Method for producing a semiconductor-metal contact through a dielectric layer
Abstract
A method of electrically contacting a semiconductor layer ( 13 ) coated with at least one dielectic layer ( 12 ) which is coated with a metal layer the metal layer ( 11 ) is applied on the dielectric layer ( 12 ) and the metal layer ( 11 ) is temporarily locally heated in a line, linear or dotted pattern by means of a source of radiation ( 9 ) in a controlled manner in such a way that a local molten mixture, is formed consisting exclusively of the metal layer ( 11 ), the dielectric layer ( 12 ) and the semiconductor layer ( 13 ) are located directly underneath the metal layer ( 11 ) and upon solidification, leads to an electrical contact between the semiconductor layer ( 13 ) and the metal layer ( 11 ).
Term
Term ended
Projected expiry passed 30 August 2021, 5.1 years ago.
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18 members in 11 offices
Priority claims1
| Document | Office | Kind | Date |
|---|---|---|---|
| 10046170 | Germany | A |
Members18
| Document | Office | Kind | |
|---|---|---|---|
| WO0225742A2 | World Intellectual Property Organization (WIPO) | A2 | |
| AU9181201A | Australia | A | |
| DE10046170A1 | Germany | A1 | |
| WO0225742A3 | World Intellectual Property Organization (WIPO) | A3 | |
| EP1319254A2 | European Patent Office (EPO) | A2 | |
| JP2004509474A | Japan | A | |
| US2004097062A1 | United States of America | A1 | |
| US6982218B2 | United States of America | B2 | |
| EP1319254B1 | European Patent Office (EPO) | B1 | |
| AU2001291812B2 | Australia | B2 | |
| AT333147T | Austria | T | |
| ATE333147T1This record | Austria | T1 | |
| DE50110460D1 | Germany | D1 | |
| DK1319254T3 | Denmark | T3 | |
| PT1319254E | Portugal | E | |
| ES2267815T3 | Spain | T3 | |
| JP4005912B2 | Japan | B2 | |
| CY1106197T1 | Cyprus | T1 |
Numbers
- Application
- 1971984
Titles2
- English
- METHOD FOR PRODUCING A SEMICONDUCTOR-METAL CONTACT THROUGH A DIELECTRIC LAYER
- German
- VERFAHREN ZUR HERSTELLUNG EINES HALBLEITER- METALLKONTAKTES DURCH EINE DIELEKTRISCHE SCHICHT
Classification
- CPC, 5
- H10F71/00
- H10F71/134
- H10F77/211
- H10P34/42
- Y02E10/50
- IPC, 6
- H01L31 04
- H10P14 40
- H01L31 0224
- H01L31 18
- H10P95 00
- H10P95 90