Optical recording media and information recording and reproducing units

ABSTRACT OF THE DISCLOSURE

The present invention provides an optical recording medium using an amorphous-crystalline phasechange for recording and erasing, wherein reflectivity of an optical recording medium-constituting recording film in an amorphous state is larger than that of the optical recording medium-constituting recording film in a crystalline state, or wherein absorptivity of an optical recording medium-constituting recording film in an amorphous state is smaller than that of the optical recording medium-constituting recording film in a crystalline state.

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BACKGROUND OF THE INVENTION

This invention relates to rewritable optical recording media in which information can be recorded, reproduced and erased by using light and heat, a method of 5 information recording, reproducing and erasing in said optical recording media and units therefor.

In optical information recording and reproducing units, information is recorded or erased by means of a change of optical characteristic (energy reflectivity: to 10 be referred to as reflectivity hereinbelow) according to the phase-change between the amorphous phase and the crystalline phase caused when a laser power is changed for irradiation. Various methods for optical information recording and reproducing have hitherto been proposed. As 15 shown in the following known examples, the reflectivities of conventional optical disks are smaller in the amorphous state corresponding to record than in the crystalline state corresponding to erasion. Known examples: Chemistry a disk using a Applied ' a disk using a

TeOx*Ge or TeOX’Sn recording material, described in National Technical Report, Vol. 29, No. 5, P. 731; a disk using an SbzSe recording material, described in Appl.

Phys. Letters Vol. 48 (19), 1986, P. 1256; a disk using a and industry, Vol. 39, No. 3, 1986, P. 174;

Teg^GegSUg recording material, described in Physics Letters, Vol. 46 (8), 1985, P. 735;

<img file="CA1332467C_D0001.tif" />

GeSbTe recording material, described in Proc. International Symposium on Optical Memory, 1987, Japanese Journal of Applied Physics, Vol. 26, 1987, Supple 26-4, P. 64; a disk using a Te^Ge^gSe^gSb₂g recording material, described in Technical Report of Electronic Information Communication Society, Shingaku Giho, Vol. 87, No. 310CPM 87-88, 1987, P. 26; Figures 5 and 7 of Technical Report of Electronic information Communication Society, Shingaku Giho, Vol. 87, No. 310, CPM87-90, 1987, P. 40; a disk using an SeTe-Se recording material, described in Proc. SPIE529, 1985, P. 46; a disk using an InSeTl recording material, described in Appl. Phys. Letter, vol. 50, 1987, P. 668; a disk using a TeGeSn recording material, described in J. Appl. Phys. 60 (12), 1986, P. 4320.

As an exceptional example, FUJITSU. 38, 2, 1987, page 144 describes a disk using an SelnSb recording material as a disk having a higher reflectivity in the recording state than in the erasing state. This disk utilizes crystal I and crystal II, which have different crystalline structures.

The following are known examples of erasing methods for the disks having a smaller reflectivity in the amorphous state than in the crystalline state as mentioned above. In the case of an Sb-Te-Ge recording material described in Extended Abstracts (The 35th Spring Meeting, 1988); The Japan Society of Applied physics and Related Societies, page 839, the erasing is carried out by irradiating a recorded bit with an erasing beam, in which t'1332467 method a coarse crystal adjacent to an amorphous part grows within the bit to recrystallize the amorphous part. That is, the erasing is effected by a method of recrystallizing the recorded bit by heating it to a temperature at which the recorded bit is not melted (to be referred to as solid phase transformation hereinbelow). However, it is pointed out that the number of incompletely erased parts is large. In the case of an SbSeTeGe recording material described in Extended Abstracts (The 35th Spring Meeting 1985); the

Japan Society of Applied physics and Related Societies

28P-ZQ-12, 1988, page 842, the single beam overwrite method is used. The overwrite method is classified into to erasing ways. One is that the erasing is carried out by crystallizing an amorphous part in the solid phase state.

In this erasing way also, the erasability is -25 dB, and incompletely erased parts still remain (solid phase transformation). In the other way of erasing a recorded bit by melting the recorded bit and crystallizing it in a solidification process (to be referred to as liquid phase transformation), the erasability is -15 dB as shown in Figure 2, and the number of incompletely erased parts is larger in this way than in the solid phase transformation. In the case of Sb2(Te-Se)^-GeTe described in Technical Report of Electronic Information Communication Society,

Shingaku Giho, Vol. 87, No. 310, CPM87-90, 1987, page 41, the erasing method uses the solid phase transformation. However, the erasability with a laser power of 10 mW is about 30 dB as shown in Figure 3. When the laser power is

15 mW or more, the liquid phase transformation takes place, and the erasability becomes high. It is pointed out, however, that the high erasability is because unrecorded parts (crystal parts) are melted by irradiation with a laser power of 15 mW or more melts to become amorphous but it is not because recorded bits are erased.

in the case of TeGeSeSb described in Technical

Report of Electronic Information Communication Society, Shingaku Giho, Vol. 87, No. 310, CPM 87-88, 1987, page 27, a high erasability is obtained, which high erasability is due to its double beam method. That is, a recorded film is melted with one circular beam of the two, and the remaining one is an erasing-use beam. As shown in Figure 4, the errasing method comprises increasing the laser power once [to not less than Tm (melting point)] to melt a recorded spot, and then, in the course of cooling, irradiating an elliptic laser spot beam in a power of not less than Tx (crystallization temperature) and not more than Tm, and this method gives an erasability of -40 dB.

As discussed above, when the erasing is carried out in disks having a smaller reflectivity in the amorphous state than in the crystalline state, the problem

I is that thé non-erased part remains in the cases of both the solid phase transformation and the liquid phase transformation, and any high erasability cannot be achieved. In addition, the double beam method gives a high erasability, but requires a complicated unit therefor, which requirement is a problem. The optical .x-s .'“'•y properties (refractive index n, extinction coefficient k) of known recording films are as follows (see TABLE 1).

TAB LE 1

<td rowspan="2"> Recording</td><td rowspan="2"> film</td><td colspan="2"> Optical properties</td>

<td> n</td><td> k</td>

<td rowspan="2">^Te80^Se10^Sb10</td><td> Amorphous</td><td> 4.0</td><td> 1.3</td>

<td> Crystalline</td><td> 4.6</td><td> 2.3</td>

<td rowspan="2"> GeSb₂Te₄</td><td> Amorphous</td><td> 4.7</td><td> 1.3</td>

<td> Crystalline</td><td> 6.9</td><td> 2.6</td>

<td rowspan="2"> TeOx</td><td> Amorphous</td><td> 3.8</td><td> 0.8</td>

<td> Crystalline</td><td> 5.6</td><td> 1.2</td>

<td rowspan="2"> GeTe</td><td> Amorphous</td><td> 4.4</td><td> 1.1</td>

<td> Crystalline</td><td> 5.4</td><td> 1.7</td>

<td rowspan="2">^Sb2^Te3</td><td> Amorphous</td><td> 5.0</td><td> 2.7</td>

<td> Crystalline</td><td> 5.3</td><td> 5.8</td>

In ^Te3Q^Seig^sbio described in J. Appl. Phys. 59.

(6), 1986, page 1819 (n and k in the amorphous state are abbreviated as n amo and k amo, respectively, and n and k in the crystalline state are abbreviated as n cry and k cry, representatively), n amo = 4.0, k amo = 1.3, n cry = 4.6 and k cry = 2.3. In GeSb₂Te₄ described in Proc. int. Symp. on Optical Memory, 1987, page 62, n amo = 4.7, k amo = 1.3, n cry = 6.9 and k cry = 2.6. In TeOx described in Proc. int. Symp. on Optical Memory, 1987, J. JAP., Vol. 26, 1987, Supple. 26-4, page 57, n amo = 3.8, k

<img file="CA1332467C_D0002.tif" />

1332487 amo = 0.8, n cry = 5.6 and k cry = 1.2, and in GeTe described therein, n amo = 4.4, k amo = 1.1, n cry = 5.4, k cry = 1.7. In Sb2Te^ described in Cellection of Manuscripts for No. 35 Applied Physics Associated Joint

Lectures, 1988, 28P-ZQ-5, page 840, n amo = 5.0, k amo = 2.7, n cry = 5.3 and k cry = 5.8.

As is clear from the above, the refractive indices and extinction coefficients of the known examples are all in the relationships of n amo &lt; n cry and k amo &lt;

k cry, and in particular, the refractive indices in the amorphous state are characteristically smaller than those in the crystalline state.

As stated hereinabove, in the existing rewritable optical recording media in which information is recorded and erased by using the phase-change between amorphous and crystalline phases, incompletely erased signals remain to a large extent, and the reduction of the incomplete erasion to a practical-use level is now the greatest issue in development. Further, if a single laser beam can be used to overwrite new signals while erasing recorded signals, the data transmission speed is 2 to 3 times as fast as the speed of conventional media, and the

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optical pick-up therefor can be considerably simplified as compared with one using a plurality of laser beams. Then, great effects are thus achieved on the practical use of optical recording media.

