ATE487231T1
Organosilicate resin formulation for use in microelectronic devices
Abstract
This record has no abstract on file.
Term
Term ended
Projected expiry passed 31 March 2024, 2.5 years ago.
- Priority
- Filed
- Published
- Projected expiry
- Today
17 members in 9 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 45973003 | United States of America | P | |
| 2004010330 | United States of America | W |
Members17
| Document | Office | Kind | |
|---|---|---|---|
| WO2004090965A2 | World Intellectual Property Organization (WIPO) | A2 | |
| TW200505966A | Taiwan Province of China | A | |
| WO2004090965A3 | World Intellectual Property Organization (WIPO) | A3 | |
| KR20050108417A | Republic of Korea | A | |
| EP1614151A2 | European Patent Office (EPO) | A2 | |
| CN1768418A | China | A | |
| JP2006522861A | Japan | A | |
| US2007185298A1 | United States of America | A1 | |
| EP1614151B1 | European Patent Office (EPO) | B1 | |
| AT487231T | Austria | T | |
| ATE487231T1This record | Austria | T1 | |
| DE602004029879D1 | Germany | D1 | |
| CN1768418B | China | B | |
| EP2278611A1 | European Patent Office (EPO) | A1 | |
| US8178159B2 | United States of America | B2 | |
| EP2278611B1 | European Patent Office (EPO) | B1 | |
| KR101197526B1 | Republic of Korea | B1 |
Numbers
- Application
- 4758855
Titles2
- English
- METHOD FOR PRODUCING AN ANTI-REFLECTIVE COATING
- German
- VERFAHREN ZUR HERSTELLUNG EINER ANTIREFLEKTIVEN BESCHICHTUNG
Classification
- CPC, 10
- C09D4/00
- C09D183/04
- G03F7/0045
- G03F7/0755
- G03F7/0757
- G03F7/091
- H10P14/6922
- H10P14/665
- H10P14/6686
- H10P14/6342
- IPC, 5
- H10P14 68
- C09D183 04
- G03F7 004
- G03F7 075
- G03F7 09