ATE333147T1

Method for producing a semiconductor-metal contact through a dielectric layer

Abstract

A method of electrically contacting a semiconductor layer ( 13 ) coated with at least one dielectic layer ( 12 ) which is coated with a metal layer the metal layer ( 11 ) is applied on the dielectric layer ( 12 ) and the metal layer ( 11 ) is temporarily locally heated in a line, linear or dotted pattern by means of a source of radiation ( 9 ) in a controlled manner in such a way that a local molten mixture, is formed consisting exclusively of the metal layer ( 11 ), the dielectric layer ( 12 ) and the semiconductor layer ( 13 ) are located directly underneath the metal layer ( 11 ) and upon solidification, leads to an electrical contact between the semiconductor layer ( 13 ) and the metal layer ( 11 ).

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Term ended

Projected expiry passed 30 August 2021, 5.1 years ago.

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18 members in 11 offices

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10046170GermanyA

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WO0225742A2World Intellectual Property Organization (WIPO)A2
AU9181201AAustraliaA
DE10046170A1GermanyA1
WO0225742A3World Intellectual Property Organization (WIPO)A3
EP1319254A2European Patent Office (EPO)A2
JP2004509474AJapanA
US2004097062A1United States of AmericaA1
US6982218B2United States of AmericaB2
EP1319254B1European Patent Office (EPO)B1
AU2001291812B2AustraliaB2
AT333147TAustriaT
ATE333147T1This recordAustriaT1
DE50110460D1GermanyD1
DK1319254T3DenmarkT3
PT1319254EPortugalE
ES2267815T3SpainT3
JP4005912B2JapanB2
CY1106197T1CyprusT1