<img file="CA1332467C_D0003.tif" />

SUMMARY OF THE INVENTION

It is an object of this invention to provide optical recording media in which an incomplete erasion, at an erasing time, of the recording media of amorphous5 crystalline phase change type is reduced to a practicaluse level, and a process and units for information recording and reproduction.

The above object is to carry out the incomplete erasion-reduced erasion by acquiring larger reflectivity in the recorded state of an optical recording medium or in an amorphous state of a recording film constituting the optical recording medium than in the erased state of the optical recording medium or in a crystalline state of the recording film constituting the optical recording medium, or by acquiring a smaller energy absorptivity (to be referred to as absorptivity hereinbelow) in the recorded state of the optical recording medium or in an amorphous state of the recording film constituting the optical recording medium than in the erased state of the optical recording medium or in a crystalline state of the recording film constituting the optical recording medium, and by melting both the amorphous recorded part of the recording film and the inevitably copresent unrecorded part (crystal). In addition, the term recorded state used in this invention refers to a complete amorphous state, but also may indicate a state in which the crystalline phase is copresent with the amorphous phase

:. ,: .y

•.Λ';··;:·.. ·'-:·:·' &lt;· ··/. :: : ·/:' ^{; ;}·. ';· y..·:··' [the amount of the amorphous phase in the recording film is 50 vol. % or more]. The amorphous phase can be defined as the structure having random network chemical bonding of Te and the other elements, and also defined as non diffraction peaks using an X-ray diffractometry. And the erased state in this invention refers to a complete crystalline state, but also may represent a state in which the amorphous state is included in the crystalline phase [the amount of the crystalline phase in the recording film is 50 vol. % or more].

In accordance with one aspect of the invention there is provided an optical recording medium using an amorphous-crystalline phase change for recording and erasing of information, the medium comprising a substrate, a recording film, a dielectric film and a metal reflection film, the recording film comprising a composition of In_xSb_yTe_(1Q0._x._y), wherein 20 &lt; x &lt; 32, &lt; y &lt; 40 (in atomic %) wherein the reflectivity of the recording film at the amorphous state is larger than that at the crystalline state at a wavelength of laser employed for recording and erasing.

In accordance with another aspect of the invention there is provided a process using an optical recording medium which uses an amorphous-crystalline phase change for recording and erasing of information, the medium comprising a substrate, a recording film, a dielectric film and a metal reflection film, the recording film comprising a composition of ln_xSb_yTe₍₁₀₀._x._y),

<img file="CA1332467C_D0004.tif" />

wherein 20&lt;x&lt;40 (in atomic %) wherein the reflectivity of the recording film at the amorphous state is larger than that at the crystalline state at a wavelength of laser employed for recording and erasing; the process for recording and erasing, wherein the recording and erasing is carried out by irradiating a recording film constituting the optical recording medium with a laser beam to elevate the temperature thereof to more than the melting point thereof and melting same.

BRIEF DESCRIPTION OF THE DRAWINGS

Figure 1 is a characteristic diagram of a change of the reflectivity in recording and erasing.

Figure 2 is a characteristic diagram of a conventional overwrite example.

Figure 3 is a characteristic diagram of erasion in the solid phase and liquid phase.

Figure 4 is an illustrative diagram of a conventional double beam example.

Figure 5 is a diagram of a cooling curve and a

<img file="CA1332467C_D0005.tif" />

crystallization curve.

Figure 6 is a curve diagram of the recording and erasing principle.

Figures 7 and 8 are explanatory diagrams of a 5 direct current erasing principle.

Figure 9(a) and Figure 9(b) are principle diagrams of single beam overwrite.

Figures 10 to 14 are principle diagrams of single overwrite erasing.

Figures 15 to 77 are explanatory diagrams of the constitutions of optical recording media and changes of reflectivity and absorptivity depending upon the thickness of the films.

Figure 78(a) and Figure 78(b) are diagrams of recorded signal spectrum curves.

Figure 79(a) and Figure 79(b) are characteristic diagrams of spectral at an overwriting time.

Figure 80(a) and Figure 80(b) are characteristic diagrams of the results of overwrite repetition.

Figure 81(a) and Figure 81(b) are characteristic diagrams of overwrite signal wave forms.

Figure 82(a) and Figure 82(b) are spectral characteristic diagrams of in^Sb^Te₄₁. '

Figure 83 is a constitutional schematic view of an optical information recording and reproducing unit.

DETAILED DESCRIPTION OF THE INVENTION

When a film under measurement is in air, the

<img file="CA1332467C_D0006.tif" />

13324«?

following relationships are existent with regard to perpendicular energy reflectivity R, energy transmissivity T, n and k.

(n+1) + k

T = e^ax x 100 wherein a = ^π k in which λ = wavelength and x = film thickness.

The energy absorptivity A (%) is calculated by the following equation based on R, T and the law of energy conservation.

A = 100 - R - T

A, R and T have characteristics that their values can be controlled on the basis of the constitution of objective media. The refractive index and extinction coefficient are property values inherent to the objective media and uncontrollable on the basis of the constitution of the objective media.

The following explanation is concerning the mechanism of how the above solving means improve the erasion performance by acting on the process for erasing records present on an optical recording medium. In some prior art, the erasion has been already carried out by melting. At present, a recording and erasing method, which uses a plurality of beams consisting of an elliptic laser spot beam to anneal a melted recording film and a round laser spot beam to record, have achieved high erasion perform5 ance. However, the control system for the plurality of laser beams is complicated, and is an obstacle to practical use. It is a characteristic of this invention that high erasion performance is achieved by the melt-erasion using one single laser beam at recording and erasing times.

It is known that, when a recording film is melted, the rate of cooling the recording film at a temperature of not higher than its melting point kinetically determines whether the resultant phase is amorphous or crystalline both at a recording time and erasing time. Since the recording is to bring local parts of the recording film into the amorphous phase by melting, it is necessary, in recording, to prevent the formation of the crystalline phase by increasing the cooling rate at temperatures of not higher than the melting point. On the other hand, since the erasing is to bring the amorphous phase of the recorded local part back to the crystalline phase by melting, it is necessary, in erasing, to accelerate the formation of the crystalline phase by decreasing the cooling rate at temperatures of not higher than the melting point after heating once. It is therefore considered that the rate of cooling the recording film in the recording and erasing processes is a factor to control the formation of the amorphous phase or crystalline phase. Thus, if a single laser beam can

<img file="CA1332467C_D0007.tif" />

sufficiently control the cooling rate, it is possible to achieve the high sensitivity recording by the amorphous phase formation and the high erasability erasion by the crystalline phase formation. According to kinetics on the amorphous phase formation, the lowest cooling rate necessary for the amorphous phase formation, a so-called critical cooling rate, depends upon the crystallization rate of substances. The crystallization process of the amorphous phase is a process of nucleation and growth. Therefore, since the crystallization speed is determined depending upon a competition between the growth rate accelerated with an temperature elevation and the nucleation rate decelerated with the temperature elevation, the curve which indicates the crystallization time at each degree of temperatures forms a C leter-shaped curve (So called c-cure). Then, there is a temperature T_n at which the crystallization time is the shortest or the crystallization rate is the largest.

Figure 5 is a typical diagram showing the temporal change of temperature (cooling curve) of a record20 ing film when the recording film is irradiated with a laser together with the C curve. It is to be supposed here that the crystallization time at T is t . In respect of the case that the maximum attainable temperature of the recording film with laser irradiation is high and the case that said maximum attainable temperature is low, if it is further to be supposed here concerning cooling curves (Î) and (2) that the times during which the temperatures of the recording films reach T_n (times after an input of

laser irradiation) are and t^, then t£ is larger than t_n &gt; t_n). it is therefore understood that the crystallization proceeds during the cooling at a temperature of not higher than the melting point. Further, in the case of t^ &lt; t_n, since the cooling rate is larger, the film is cooled before the crystallization is sufficiently started, whereby the amorphous phase is obtained. On the basis of the foregoing, the critical cooling rate is defined to be a cooling rate at which the time during which the temperature of the recording film reaches T_nis t_n· In actual laser irradiation-applied recording and erasion, the rate of cooling the recording film is not directly controlled, but the cooling rate depends upon the stacking structure, thermal conductivities and optical properties of components and the energy density to input.

