) is connected for evaluation of the receiver signals.