Nova Patents
AU3652502A

Volatile organometallic complexes of lowered reactivity suitable for use in chemical vapor deposition of metal oxide films

Abstract

Novel ligated compounds of tin, titanium, and zinc are useful as matal oxide CVD precursor compounds without the detriments of extreme reactivity yet maintaining the ability to produce high quality metal oxide coating by contact with heated substrates.

Term

Term ended

Projected expiry passed 30 November 2021, 4.8 years ago.

  1. Priority
  2. Filed
  3. Published
  4. Projected expiry
  5. Today

12 members in 6 offices

This recordMember, by publication datePriority claim

Priority claims6

Priority claims
DocumentOfficeKindDate
73223300United States of AmericaA
0144903United States of AmericaW
09732233–––
PCTUS0144903–––
US20000732233–––
WO2001US44903–––

Members12

Family members, oldest first
DocumentOfficeKind
US2002071912A1United States of AmericaA1
WO0246242A2World Intellectual Property Organization (WIPO)A2
AU3652502AThis recordAustraliaA
US6416814B1United States of AmericaB1
WO0246242A3World Intellectual Property Organization (WIPO)A3
US2002136832A1United States of AmericaA1
TW541352BTaiwan Province of ChinaB
US6627765B2United States of AmericaB2
EP1356132A2European Patent Office (EPO)A2
EP1356132A4European Patent Office (EPO)A4
EP1356132B1European Patent Office (EPO)B1
DE60143816D1GermanyD1