In the case of a medium structure in which the recording film is placed between dielectric films having good thermal conductivity or the recording film has a thickness o of as thin as 500 A or less, the conduction of heat generated at the recording film in the film surface direction is small, and the thermal conduction in the film thickness direction, in which direction heat resistance is small, is dominant. Under these situations, the higher the temperature of the recording film is, the larger the temperature gradient-based outflow amount of heat per a unit time is, and the cooling rate of the recording film therefore becomes large. For this reason, as the attainable temperature (determined by heat, physical

- 13 «κ·’ ·; ··» \ .-.

r :S* .!&lt;/ . ,......,,.. . . , ·.

; :.:j;· ; ίίχ : /?: .· .·? ! ·. Z ¹ . ,,....... ......... ., . ,,,.7- /./' :-:..........

property, optical absorptivity and extinction coefficient of the recording medium, constitution of the medium, input of laser power, time, etc.) of the recording film becomes high to the ability of thermal conduction in the film thickness direction, the cooling rate is large due to so-called Newton cooling. In the interest of discussion hereinbelow, a characteristic temperature, T_coQl, i.e., a temperature higher than the melting point, is introduced here. When the attainable temperature of a recording film with laser irradiation is ^TCOCQr the critical cooling rate for the amorphous phase formation (99% of an amorphous state and 1% of crystalline state) is obtained. Then, as shown in Figure 6, when the recording film reaches a temperature of not less than T_cool after melted, the amorphous phase is obtained or the recorded state is obtained. If the temperature of the cooling film is lower than T_cool, the crystalline phase or erased state is obtained. In Figure 6, T„ indicates an attainable temperature at a time of recording and Τθ indicates one at a time of erasing. The foregoing is the recording and erasing principle of this invention. The slopes of the curves show temperature elevation and cooling rates. The attainable temperature of the recording film can be controlled depending upon the sizes of laser power input and the amplitudes of laser pulse. Hence, it is fully possible to control and switch the recording and erasing on the basis of the above melting of recording films.

General optical recording media have a track portion on which to record information signals. The track in the unrecorded state is in the crystalline phase, and the signals are recorded along the track by heating the local parts on the track to a temperature of not lower than T_cooj and cooling them rapidly to form amorphous parts. The characteristic of the optical recording media of this invention is that, when some recorded signals are already existent on the track, the reflectivity of the recorded parts is larger than that of the track in the unrecorded or erased state, or the absorptivity of the recorded parts is smaller than that of the track in the unrecorded or erased state. The attainable temperatures of these parts after the parts are melted depend upon differences among these parts in the reflectivity and absorptivity. The following will explain how these differences in the optical characteristics act on the erasion of the recorded part. In the case that an optical medium is without transmissivity, an inputted laser energy other than a reflected portion is all absorbed in the medium, and the energy coefficiency is therefore the largest and a good optical recording sensitivity is obtained. Thus, this case is an optical condition most suitable for the practical use, and the following explana25 tion will use this case as a reference.

Figure 7 shows absorptivity when amorphousphase recorded parts are already existent on the track of the optical recording medium of this invention and a

<img file="CA1332467C_D0008.tif" />

temperature distribution of the track when the track is irradiated with a dc erasing laser having a constant power · In Figure 7, numeral 1 indicates a heat inflow, 2 indicates a heat outflow and 3 indicates a recorded bit.

The erasing power P^ is a power to achieve an attainable temperature, in all the parts, of not lower than T_m and not higher than ^Tcool· Figure 8 shows an absorptivity when amorphous-phase recorded parts are existent on the track of an optical recording medium having the conven10 tional optical properties and a temperature distribution of the track when the track is irradiated with a dc erasing laser having a constant power P^ . The erasing power P^ here is a power to achieve an attainable temperature, in all the parts, of not lower than T_m and not higher than T_cool· In the temperature distribution of the optical recording media of this invention, since the existing recorded parts to be erased have a smaller absorptivity, a distribution in which the attainable temperature of the recorded parts is lower than the attainable temperature of the unrecorded parts is obtained at temperatures of not lower than the melting point. In contrast thereto, in the conventional optical media, since the absorptivity of the existing recorded parts is larger, a distribution in which the attainable temperature of the recorded parts is higher than that of the unrecorded track is obtained.

In this invention, therefore, the heat flow formed on the track due to thermal conduction concentrates on the recorded part, which is to be erased, from the peripheral areas. That is, there is an effect to be heated by the heat flow from the unrecorded area in which the attainable temperature is higher than in the recorded area. Since the recorded part is gradually cooled even at a temperature of not higher than the melting point due to the higher attainable temperature area-rederived heat, crystalline nuclei occur inside the existing recorded part, and their number is large. The nuclei grow into crystals having fine particle sizes after solidification, and the existing recorded part is therefore crystallized, i.e., erased. Meanwhile, in the conventional optical recording media, the heat flow in an erasing medium is dispersed from the recorded part to be erased to unrecorded parts, and there is therefore no effect of the above gradual cooling. There is rather a tendency to cool the recorded part rapidly, and the nuclei formation at a temperature around the melting point hardly takes place. Even if the nuclei formation takes place, the nuclei occur in the unrecorded parts having a lower temperature, the number of nuclei occuring inside the existing recorded part is therefore very small, and the medium is cooled to room temperature before the crystalline growth, which occurs about the nucleus, preceeds sufficiently. It is therefore considered that the crystallized fraction of the existing recorded part is too small to achieve complete erasion, and incompletely erased portions remain to a large extent. The functional characteristic of this invention is existent in

<img file="CA1332467C_D0009.tif" />

the optical properties of the media that the medium, per se, forms that temperature distribution on the track which produces the higher attainable temperature area-rederived heat effect.

The following explanation is concerned with the function and erasability improvement of this invention in the single beam overwrite method in which the erasion is presently the most difficult. The single beam overwrite stands for a recording and erasing method in which existing recorded signals on the track are erased and new signals are also recorded on the same track by the use of one round laser spot beam. The principal difference of this method from the above-specified erasion using a direct current light is found only in the case where a new signal is overwritten on the existing recorded part or a subpart thereof, and the erasing process, per se, is essentially identical between the single beam overwrite method and the direct current-applied erasing method.

Figure 9(a) and Figure 9(b) show typical diagrams of overwrite-use laser power modulation, in which a recording power P₂ heats the recording film to a temperature of not lower than T_coolz and at an overwriting time, overlaps a¹ direct current bias power P^. The bias power has à power to melt an unrecorded part sufficiently. As shown in Figures 9(a) and 9(b), signals are overwritten by changing the pulse width tw and te. With regard to the positional relations between the existing recorded part on the overwrite track and the recording part on which to overwrite, s·'*·'

<img file="CA1332467C_D0010.tif" />

there are four cases of recording and erasing pattern.

This invention achieves high erasability at an overwriting time. Numeral 5 indicates a recorded bit, 4 indidates a crystalline phase track, 6 indicates an overwrite-recorded bit, and 7 indicates an erased bit. With regard to these four patterns, the function of this invention will be explained hereinbelow. Figure 10 shows an attainable temperature distribution on the track at an overwriting time where the existing recorded part to be erased (to be referred to as old record hereinbelow) and a new recording part (to be referred to as new recording part hereinbelow) are adjacent to each other. Figure 11 shows said distribution where the old record and new recording part are completely apart from each other. Figures 12 and 13 show said distribution where the old record and new recording part are partially overlap each other. Figure 14 shows said distribution where the old record and new recording part completely overlap each other. As shown by arrows in Figures 10 to 14, it is seen in all the cases that heat flows into the old record part from the unrecorded track part and new recording part which have higher attainable temperatures and that there is therefore a¹ higher attainable temperature area-rederived heat effect. In the case shown in Figure 12, the overlapped part has a smaller absorptivity and partially remains nonamorphous if the laser power is small. Since, however, P₂ has a degree of freedom in selection as shown in Figure 13, it is possible to select a suitable

<img file="CA1332467C_D0011.tif" />

power and overwrite without writing failure. As discussed above, in the single beam overwrite, this invention makes it possible to achieve high erasability owing to the higher attainable temperature area-rederived heat effect.

In fact, as will be demonstrated in Examples of this invention, this invention has been able to show conventionally unknown high erasing performance not only at the time of a direct current irradiation and but also at the time of single beam overwriting. In addition, it is also 10 found that this invention has like effects even when the transmissivity of optical recording media is not zero.

The following is a detailed explanation of the optical property of the optical recording media of this invention in which the reflectivity in the recorded state is rendered larger than that in the erased state or the absorptivity in the recorded state is rendered smaller than that in the erased state. The above optical property can be designed on the basis of the optical properties of a recording film, a dielectric film, a metal reflection film, etc., the thickness of each film, and the like. The constitutions of various media will be shown in Examples.

