Fluxless flip chip interconnection
Abstract
A flip chip method of joining a chip and a substrate is described. A thermo-compression bonder is utilized to align the chip and substrate and apply a contact force to hold solder bumps on the substrate against metal bumps on the chip. The chip is rapidly heated from its non-native side by a pulse heater in the head of the bonder until the re-flow flow temperature of the solder bumps is reached. Proximate with reaching the re-flow temperature at the solder bumps, the contact force is released. The solder is held above its re-flow temperature for several seconds to facilitate wetting of the substrate's metal protrusions and joining. Metal caps comprised of a noble metal such as palladium is applied to the surface of the metal bumps to prevent the metal bumps (which generally comprise a highly-conductive and highly-reactive metal such as copper) from oxidizing in the elevated temperatures just prior to and during the re-flow operation.
Term
Term ended
Projected expiry passed 21 February 2022, 4.6 years ago.
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- Projected expiry
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18 members in 11 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 82133101 | United States of America | A |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| US2002140094A1 | United States of America | A1 | |
| WO02080271A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU2002245476A1 | Australia | A1 | |
| US6495397B2 | United States of America | B2 | |
| WO02080271A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1386356A2 | European Patent Office (EPO) | A2 | |
| KR20040055734A | Republic of Korea | A | |
| CN1513206A | China | A | |
| HK1061741A1 | Hong Kong, China | A1 | |
| JP2005500672A | Japan | A | |
| KR100555354B1 | Republic of Korea | B1 | |
| MY122941A | Malaysia | A | |
| EP1386356B1 | European Patent Office (EPO) | B1 | |
| AT360888T | Austria | T | |
| ATE360888T1This record | Austria | T1 | |
| DE60219779D1 | Germany | D1 | |
| DE60219779T2 | Germany | T2 | |
| CN100440496C | China | C |
Numbers
- Application
- 2713638
Titles2
- English
- FLUX-FREE FLIP-CHIP CONNECTION
- German
- FLUSSMITTELFREIE FLIP-CHIP-VERBINDUNG
Classification
- CPC, 21
- H05K3/3436
- H10W72/012
- H10W72/071
- H05K3/244
- H05K3/3494
- H05K2201/0367
- H05K2201/10674
- H05K2203/0195
- H05K3/24
- Y10T29/49144
- Y02P70/50
- H10W72/251
- H10W72/252
- H10W72/07253
- H10W72/234
- H10W72/07232
- H10W72/241
- H10W72/072
- H10W72/07236
- H10W72/07141
- H10W20/40
- IPC, 4
- H01L23 485
- H05K3 24
- H05K3 34
- H10W74 01