AT487231T
Organosilicate resin formulation for use in microelectronic devices
Abstract
In electronic devices of manufacturing in the used to formed a layer or multilayer of can curing of organic Portland combination property, it including: (a) has at least a contains and Silicon Atomic combined of Ene not saturated group of n-oxygen base or n oxygen base of Silicon n-; b) has at least a contains and Silicon Atomic combined of Fong ring group of n-oxygen base or n oxygen base of Silicon n-; (c) potential acid catalyst and (d) any selected of, has at least a and Silicon Atomic combined of C1-C6 alkyl of n-oxygen base or n oxygen base of Silicon n-.
Term
No projected expiry on record.
- Priority
- Filed
- Granted
- Today
17 members in 9 offices
Priority claims2
| Document | Office | Kind | Date |
|---|---|---|---|
| 45973003 | United States of America | P | |
| 2004010330 | United States of America | W |
Members17
| Document | Office | Kind | |
|---|---|---|---|
| WO2004090965A2 | World Intellectual Property Organization (WIPO) | A2 | |
| TW200505966A | Taiwan Province of China | A | |
| WO2004090965A3 | World Intellectual Property Organization (WIPO) | A3 | |
| KR20050108417A | Republic of Korea | A | |
| EP1614151A2 | European Patent Office (EPO) | A2 | |
| CN1768418A | China | A | |
| JP2006522861A | Japan | A | |
| US2007185298A1 | United States of America | A1 | |
| EP1614151B1 | European Patent Office (EPO) | B1 | |
| AT487231TThis record | Austria | T | |
| ATE487231T1 | Austria | T1 | |
| DE602004029879D1 | Germany | D1 | |
| CN1768418B | China | B | |
| EP2278611A1 | European Patent Office (EPO) | A1 | |
| US8178159B2 | United States of America | B2 | |
| EP2278611B1 | European Patent Office (EPO) | B1 | |
| KR101197526B1 | Republic of Korea | B1 |
1 legal event, as the office reported them to INPADOC
Events
| Event | Code | |
|---|---|---|
| Ceased as to paragraph 5 lit. 3 law introducing patent treatiesCeasedRER | RER |
Numbers
- Application
- 4758855
Titles2
- German
- VERFAHREN ZUR HERSTELLUNG EINER ANTIREFLEKTIVEN BESCHICHTUNG
- English
- METHOD FOR PRODUCING AN ANTI-REFLECTIVE COATING
Classification
- CPC, 10
- C09D4/00
- C09D183/04
- G03F7/0045
- G03F7/0755
- G03F7/0757
- G03F7/091
- H01L21/02126
- H01L21/02216
- H01L21/02282
- H01L21/3122
- IPC, 5
- C09D183 04
- G03F7 004
- G03F7 075
- G03F7 09
- H01L21 312