An explanation here will be given with regard to the condition Of the refractive index required to accomplish this invention. Figure 1 shows a change of reflectivity, at 10 times repetition of the static recording and erasing of an optical recording medium having a recording film (see Examples for its detailed component material) being different from conventional recording

<img file="CA1332467C_D0012.tif" />

materials, having a transmissivity of nearly zero % and having a larger refractive index in the amorphous state than in the crystalline state. This data shows a change of reflectivity of the optical recording media recited in claims 1 and 2 in the actual recorded state and erased state, and shows a relationship completely reverse to that in the change of reflectivity hitherto published.

Therefore, any recording film having at least a larger refractive index in the amorphous state than in the crystalline state produces the effects of this invention. The condition specified herein with regard to the refractive index of recording films is defined by considering the limitation of optical recording media in practical use. The limitation of optical recording media in practical use is the limitation of the practical power of a laser source to be used for recording, reproducing and erasing. In recording and erasing under this invention, the recording film is melted. Hence, it is preferable that the recording film is sufficiently melted with a power in the range of practical-use laser power,

i.e., not more than 15 mW on the surface of the film.

This purpose is achieved either by using a recording film having a low melting point or by decreasing the film thickness so as to reduce the heat capacity of the record25 ing film. The former procedure renders the recording film thermally unstable, and the crystallization temperature of the amorphous recorded part lowers together with the reduction of the melting point. Undesirably, therefore,

<img file="CA1332467C_D0013.tif" />

there is a risk that the record maintaining life is considerably shortened. The latter procedure is applicable to any recording film in the range up to the thickness of the depositable film, and is therefore preferable. In this invention, the present claims 3, 9,

15, 21, 25 and 38 specify the relationship between the refractive index and extinction coefficient of recording films, the properties of a laser power to be inputted and recording films (constant values determinable on the basis of absorptivity and melting point) and the wavelength of a laser under the conditions that the relationships of the refractive index and absorptivity of this invention can be satisfied in the range of the thicknesses of the recording films in which the recording films can be melted sufficiently at a high speed within the above limitations in practical use.

When the wavelength of a laser to be used is taken as λ, the refractive index and extinction coefficient of a recording film as n and k, and the thickness of the recording film as d, the interference of a vertically incident beam is represented by the following equation.

2-rrNd/X = m

2 wherein N = (n + k ), m is an integer of 1, 2,

3, .... When N is 4 and λ is in the vicinity of 800 nm, d

<img file="CA1332467C_D0014.tif" />

<img file="CA1332467C_D0015.tif" />

w &lt; ·.: Λ ,:'--y

Will

<img file="CA1332467C_D0016.tif" />

is about 80 nm or less at a first interference of in = 1. Hence, in this invention, the conditions of the refractive index and extinction coefficient of recording films are defined such that the reflectivity in the recorded state is larger than the reflectivity in the erased state at the first interference in not more than 80 nm at which the recording film can be sufficiently melted even in the range of practical laser powers. Even under conditions other than those of the refractive index and extinction coefficient of the recording films defined in this invention, however, some cases satisfy the relationship each of the reflectivity and absorptivity of the disk of this invention at a second interference. Since, however, the thickness of a recording film corresponding to the second interference, in a refractive index of ordinary substances (n &lt; 5), is as large as 160 nm, any existing practical-use laser power is not sufficient to melt such a recording film fully. When a practical-use larger laser power is available in the future, it will be possible to obtain the effects based on the mechanism of this invention even in the larger film thickness.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

Examples of the present invention will shown hereinbelow.

The reflectivity, transmissivity, absorptivity, refractive index and extinction coefficient were measured as follows.

<img file="CA1332467C_D0017.tif" />

1. Reflectivity, transmissivity and absorptivity

The reflectivity R (%) and transmissivity T (%) were measured by using a spectrophotometer. Samples were prepared by forming measurement-use materials having a predetermined thickness on a substrate sheet or substrate material having supporting property such as glass, or media having various structures were used as the sample.

The energy reflectivity was measured by a method in which, by directing lights having a wavelength of 830 nm, obtained through a spectroscope, into a sample at an incident angle of 5°, reflected lights were integrated by means of an integrating sphere, and directed to a light detector. The energy transmissivity was measured by a method in which, by directing into a sample vertically from the sample surface side, lights transmitting the sample were integrated by means of an integrating sphere and directed to a light detector. The energy absorptivity A (%) can be calculated by the following equation based on the above R and T and the law of energy conservation.

A = 100 - R - T

2'. Refractive index and extinction coefficient

The refractive index and extinction coefficient were calculated on the basis of a measured energy reflectivity and transmissivity by using a computer simulation based on matrix calculation of multilayer system taking into account a multiple reflection in the

<img file="CA1332467C_D0018.tif" />

'1

interface (see A. Bell, et al., IEEE, J. Quntum Electron, page 487, 1987) .

In order to ascertain the function of the recording media of this invention, 5.25 inch optical disks were prepared by the sputtering method. As a substrate, 1.2 mm in thickness quartz glass, had glass, polycarbonate (PC) resin disks and polymethylmethacryl (PMMA) resin disks were used. For a dielectric film, SiN, AIN, SiC&gt;₂, ZrO₂, ZnS, Ta₂O₅, TiN, Cr₂O₃, GeN, TiO₂, SiC, etc., were used (In this Example, the dielectric films are expressed by way of chemical formula having a chemical stoichiometric composition. However, the composition changes in actual use and it is difficult to obtain an exact composition). For a metal reflection film, chromium, Ni-20% Cr alloy and aluminum were used. Films were formed by the RF sputtering method. The sputtering conditions were that the initial degree of vacuum was 8.5 — ζ x 10 Pa; an RF output of 400 W and an Ar gas partial pressure of 1 mToor for dielectric films; an RF output of

200 W and an Ar gas partial pressure of 1 mToor for recording films; and a DC output of 200 W and an Ar gas partial pressure of 20 mToor for metal reflection films. There is ln₂₂Te₃₇Sb₄₁ (at %) as a recording material meeting claims 1, 7, 13, 19 and 25. By using this recording material, a film having the constitution of the optical recording medium of claim 5 was prepared, and the optical properties of the film were examined. In addition, this recording film composition has a refractive

- 25 1332467 index n of 4.952 and an extinction coefficient k of 0.857 in the amorphous state, and a refractive index n of 4.678 and an extinction coefficient k of 1.743 in the crystalline state. That is, it is a characteristic of this invention that the refractive index is larger in the amorphous state than in the crystalline state. Table 1 summarizes the refractive indices n and extinction coefficients k of the compositions discussed in the section of prior art in the present specification. In any of the compositions, the refractive index is smaller in the amorphous state than in the crystalline state, which relationship is reverse to that of this invention.

Figure 15 shows an optical recording medium having a film constitution of substrate/recording film/dielectric, in which a recording film 9 was deposited up to a maximum thickness of 200 nm on a 1.2 mm glass substrate 8, and SiO₂ for a dielectric film 10 was deposited in the film thickness of 70 nm. A laser beam 11 was directed from the substrate side.

Figure 16(a) shows the optical properties of the above optical recording medium, in which its reflectivities in the recorded state (amorphous) and in the erased state (crystalline) are shown.

Figure 16(b) shows the absorptivities. The thicknesses of the recording film in which the reflectivity difference can be substantially detected are up to about 40 nm and between 90 nm and 130 nm, and the reflectivity is higher in the amorphous state than in the

<img file="CA1332467C_D0019.tif" />

crystalline state and meets claim 1. And the absorptivities in all the range of thickness of 200 nm are higher in the crystalline state than in the amorphous state, and meet claim 13. Therefore, the thickness of the recording film can be selected from the above-specified range. However, if the film thickness increases, the heat capacity increases, the recording and erasing sensitivities with laser irradiation become poor, and a high-input laser is therefore necessary.

Figure 17 shows a film constitution of glass substrate/recording film/metal reflection film, in which the thickness of the metal reflection film 12 was constant or 100 nm, and the thickness of the recording film 9 was changed up to the maximum of 200 nm. Figure 18(a) shows a case where gold was used for the metal reflection film 12, and the resultant medium meets the present claim 1 with regard to the change of reflectivity in the amorphous state and crystalline state. The thickness of the recording film in which the reflectivity difference can be substantially detected is in the range of between 30 nm and 90 nm and between 130 nm and 170 nm. As shown in Figure 18(b), the absorptivity difference can be substantially detected when the thickness of the recording film is between about 30 nm and 80 nm and between about

130 nm and 160 nm, and the absorptivities meet claim 13.

Figure 19(a) and Figure 19(b) show cases where chromium was used for the metal reflection film 12. Concerning the reflectivities meeting the present claim 1, the

- 27 w . JVM reflectivity difference can be substantially detected when the film thickness is in the range of between about 40 nm and 80 nm and between 140 nm and 155 nm. Concerning the absorptivities, as shown in Figure 19, the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 40 nm and 80 nm, and about 150 nm, and the absorptivities meet claim 13. Figure 20 (a) and Figure 20(b) show cases where aluminum was used for the metal reflection film 12.

Concerning the reflectivities meeting the present claim 1, the reflectivity difference can be substantially detected when the thickness of the recording film 9 is between about 40 nm and 90 nm and between about 130 nm and 160 nm. As shown in Figure 20(b), the absorptivity difference can be substantially detected when the thickness of the recording film is between about 40 nm and 80 nm, and about 154 nm, and the absorptivities meet the present claim 13. Figure 21(a) and Figure 21(b) show cases where Ni-20C_R(wt. %) was used for the metal reflection film 12.

Conceerning the reflectivities meeting claim 1, the reflectivity difference can be substantially detected when the thickness of the recording film 9 is between about 50 nm and 80 nm. As shown in Figure 21(b), the absorptivity difference can be substantially detected in the range of between about 50 nm and 80 nm, and the absorptivities meet the present claim 13.

Figure 22 shows a film constitution of PC substrate/recording film/metal reflection film/dielectric

<img file="CA1332467C_D0020.tif" />

film, in which gold having a thickness of 100 nm was used for the metal reflection film 12, SiN having a thickness of 80 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 23(a) shows changes of the reflectivities in the amorphous state and the crystalline state. The thickness of the recording film meeting the present claim is between about 30 nm and 90 nm and between about 30 nm 10 and 160 nm, in which ranges the reflection difference can be substantially detected. As shown in Figure 23(b), the absorptivity difference can be substantially detected when the thickness of the recording film is between about 30 nm and 80 nm and between 130 nm and 160 nm, and the absorptivities meet the present claim 13.

Figure 24(a) and Figure 24(b) show a case of a film constitution of PMMA substrate/recording film/metal reflection film/dielectric film, in which chromium having a thickness of 100 nm was used for the metal reflection film 12, SiN having a thickness of 80 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 24(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 40 nm and 80 nm and between about 130 nm and 170 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the

<img file="CA1332467C_D0021.tif" />

absorptivity, as shown in Figure 24(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 40 nm and 80 nm and in the vicinity of about 150 nm, and the absorptivities meet the present claim 13.

Figure 25(a) and Figure 25(b) show a case of a film constitution of PMMA substrate/recording film/metal reflection film/dielectric film, in which aluminum having a thickness of 100 nm was used for the metal reflection 10 film 12, SiN having a thickness of 80 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 25(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 40 nm and 90 nm and in the vicinity of about 150 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 25(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 40 nm and 90 nm and in the vicinity of about 150 nm, and the absorptivities meet the present claim 13.

Figure 26 shows a film constitution of glass substrate/recording film/dielectric film/metal reflection film, in which gold having a thickness of 60 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the

<img file="CA1332467C_D0022.tif" />

Hz thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 27(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 65 nm and between about 105 and 140 nm. in these thickness, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 27(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 60 nm and between about 100 nm and 140 nm, and the absorptivities meet the present claim 13.

Figure 28 shows a film constitution of glass substrate/recording film/dielectric film/metal reflection film/dielectric film, in which gold having a thickness of 60 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 29(a) shows changes of the reflectivities in the amorphous state and crystalline state. The ' t i thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 60 nm and between about

100 and 140 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 29(b), the absorptivity difference can be substantially detected when the

<img file="CA1332467C_D0023.tif" />

thickness of the recording film 9 is between about 10 nm and 70 nm and between about 100 nm and 140 nm, and the absorptivities meet the present claim 13.

Figure 30 shows a film constitution of PC substrate/dielectric film/recording film/dielectric film, in which AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 31(a) shows changes of the reflectivities 10 in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 30 nm and between about

100 and 120 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 31(b), the absorptivity difference can be substantially detected in all the range of thickness of the recording film 9, and the absorptivities meet the present claim 13.

Figure 32 shows a film constitution of PMMA substrate/dielectric film/recording film/metal reflection film, in which aluminum having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 33(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present

<img file="CA1332467C_D0024.tif" />

χ·“·\ claim 1 is between about 20 nm and 80 nm and between about 130 and 160 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 33(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 20 nm and 80 nm and between about 130 nm and 160 nm, and the absorptivities meet the present claim 13.

Figure 34(a) and Figure 34(b) show a case of a 10 film constitution of PC substrate/dielectric film/ recording film/metal reflection film, in.which gold having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 34(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 80 nm and between about

120 nm and 160 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 34(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 80 nm and between about 120 nm and 160 nm, and the absorptivities meet the present claim 13.

Figure 35 shows a film constitution of glass substrate/dielectric film/recording film/metal reflection

<img file="CA1332467C_D0025.tif" />

film/dielectric film, in which gold having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 36(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 80 nm and between about

120 and 160 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 36(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 80 nm and between about 120 nm and 160 nm, and the absorptivities meet the present claim 13.

Figure 37(a) and Figure 37(b) show a case of a film constitution of PC substrate/dielectric film/ recording film/metal reflection film/dielectric film, in which aluminum having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of

200 nm.

Figure 37(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 20 nm and 80 nm and between about «tsCX?:;;’:

I

130 and 160 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 37(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 20 nm and 85 nm and between about 130 nm and 160 nm, and the absorptivities meet the present claim 13.

Figure 38 shows a film constitution of PC substrate/dielectric film/recording film/dielectric film/metal reflection film, in which gold having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 39(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 70 nm and between about 90 and 150 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 39(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 90 nm and 150 nm, and the absorptivities meet the present claim 13.

Figure 40(a) and Figure 40(b) show a case of a film constitution of glass substrate/dielectric film/ recording film/dielectric film/metal reflection film, in

<img file="CA1332467C_D0026.tif" />

which aluminum having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of

200 nm.

Figure 40(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 70 nm and between about

90 and 150 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 40(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 70 nm and 150 nm, and the absorptivities meet the present claim 13.

Figure 41 shows a film constitution of PC substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film, in which gold having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 42(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 70 nm and between about and 150 nm. In these thicknesses, the reflection

<img file="CA1332467C_D0027.tif" />

difference can be substantially detected. Concerning the absorptivity, as shown in Figure 42(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 90 nm and 150 nm, and the absorptivities meet the present claim 13.

Figure 43(a) and Figure 43(b) show a case of a film constitution of PC substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film, in which aluminum having a thickness of 70 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 43(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 70 nm and between about 90 and 150 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 43(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 70 nm and 150 nm and the absorptivities meet the present claim 13.

Figure 44 shows a film constitution of glass substrate/recording film/glass substrate, in which the thickness of the recording film 9 was changed up to the

<img file="CA1332467C_D0028.tif" />

XXiJX χΧχ:-’Χ X·''-Π · /.:'Λ --: ' X··' Χΐ.'·Χ.: --,// . X^? -- ./-X:/ΧχΧ '' //X X /Λ ΧΧρΧΧ«ΧΧ&lt;_;,Χ· Χ· X.' ; 'χ'χΧ/Χχχ.Χ-/'- Χ/ΧΧ/:;:· X XX -λ- χ -λ ·χ·-·:·_: -λ'··: X'''-'-.:

Λί

- XX X 'X Χ&lt;./ maximum of 200 ηπ.

Figure 45(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 60 nm and between about 100 and 150 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 45(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 170 nm and between about 180 nm and 200 nm, and the absorptivities meet the present claim 13.

Figure 46 shows a film constitution of glass substrate/recording film/metal reflection film/glass substrate, in which gold having a thickness of 100 nm was used for the metal reflection film 12 and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 47(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 30 nm and 90 nm and between about

140 and 170 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 47(b), the absorptivity 25 difference can be substantially detected when the thickness of the recording film 9 is between about 30 nm and 90 nm and between about 130 nm and 160 nm, and absorptivities meet claim 13.

- 38 the

<img file="CA1332467C_D0029.tif" />

Figure 48 shows a film constitution of PC substrate/SiN/recording film/Au/PC substrate, in which a gold having a thickness of 100 nm was used for the metal reflection film 12, SiN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 49(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 80 nm and between about 120 and 160 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 49(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 80 nm and between about 120 nm and 160 nm, and the absorptivities meet the present claim 13.

Figure 50 shows a film constitution of PC substrate/SiN/recording film/Au/SiN/PC substrate, in which gold having a thickness of 100 nm was used for the metal reflection film 12, SiN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 51(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 80 nm and between about

120 and 160 nm. In these thicknesses, the reflection

<img file="CA1332467C_D0030.tif" />

difference can be substantially detected. Concerning the absorptivity, as shown in Figure 51(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 80 nm and between about 120 nm and 160 nm, and the absorptivities meet the present claim 13.

Figure 52 shows a film constitution of glass substrate/SiN/recording film/glass substrate, in which,

SiN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 53(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 60 nm and between about

100 and 140 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 53(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 200 nm, and the absorptivities meet the present claim

13.

Figure 54 shows a film constitution of PC substrate/SiN/recording film/SiN/PC substrate, in which

SiN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up the maximum of 200 nm.

- 40 40

<img file="CA1332467C_D0031.tif" />

Figure 55(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 50 nm and between about

80 and 140 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 55(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 200 nm, and the absorptivities meet the present claim

13.

Figure 56 shows a film constitution of glass substrate/SiN/recording film/Au/glass substrate, in which gold having a thickness of 100 nm was used for the metal reflection film 12, SiN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200nm.

Figure 57(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 80 nm and between about

120 and 160 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 57(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 80 nm and between about 120 nm and 160 nm, and the absorptivities meet the present claim 13.

<img file="CA1332467C_D0032.tif" />

Figure 58 shows a film constitution of PMMA substrate/SiN/recording film/Au/SiN/PMMA substrate, in which gold having a thickness of 100 nm was used for the metal reflection film 12, SiN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 59(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 90 nm and between about 120 and 160 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 59(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 80 nm and between about 120 nm and 160 nm, and the absorptivities meet the present claim 13.

Figure 60 shows a film constitution of PC substrate/AlN/recording film/AlN/Au/PC substrate, in which gold having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, ahd the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 61(a) shows changes of the reflectivities in the amorphous state and the crystalline state. The thickness of the recording film meeting the present claim is between about 10 nm and 70 nm and between about 90 nm and 140 nm, in which ranges the reflection difference can be substantially detected. As shown in Figure 61(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 90 nm and 150 nm, and the absorptivities meet the present claim 13.

Figure 62(a) and Figure 62(b) show a case of a film constitution of glass substrate/AlN/recording film/AlN/Ni-20 Cr/glass substrate, in which gold having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 62(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 70 nm and between about 90 nm and 150 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 62(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 90 nm and 150 nm, and the absorptivities meet the present claim 13.

Figure 63(a) and Figure 63(b) show a case of a film constitution of glass substrate/AlN/recording film/Al/glass substrate, in which A1 having a thickness of 100 nm was used for the metal reflection film 12, AIN

<img file="CA1332467C_D0033.tif" />

having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 63(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 70 nm and between about 90 nm and 140 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 63(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 90 nm and 150 nm, and the absorptivities meet the present claim 13.

Figure 64 shows a film constitution of PC substrate/AlN/recording film/AlN/Au/AlN/PC substrate, in which Au having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 65(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 60 nm and between about 90 nm and 140 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 65(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 100 nm and 140 nm, and the absorptivities meet the present claim 13.

Figure 66(a) and Figure 66(b) show a case of a film constitution of glass substrate/AlN/recording film/AlN/Cr/AlN/glass substrate, in which Cr having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 66(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 70 nm and between about nm and 150 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 66(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 90 nm and 140 nm, and the absorptivities meet the present claim 13.

* Figure 67(a) and Figure 67(b) show a case of a film constitution of glass substrate/AlN/recording film/AlN/Al/AlN/glass substrate, in which Al having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording •Ai

...... ............... - .............' ' .•••.'‘'•-•λ'-:·,··:· · =.:· ·· /7·\ film 9 was changed up to the maximum of 200 nm.

Figure 67(a) shows changes of the reflectives in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 70 nm and between about 100 nm and 140 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 67(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 70 nm and between about 100 nm and 140 nm, and the absorptivities meet the present claim 13.

Figure 68(a) and Figure 68(b) show a case of a film constitution of PC substrate/AlN/recording film/AlN/Ni-20 Cr/AlN/PC substrate, in which Ni-20 Cr having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used for the dielectric film 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 68(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 60 nm and between about 100 nm and 140 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 68(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm

<img file="CA1332467C_D0034.tif" />

/—-S and 70 nm and between about 100 nm and 140 nm, and the absorptivities meet the present claim 13.

Figure 69 shows a film constitution of glass substrate/recording film/Au/glass substrate, in which gold having a thickness of 10 nm was used for the metal reflection film 12 and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 70(a) shows changes of the reflectivities in the amorphous state and crystalline state. The thickness of the recording film 9 meeting the present claim 1 is between about 20 nm and 70 nm and between about 120 nm and 150 nm. In these thicknesses, the reflection difference can be substantially detected. Concerning the absorptivity, as shown in Figure 70(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 160 nm, and the absorptivities meet the present claim

13.

Figure 71(a) and Figure 71(b) show the reflec20 tivity and absorptivity of a film using Ιη22θ^2γΤβ^^ (at %) of this invention and having a film constitution of glass substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film when the ' dielectric film 10 positioned as a fourth layer from the glass substrate was changed up to 200 nm. Gold having a thickness of 100 nm was used for the metal reflection film 12, and SiO₂ having a thickness of 70 nm was used as the ΐ;

.*****\ other dielectric films 10.

Figure 71(a) shows changes of the reflectivities in the amorphous state and crystalline state, and the reflection difference can be substantially detected in all the range of the thickness of the dielectric film 10 meeting the present claim 1. Further, concerning the absorptivity, as shown in Figure 71(b), the absorptivity difference can be substantially detected in all the range of the thickness of the dielectric film 10 as well. The 10 absorptivities meet the present claim 13.

Figure 72(a) and Figure 72(b) show the reflectivity and absorptivity of a film using In^Sb^Te^ (at %) of this invention and having a film constitution of glass substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film when the dielectric film 10 positioned as a second layer from the glass substrate was changed up to 200 nm. Gold having a thickness of 100 nm was used for the metal reflection film

12, and AIN having a thickness of 70 nm was used as the other dielectric films 10.

Figure 72(a) shows changes of the reflectivities in the amorphous state and crystalline state, and the reflection difference can be substantially detected in all the range of the thickness of the dielectric film 10 meeting the present claim 1. Further, concerning the absorptivity, as shown in Figure 72(b), the absorptivity difference can be substantially detected in all the range

<img file="CA1332467C_D0035.tif" />

of the thickness of the dielectric film 10 as well. The absorptivities meet the present claim 13.

Figure 73(a) and Figure 73(b) show a case where Se₅₂Ge₂₇Sn₂₁ (at %) was used as a recording material meeting the present claims 1, 7, 13 and 19. The film constitution was PMMA substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film, Gold having a thickness of 100 nm was used for the metal reflection film 12, ZrC&gt;₂ having a thickness of 70 nm was used as the dielectric films 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 73(a) shows changes of the reflectivities in the amorphous state and crystalline state, and the reflection difference can be substantially detected when the thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 80 nm and between about 100 nm and 180 nm. Further, concerning the absorptivity, as shown in Figure 73(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 80 nm and between about 100 nm and 180 nm. The absorptivities meet the present claim 13.

Figure 74(a) and Figure 74(b) show a case where

Sbj-gSe^gZn^ (at %) was used as a recording material meeting the present claims 1, 7, 13 and 19. The film constitution was PC substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film, Gold having a thickness of 100 nm was used for the metal reflection film 12, ZrO₂ having a thickness of 70 nm was used as the dielectric films 10, and the thickness of the recording film 9 was changed up to the maximum of

200 nm.

Figure 74(a) shows changes of the reflectivities in the amorphous state and crystalline state, and the reflection difference can be substantially detected when the thickness of the recording film 9 meeting the present claim 1 is between about 10 nm and 80 nm and between about 110 nm and 120 nm. Further, concerning the absorptivity, as shown in Figure 74(b), the absorptivity difference can be substantially detected when the thickness of the recording film 9 is between about 10 nm and 80 nm and between about 100 nm and 180 nm. The absorptivities meet the present claim 13.

Figure 75(a) and Figure 75(b) show a case where Sb₃₄Se₅gSn_g (at %) was used as a recording material meeting the present claims 1, 7, 13 and 19. The film constitution was PC substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film, Gold having a thickness of 100 nm was used for the metal reflection film 12, AlN having a thickness of 70 nm was used as the dielectric films 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

<img file="CA1332467C_D0036.tif" />

Figure 75(a) shows changes of the reflectivities in the amorphous state and crystalline state, and the reflection difference can be substantially detected in all the range of the thickness of the recording film 9 meeting the present claim 1. Further, concerning the absorptivity, as shown in Figure 75(b), the absorptivity difference can be substantially detected in all the range of the thickness of the recording film 9 as well. The absorptivities meet the present claim 13.

Figure 76(a) and Figure 76(b) show a case where

Sbg₄Se₂ç)Zn₂₇ (at %) was used as a recording material meeting the present claims 1, 7, 13 and 19. The film constitution was PMMA substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film, gold having a thickness of 100 nm was used for the metal reflection film 12, SiN having a thickness of 70 nm was used as the dielectric films 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 76(a) shows changes of the reflectivities in the amorphous state and crystalline state, and the reflection difference can be substantially detected in all the range of the thickness of the recording film 9 meeting the present claim 1. Further, concerning the absorp25 tivity, as shown in Figure 76(b), the absorptivity difference can be substantially detected in all the range of the thickness of the recording film 9 as well. The absorptivities meet the present claim 13.

Figure 77(a) and Figure 77(b) show a case where

Te₆₄Sb_gSn₃₀ (at %) was used as a recording material meeting the present claims 1, 7, 13 and 19. The film constitution was PMMA substrate/dielectric film/recording film/dielectric film/metal reflection film/dielectric film, Gold having a thickness of 100 nm was used for the metal reflection film 12, AIN having a thickness of 70 nm was used as the dielectric films 10, and the thickness of the recording film 9 was changed up to the maximum of 200 nm.

Figure 77(a) shows changes of the reflectivities in the amorphous state and crystalline state, and the reflection difference can be substantially detected in all the range of the thickness of the recording film 9 meeting the present claim 1. Further, concerning the absorptivity, as shown in Figure 77(b), the absorptivity difference can be substantially detected in all the range of the thickness of the recording film 9 as well. The absorptivities meet the present claim 13.

Figure 78(a) and Figure 78(b) show an embodiment of recording and erasing with regard to rewritable disks using optical recording media recited in the present claims 7, 13, 19 and 35. The disks were prepared according to a high frequency sputtering method which comprises depositing 70 nm to 80 nm thick AIN for an optical interference film on 5.25 inch glass substrates having a laser guide groove for laser beam tracking of the continuous-servo tracking technique, 30 nm to 50

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llïi 1 /·&gt;“*% nm thick Ιι-^θ^γΐβ^ for a recording film thereon, to 80 nm thick AIN thereon, 100 nm thick Au for an optical reflection film thereon, and 100 nm thick AIN for a protective film thereon. These disks were turned at a 1,800 to 2,400 rounds/minute and irradiated with a direct current laser having a power, on the film surface, of 15 mW to reduce the reflectivity from about 50% to about 20%, whereby a recording track portion was formed. At first, a recording was carried out by the irradiation on the above track with a 13 mW laser pulse modulated to a frequency of 2 MHz, when the ratio of the 2 MHz carrier signal strength to the noise strength (C/N) was 50 dB on a spectrum analyzer shown in Figure 78(a). Then, the above recorded track was irradiated with a direct current beam having the same power of 13 mW as that in the recording, to show that the recorded signal was erased down to 5 dB on a spectrum analyzer shown in Figure 78(b). In this erasion, the erasability is -45 dB, which is above the practical-use level although the irradiation power was the same. As stated above, it has been demonstrated that this invention gives high erasing performance even in a recording and erasing method unthinkable with regard to conventional optical recording media. Further, even when resin substrates such as PMMA, PC, etc., were used, the results were exactly identical to the above embodiment. Furthermore, even when substrates of another tracking system, sampled-servo system, were used, the obtained results were exactly identical as the above embodiment.

Figure 79(a) and Figure 79(b) show an embodiment of the single beam overwrite with regard to rewritable optical disks using the optical recording medium of this invention. The disk constitution was the same as that of the above embodiment. Figure 79(a) shows a power modulation mode of a round laser spot beam (spot diameter: about

1.5 pm) used for the overwriting. As a recording power P^ which can heat a recording film to a temperature of not less than Τθ_οο^ ^{an&lt;3 as a} bias power P£ which can heat the recording film to a temperature of between not less than the melting point and not more than Τθθθ^, the ratios of ^{= 12,5} mW/9.5 mW and 16 mW/12mW were selected. The disks were turned at 1,800 to 2,400 rounds/minute, and continuously irradiated with a 15 mW direct current beam to reduce the disk reflectivity from about 50% to about 20%, whereby recording track portion was formed. Then, sine wave signals having a modulated frequency of 2 MHz were recorded by irradiation of a laser having the above power, and thereafter, 3 MHz sine wave signals were recorded by overwriting the 2 MHz signals.

As shown in Figure 79(a) and Figure 79(b), the spectrum analyzer showed that the 2 MHz signals recorded in a c/N equivalent to 50 dB were erased to an equivalence of 2 dB by the overwrite-recorded 3 MHz signals, and at the same time it was shown that the 3 MHz signals were overwriterecorded in a C/N equivalent to 50 dB. In a process reverse thereto, similar results were obtained. It has been demonstrated that this invention can give erasing

<img file="CA1332467C_D0037.tif" />

<img file="CA1332467C_D0038.tif" />

<img file="CA1332467C_D0039.tif" />

performance in the single beam overwrite, found in no prior art, that the erasability is -45 dB or more.

Further, the number of repeatable times for the above overwrite was examined. As shown in Figure 80(a) and

Figure 80(b), the overwrite of 2 MHz and 3 MHz sine wave signals with both of the laser powers could be repeated more than 10⁵ times while the erasability was -35 dB or more.

Figure 81(a) and Figure 81(b) show 2 MHz sine 10 wave signals on an oscilloscope screen. Any deformation of waveforms and change of frequency due to incomplete erasion wave recognized in any of the signals, and the signals were completely erased in both the cases. It has been demonstrated that the optical recording media of this invention make it possible to perform the single beam overwrite free from incomplete erasion even with a practical-use laser power of 15 mW or less. And when resin substrates such as PMMA, PC, etc., were used as the substrate, it was also possible to obtain results identical with those of the above embodiment. Further, in the case of using disks according to another tracking system, sampled-servo tracking technique, the optical recording media of this invention were also able to give the same results as those of the above embodiment.

The recording films described in Table 2 constitute the optical recording media which have a larger reflectivity, n, in the amorphous state than in the crystalline state and actually satisfy the present claims

<img file="CA1332467C_D0040.tif" />

1, 7, 13 and 19, and the changes therein are different from those in the conventional materials described in Table 1. As specified in the present claims 26 and 27, the recording films comprises a compound of simple substances of elements such as antimony, zinc, tin, germanium, etc., with of selenium, tellurium, etc. As the simple substance of elements, indium, lead, silver, copper, gold, etc., are also effective to control the refractive index of the recording film.

<img file="CA1332467C_D0041.tif" />

TAB LE 2

<td> Recording film</td><td colspan="2"> Amorphous state</td><td colspan="2"> Crystalline state</td>

<td> Composition (at %)</td><td> n</td><td> k</td><td> n</td><td> k</td>

<td>^In22^Sb33^Te45</td><td> 4.952</td><td> 0.857</td><td> 4.678</td><td> 1.743</td>

<td>^In22^Sb37^T®41</td><td> 4.968</td><td> 0.882</td><td> 4.590</td><td> 1.688</td>

<td>^In20^Sb37^Te43</td><td> 4.952</td><td> 0.861</td><td> 4.621</td><td> 1.752</td>

<td>^In32^Sb40^Te28</td><td> 3.045</td><td> 0.657</td><td> 2.801</td><td> 1.452</td>

<td>^Sb56^Se40^Zn4</td><td> 4.234</td><td> 0.694</td><td> 3.029</td><td> 1.414</td>

<td>^Sb44^Se29^Zn27</td><td> 3.492</td><td> 0.125</td><td> 3.014</td><td> 0.892</td>

<td>^Sb34^Se58^Sn8</td><td> 5.068</td><td> 0.070</td><td> 4.638</td><td> 0.352</td>

<td>^Se52^Ge27^Sn21</td><td> 3.761</td><td> 0.282</td><td> 3.619</td><td> 0.329</td>

<td>^Te64^Sb6^Sn30</td><td> 3.147</td><td> 0.163</td><td> 2.424</td><td> 0.359</td>

<td>^Se66^Sb24^Sa10</td><td> 4.240</td><td> 0.070</td><td> 3.216</td><td> 0.487</td>

Table 3 shows the recordability and erasability of optical disks having the recording films described in Table 2. The disks were prepared according to the high frequency sputtering method which comprises depositing 70 nm to 80 nm thick AIN, for an optical interference film, on a 5.25 inch glass substrate having a laser guide groove for laser beam tracking of continuous servo technique, 330 nm to 50 nm thick recording material selected from the recording films described in Table 2 thereon, 100 nm thick Au for an optical reflection film thereon and 100 nm thick AIN for a protective film thereon. The recording power and erasing power were 15 mW or less. All the resultant optical disks gave a C/N of about 50 dB and were of high sensitivity, and further, these optical disks were able to give a high erasability of -35 dB or more in both the direct current and overwrite erasing methods.

- 58 &lt;.

’· R - '

<img file="CA1332467C_D0042.tif" />

X

TABLE

<td> Number of overwrite repetition</td><td> 2/3 MHz</td><td></td><td colspan="2"> m o 1-1 Λ</td><td> co o ί-1 Λ</td><td> Tp O i—1 ?</td><td> TP o i-H ?</td><td> TP o i“1 ?</td><td> in o i-H ?</td><td> vlOO</td><td> TP o r-H A</td>

<td rowspan="2"> Single beam overwrite, erasability</td><td> N S3 s CO</td><td> CO Tp 1</td><td> CO τρ 1</td><td> in τρ 1</td><td> CM τρ 1</td><td> CO co</td><td> CM TP 1</td><td> o TP 1</td><td> CM TP 1</td><td> CM τρ »</td><td> tn TP 1</td>

<td> EM S3 S CM</td><td> CT» τΡ 1</td><td> in *3* 1</td><td> in TP 1</td><td> o tP ί</td><td> in co 1</td><td> o TP 1</td><td> σ\ co 1</td><td> o TP 1</td><td> r—| Tp 1</td><td> o Tp 1</td>

<td rowspan="2"> Single beam overwrite C/N</td><td> EM S3 S co</td><td> in in</td><td> CM in</td><td> co in</td><td> Ch TP</td><td> CM TP</td><td> CO TP</td><td> CM in</td><td> o in</td><td> CO TP</td><td> o in</td>

<td> N S3 SB CM</td><td> co in</td><td> o m</td><td> o in</td><td> co TP</td><td> o Tp</td><td> in TP</td><td> o in</td><td> τρ</td><td> co Tp</td><td> Tp</td>

<td> dc erasibility i</td><td> CQ Ό</td><td> 00 tp 1</td><td> in TP I</td><td> co τρ 1</td><td> uo γ</td><td> O TP 1</td><td> tn TP 1</td><td> in TP j</td><td> o TP 1</td><td> co co</td><td> in Tp 1</td>

<td> C/N</td><td> CQ Ό</td><td> in in</td><td> CM in</td><td> in in</td><td> O in</td><td> m TP</td><td> CO TP</td><td> o in</td><td> o n</td><td> in τρ</td><td> in in</td>

<td> Recording film</td><td> dP 4M fO</td><td> in τρ Φ EH co co XI co CM CM c n</td><td> rH τρ Φ Eh Γ- ΟΟ n co CM CM £ n</td><td> co TP Φ Γ- ΟΟ x&gt; co o CM £ HH</td><td> co CM Φ Eh o TP JQ CO CM CO £ n</td><td> TP £ to o TP Φ CO m in n co</td><td> r- CM £ CM CM Φ CO TP TP n co</td><td> co C co CO in Φ CO TP co n co</td><td> «Ή CM £ CO r— CM Φ O CM in Φ co</td><td> , o ΓΟ c « VO -Ω ω &lt;* vo φ Ε-ι</td><td> o i”H Φ o TP CM X3 CO in in Φ co</td>

- 59 /-—«s

The discussion above has all demonstrated the effectiveness of the optical recording media of this invention when a laser diode is used for recording, reproducing and erasing in said media. The limitation of the wavelength of a laser in use, specified in the present claims 38, is concerned with only the use of the laser diode as a light source. As shown in Figure 82(a) and Figure 82(b), in the case of optical recording media having an ln₂₂Sb_3?Te₄₁ recording film, their reflectivity in the amorphous state is larger than that in the crystalline state while the wavelength is between 300 nm and 1,500 nm, and at the same time, their absorptivity in the amorphous state is smaller than that in the crystalline state. Thus, these media satisfy the present claims 1, 7,

13 and 19. In fact, when an argon ion laser having a wavelength of 500 nm was used for the recording and erasing in the optical recording media, the recording media gave high-sensitivity recording and high erasability, and there is no special limitation to be imposed on the wavelength for use.

The effectiveness of this invention has been demonstrated above. Further, the following embodiment will demonstrate a cross-talk-reduction effect obtainable only by using the optical recording media of this invention. In optical recording media satisfying the reflectivity and absorptivity in the as-deposited state and the reflectivity and absorptivity in the recorded and erased states, described in the present claims 7 and 13, a

<img file="CA1332467C_D0043.tif" />

' Λ/:// / ΐ.· · . .

·/-/ ./ -y/i //, :/ -: :.////--//-^/.:.,//- ./ :.://-'/.y/ -: :/,///: --'y'./:·' /·“***, track having a lower reflectivity (often equivalent to the reflectivity in the erased state) than that in the as-deposited state is first formed, and signals are recorded on the track. Then, on the media, there are two separate portions of which both the reflectivity and absorptivity are different, one portion is the track portion having a lower reflectivity (or a higher absorptivity), and the other portion (outside the track and corresponding to a groove of a disk for the continuous servo technique) is that which has a higher reflectivity (or a lower absorptivity) and remains in the as-deposited state. Meanwhile, when signals are optically recorded, it is preferable to minimize the intertrack distance as much as possible for high-density recording. However, if the intertrack distance is minimized extremely, a cross-talk phenomenon takes place in which the recorded signals are overlapping an adjacent track, and the cross-talk causes a noise. Practically, therefore, the cross-talk increase in the minimizing of the intertrack distance determines the recording density on the optical recording media. In the optical recording media of this invention, the outsidethe-track portion having a smaller reflectivity and being in the as-deposited state is positioned in contact with the track portion. The outside-the-track portion is less influenced thermally by a laser power used for the recording and erasing on the track portion, since its attainable temperature is low. The cross-talk to an adjacent track is reduced especially by this thermal block. in the optical recording media of this invention, it has been found that when the intertrack distance is 0.5 ym, the cross-talk is as small as -40 dB or less, which value is very small as compared with conventional ones.

In the conventional optical recording media, the relationship in the reflectivities or absorptivities is reverse to that in this invention, and the outside-the-track portion is therefore likely to be thermally influenced. The above effect can be produced only by the optical recording media of this invention, and it is made possible to perform the recording in an unconventionally higher density.

Figure 83 is a block diagram of a unit showing a process for optical information recording and reproducing as one embodiment of this invention.

The unit comprises an optical pickup 13, an optical pickup position control circuit 14, a received signal processing circuit 15, a laser diode actuating circuit 16, a disk-turning motor 17, a turn table 18, an optical disk 19 with a tracking guide, a melting point discrimination processing portion 20 for the recording film of an optical disk, a system control circuit 21, and a set of external input-output terminals 22.

The optical disk has a constitution in which a 70 nm thick AIN film is sputtering-formed on a glass substrate, a 50 nm thin film of In-Sb-Te type as a recording film is sputtering-formed thereon, a 70 nm thick AIN film is again sputtering-formed thereon, a 100 nm thick Au film is further sputtering-formed thereon, a 100 nm thick AIN film as a protective film is formed thereon, and a 10 pm thick UV-hardening resin film as a protective film is finally spin-coated thereon.

The above optical disk 19 is placed on the turn table 18, and the motor 17 turns the turn table 18 to turn the optical disk 19. The turning is switched on or off through the external input-output terminals 21 via the system control circuit 21.

The optical disk 19 is irradiated with a laser 10 beam 23 from the optical pickup 13. A reflected beam portion of the laser beam 23 returns to the optical_:pick up 13 to extract an optical pickup height signal and deflection signal on the track through the received signal processing circuit 15. With these signals, the optical pickup position control circuit 14 controls the focusing and tracking of the optical pickup 13 on the disk 19. The focusing and tracking are switched on or off through the external input-output terminals 22 via the system control circuit 21.

Further, the optical pickup 13 has a constitution such that the system control circuit 21 sets a laser irradiation power as required in keeping with the passage of time through the laser diode actuating circuit 16 whereby the overwrite is possible by using one beam.

A laser irradiation power necessary to heat the optical disk 19 to a temperature of its melting point or more is written in a control track provided in the inner or outer circumference of the optical disk 19, and at the /S, time of overwriting, the melting point discrimination processing portion 20 sets the recording point irradiation power and erasing point irradiation power at a power necessary to heat to the melting point or more.

The melting point discrimination processing portion 20 can read the above written data to overwrite at a temperature of the melting point or more, or a power P_M for heating to the melting point may be determined on the basis of reflectivity changes obtained while effecting a laser irradiation by using a dummy track as follows.

By the functions of this invention in a higher attainable temperature area-rederived effect, an effect on promotion of crystal nuclei growth, cross-talk reducing effect, etc., in a process of erasing the recorded parts of the recording film of the optical recording medium which has a larger reflectivity in the recorded state than in the erased state or a smaller absorptivity in the recorded state than in the erased state, this invention provides recording media having high erasing performance and high density redordability which the conventional ones do not have and information recording and reproducing units.

' ' In addition, the foregoing discussion all relates to a type of recording media for recording in the amorphous state and erasing in the crystalline state. However, the same concept as that of the above type is also applicable to the reverse type for recording in the crystalline state and erasing in the amorphous type.

ο !

Thus, this invention is applicable to both of these two types .

<img file="CA1332467C_D0044.tif" />